【摘要】：面發(fā)射分布反饋半導(dǎo)體激光器是一種通過(guò)采用F-P腔進(jìn)行激光增益振蕩并借助二階光柵一級(jí)衍射實(shí)現(xiàn)表面出光的高功率、高光束質(zhì)量、窄線寬、低溫漂的半導(dǎo)體激光器。制備工藝簡(jiǎn)單、工作性能優(yōu)良且穩(wěn)定等優(yōu)點(diǎn)使其在激光雷達(dá)、激光探測(cè)、信息處理、激光工業(yè)加工等眾多領(lǐng)域具有廣闊的應(yīng)用前景。本文主要對(duì)面發(fā)射分布反饋半導(dǎo)體激光器結(jié)構(gòu)設(shè)計(jì)及工藝制備過(guò)程中涉及的關(guān)鍵技術(shù)進(jìn)行了研究。1.對(duì)面發(fā)射分布反饋半導(dǎo)體激光器的國(guó)內(nèi)外發(fā)展現(xiàn)狀進(jìn)行了調(diào)研及全面分析,并就其進(jìn)一步工作內(nèi)容做出了討論和展望。2.對(duì)面發(fā)射分布反饋激光器出光口的設(shè)計(jì)及制備提出了兩種具體的可行方案,并就其方案結(jié)構(gòu)進(jìn)行了設(shè)計(jì)、優(yōu)化及分析。兩種方案結(jié)構(gòu)(單層氧化鉿增透膜和亞波長(zhǎng)抗反射光柵)均滿足器件的應(yīng)用要求(透射率99.4%)。3.對(duì)面發(fā)射分布反饋激光器實(shí)現(xiàn)垂直出光功能的內(nèi)部關(guān)鍵結(jié)構(gòu)——二階衍射光柵進(jìn)行了初步計(jì)算及制作,獲得周期分別為300nm和450nm,脊高分別為185nm和200nm的光柵并摸索出完整的制作工藝步驟。4.探索研究了外腔各元件(內(nèi)諧振腔輸出端面、分光板以及光柵)對(duì)復(fù)合外腔半導(dǎo)體激光器閾值增益的影響。結(jié)合對(duì)復(fù)合外腔的整體分析,探究了復(fù)合外腔激光器進(jìn)一步優(yōu)化的可能。
[Abstract]:The surface emission distributed feedback semiconductor laser is a kind of semiconductor laser with high power, high beam quality, narrow linewidth and low temperature drift by using F-P cavity for laser gain oscillation and second-order grating first order diffraction. The advantages of simple preparation process, excellent performance and stability make it have a broad application prospect in many fields such as laser radar, laser detection, information processing, laser industrial processing and so on. In this paper, the key techniques involved in the structure design and fabrication process of the facet emitting distributed feedback semiconductor laser are studied. 1. In this paper, the current situation of the development of facet emitting distributed feedback semiconductor lasers at home and abroad is investigated and comprehensively analyzed, and its further work is discussed and prospected. 2. Two feasible schemes for the design and fabrication of the optical outlet of a facet distributed feedback laser are proposed, and the scheme structure is designed, optimized and analyzed. Both schemes (single layer hafnium oxide antireflection film and subwavelength anti-reflection grating) meet the requirements of device application (transmittance 99.4%). The second order diffraction grating, which is the internal key structure of the vertical light output, is calculated and fabricated. The periods are 300nm and 450 nm, respectively. The raster with ridge height of 185nm and 200nm were groped out. 4. 4. The effects of external cavity elements (internal cavity output end face, splitter and grating) on the threshold gain of a compound external cavity semiconductor laser are investigated. Combined with the overall analysis of the complex external cavity, the possibility of further optimization of the compound external cavity laser is explored.
【學(xué)位授予單位】：長(zhǎng)春理工大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TN248.4

【參考文獻(xiàn)】

相關(guān)期刊論文 前9條

1 李斌;涂嬪;徐勇躍;李哲;余安瀾;王新兵;左都羅;;405nm波段光柵外腔窄線寬藍(lán)紫光半導(dǎo)體激光器[J];激光與光電子學(xué)進(jìn)展;2015年03期

2 艾萬(wàn)君;熊勝明;;單層二氧化鉿(HfO_2)薄膜的特性研究[J];光電工程;2012年02期

3 郭萬(wàn)紅;劉俊岐;陳劍燕;李路;王利軍;劉峰奇;王占國(guó);;Single-mode surface-emitting distributed feedback quantum-cascade lasers based on hybrid waveguide structure[J];Chinese Optics Letters;2011年06期

4 雷平順;薛力芳;何軍;曾華林;付躍剛;周燕;;Littrow型光柵外腔半導(dǎo)體激光器的輸出特性分析[J];激光與光電子學(xué)進(jìn)展;2011年03期

5 郭萬(wàn)紅;陸全勇;劉俊岐;張偉;江宇超;李路;王利軍;劉峰奇;王占國(guó);;Analysis of surface emitting distributed-feedback quantum cascade laser based on a surface-plasmon waveguide[J];半導(dǎo)體學(xué)報(bào);2010年11期

6 馬佑橋;周駿;孫鐵囤;邸明東;丁海芳;;基于等效介質(zhì)理論的光伏電池亞波長(zhǎng)光柵減反結(jié)構(gòu)設(shè)計(jì)[J];太陽(yáng)能學(xué)報(bào);2010年10期

7 葉淑娟;秦莉;戚曉東;胡永生;張楠;寧永強(qiáng);王立軍;;二階光柵分布反饋半導(dǎo)體激光器的出光特性[J];中國(guó)激光;2010年09期

8 郭萬(wàn)紅;劉俊岐;陸全勇;張偉;李路;王利軍;劉峰奇;王占國(guó);;Design of surface emitting distributed feedback quantum cascade laser with single-lobe far-field pattern and high outcoupling efficiency[J];Chinese Physics B;2010年05期

9 江鵬飛,趙偉瑞,張靜娟,謝福增;窄線寬的外腔半導(dǎo)體激光器[J];激光技術(shù);2004年02期

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