基于QPD的多自由度光學(xué)測(cè)頭研發(fā)及應(yīng)用
發(fā)布時(shí)間：2018-12-20 10:07
【摘要】：隨著科學(xué)研究的發(fā)展,科學(xué)實(shí)驗(yàn)和工業(yè)生產(chǎn)對(duì)多自由度測(cè)量技術(shù)提出了高精度和適用性的需求。多自由度測(cè)量技術(shù)已非一般機(jī)械式傳感器所能解決,目前廣泛研究的多自由度測(cè)量系統(tǒng)如激光干涉儀等由于成本高昂、體積大、裝配復(fù)雜等原因限制了其廣泛應(yīng)用,因此設(shè)計(jì)出一種造價(jià)低、結(jié)構(gòu)簡單、體積小、精度高的多自由度誤差測(cè)量傳感器顯得十分必要。本文在國家自然科學(xué)基金重大項(xiàng)目“功能形面結(jié)構(gòu)與性能的耦合建模與影響機(jī)理研究”(項(xiàng)目編號(hào):51490660/51490661)的支持下,研究一種基于QPD組件和半導(dǎo)體激光器的光學(xué)非接觸式測(cè)量裝置,最多能夠?qū)崿F(xiàn)四個(gè)自由度誤差(X、Y方向直線度誤差、偏擺角和俯仰角)的同時(shí)測(cè)量。本文首先闡述了國內(nèi)外在多自由度測(cè)量傳感器研究領(lǐng)域的發(fā)展?fàn)顩r,對(duì)基于各種測(cè)量方法的多自由度測(cè)量技術(shù)進(jìn)行了比較。然后設(shè)計(jì)了基于光電自準(zhǔn)直原理的四個(gè)自由度誤差(X、Y方向直線度誤差、偏擺角和俯仰角)的同時(shí)測(cè)量系統(tǒng),該系統(tǒng)在自準(zhǔn)直原理的基礎(chǔ)上分離出了一束測(cè)量二維位移的基準(zhǔn)光束。分析了角度測(cè)量對(duì)位移測(cè)量的誤差影響,并提出了解決的辦法,實(shí)現(xiàn)誤差分離。根據(jù)方案搭建了相應(yīng)的光路、設(shè)計(jì)了合理的機(jī)械結(jié)構(gòu)、完成了硬件電路和上位機(jī)軟件的編寫。通過對(duì)傳感器的標(biāo)定試驗(yàn),X方向和Y方向位移在±200μm范圍內(nèi)測(cè)量精度在1μm左右,偏擺角的測(cè)量精度能夠達(dá)到2″,俯仰角的測(cè)量精度能夠達(dá)到3″(在800″量程范圍內(nèi))。此外還建立了角度偏轉(zhuǎn)對(duì)位移影響的誤差模型,實(shí)現(xiàn)了位移測(cè)量和角度測(cè)量的誤差分離。最后將標(biāo)定好的傳感器用于測(cè)量機(jī)床主軸系統(tǒng)的熱誤差實(shí)驗(yàn)當(dāng)中。
[Abstract]:With the development of scientific research, scientific experiments and industrial production require high accuracy and applicability of multi-degree-of-freedom measurement technology. The measurement technology of multi-degree of freedom can not be solved by general mechanical sensor. At present, the widely studied multi-degree of freedom measurement system, such as laser interferometer, is widely used because of its high cost, large volume and complicated assembly. Therefore, it is necessary to design a low cost, simple structure, small volume and high precision multi-degree-of-freedom error measurement sensor. This paper is supported by the important project of the National Natural Science Foundation of China, "Research on the Coupling Modeling and influence Mechanism of the structure and performance of functional surfaces" (Project No.: 51490660 / 51490661). An optical non-contact measuring device based on QPD module and semiconductor laser is studied. It can realize simultaneous measurement of four degrees of freedom errors (XY direction straightness error, deflection angle and pitch angle) at most. In this paper, the development of multi-degree-of-freedom measurement sensors at home and abroad is described, and the multi-degree of freedom measurement techniques based on various measurement methods are compared. Based on the principle of photoelectric autocollimation, the simultaneous measurement system of four degrees of freedom errors (XY direction straightness error, deflection angle and pitch angle) is designed. Based on the principle of autocollimation, a reference beam for measuring two-dimensional displacement has been separated. The influence of angle measurement on displacement measurement error is analyzed, and the solution is put forward to realize error separation. According to the scheme, the corresponding optical circuit is built, the reasonable mechanical structure is designed, and the hardware circuit and upper computer software are written. Through the calibration test of the sensor, the measuring accuracy of the displacement in the X and Y directions is about 1 渭 m in the range of 鹵200 渭 m, the accuracy of the yaw angle can reach 2 ", and the measurement accuracy of the pitch angle can reach 3" (within 800 "range). In addition, the error model of the influence of angle deflection on displacement is established, and the error separation between displacement measurement and angle measurement is realized. Finally, the calibrated sensor is used to measure the thermal error of machine tool spindle system.
【學(xué)位授予單位】：合肥工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TH744.5
本文編號(hào)：2387840
[Abstract]:With the development of scientific research, scientific experiments and industrial production require high accuracy and applicability of multi-degree-of-freedom measurement technology. The measurement technology of multi-degree of freedom can not be solved by general mechanical sensor. At present, the widely studied multi-degree of freedom measurement system, such as laser interferometer, is widely used because of its high cost, large volume and complicated assembly. Therefore, it is necessary to design a low cost, simple structure, small volume and high precision multi-degree-of-freedom error measurement sensor. This paper is supported by the important project of the National Natural Science Foundation of China, "Research on the Coupling Modeling and influence Mechanism of the structure and performance of functional surfaces" (Project No.: 51490660 / 51490661). An optical non-contact measuring device based on QPD module and semiconductor laser is studied. It can realize simultaneous measurement of four degrees of freedom errors (XY direction straightness error, deflection angle and pitch angle) at most. In this paper, the development of multi-degree-of-freedom measurement sensors at home and abroad is described, and the multi-degree of freedom measurement techniques based on various measurement methods are compared. Based on the principle of photoelectric autocollimation, the simultaneous measurement system of four degrees of freedom errors (XY direction straightness error, deflection angle and pitch angle) is designed. Based on the principle of autocollimation, a reference beam for measuring two-dimensional displacement has been separated. The influence of angle measurement on displacement measurement error is analyzed, and the solution is put forward to realize error separation. According to the scheme, the corresponding optical circuit is built, the reasonable mechanical structure is designed, and the hardware circuit and upper computer software are written. Through the calibration test of the sensor, the measuring accuracy of the displacement in the X and Y directions is about 1 渭 m in the range of 鹵200 渭 m, the accuracy of the yaw angle can reach 2 ", and the measurement accuracy of the pitch angle can reach 3" (within 800 "range). In addition, the error model of the influence of angle deflection on displacement is established, and the error separation between displacement measurement and angle measurement is realized. Finally, the calibrated sensor is used to measure the thermal error of machine tool spindle system.
【學(xué)位授予單位】：合肥工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TH744.5
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