【摘要】：利用有限元分析軟件ANSYS建立了FBAR三維振動(dòng)模型,分析了不同有效區(qū)域形狀(方形、圓形、非正五邊形)、不同有效區(qū)域面積(10 000μm~2、15 625μm~2、22 500μm~2、30 625μm~2、40 000μm~2)和不同壓電層材料(AlN、ZnO)對(duì)其橫向雜散模式的影響,得到了阻抗特性曲線及不圓度(NC)。有效區(qū)域形狀為非正五邊形時(shí),得到最平滑的阻抗曲線和最小的NC值為0.015 1;有效區(qū)域面積為40 000μm~2時(shí)得到最小的NC值為0.005 5;在相同諧振頻率(1.76GHz)下,用ZnO作壓電材料時(shí)得到較小的NC值為0.012 9。
[Abstract]:The three-dimensional vibration model of FBAR was established by using the finite element analysis software ANSYS. The shapes of different effective regions (square, circular, non-normal pentagonal), the effective area of different effective areas (10 000 渭 m ~ 2 15 625 渭 m) and different piezoelectric layer materials (AlN,) were analyzed by using the finite element analysis software ANSYS. The impedance characteristic curve and non-circular degree (NC). Were obtained by the influence of ZnO on its transverse stray mode. The smoothest impedance curve and the minimum NC value are obtained when the shape of the effective region is irregular pentagonal, and the minimum NC value is 0.005 5 when the effective region area is 40 000 渭 m ~ 2. At the same resonant frequency (1.76GHz), a smaller NC value of 0.012 9 is obtained when ZnO is used as piezoelectric material.
【作者單位】： 中國科學(xué)院聲學(xué)研究所聲場聲信息國家重點(diǎn)實(shí)驗(yàn)室;
【基金】：國家自然科學(xué)基金資助項(xiàng)目(11374327)
【分類號(hào)】：TN65
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本文編號(hào)：2374692