長行程精密直線運動平臺的滑�？刂蒲芯�
發(fā)布時間：2018-11-13 17:26
【摘要】：光刻機系統(tǒng)中涉及大量的運動部件,它們的形式、指標各不相同,通過協(xié)調(diào)完成換臺、步進、掃描等復雜運動,但其本質(zhì)都屬于運動平臺。由于系統(tǒng)對運動控制極高的性能要求,有必要專門針對運動平臺展開研究,因此本文選取了光刻機系統(tǒng)中具有典型代表性的長行程精密直線運動平臺展開研究。為了抑制平臺上存在的各種干擾,本文將滑模控制應用到平臺上,經(jīng)過仿真和試驗驗證了控制器的有效性,使系統(tǒng)跟蹤精度和快速性得到了提高。首先,對運動平臺的工作特點以及各部分結構、性能指標進行介紹,并針對平臺的運動特點規(guī)劃了S曲線,作為參考軌跡。通過對平臺上的干擾進行分析,指出平臺上存在非線性擾動、參數(shù)攝動、模型不確定性以及機械諧振等不利于控制的情況。最后通過掃頻實驗獲取了平臺的頻域響應,并利用二階傳遞函數(shù)擬合,從而獲得平臺的傳遞函數(shù)。其次,為了克服平臺上的各種不利條件,提升系統(tǒng)性能,在掃頻獲得的傳遞函數(shù)基礎上,提出了一種利用改進型粒子群算法進行參數(shù)優(yōu)化的滑�？刂品椒�。該方法采用線性滑模面,通過邊界層方法對滑模項加以改進,以達到抑制抖振的目的。最后在仿真時表現(xiàn)出了比PID控制方法更強的干擾抑制能力,并取得了更好跟蹤精度和快速性。再次,上述滑模算法雖然相對傳統(tǒng)的PID算法性能有提升,但是存在:快速性有待提高,抖振問題較為嚴重的問題,因此有必要對算法進行改進。為了提高快速性,將之前的滑模面換成了終端型滑模面,提升了狀態(tài)到達滑模面上的速度,并且提高了精度。為了抑制抖振,摒棄了之前的邊界層法,而選擇了二階滑模。這種控制方法在不降低滑�？箶_動能力的情況下大幅抑制了抖振,而且跟蹤精度進一步提升。通過將三種滑�？刂品椒ㄟM行仿真對比,結果表明了二階非奇異快速終端算法的優(yōu)越性。最后,對運動平臺控制系統(tǒng)的各個環(huán)節(jié)進行介紹,將所上述各種控制方法在硬件平臺上實現(xiàn),控制運動平臺進行實驗。從跟蹤精度、快速性、抖振情況三個方面對各個控制算法進行對比,證明了二階非奇異快速終端滑模的優(yōu)越性,使系統(tǒng)性能得到了提升。
[Abstract]:A large number of moving parts are involved in the lithography system, their forms and indexes are different, and the complex motion such as changing, stepping, scanning and so on are completed through coordination, but their essence belongs to the motion platform. Due to the high performance requirement of motion control, it is necessary to study the motion platform. Therefore, this paper selects the typical long-stroke precision linear motion platform in the lithography system to carry out the research. In order to suppress all kinds of interference on the platform, the sliding mode control is applied to the platform in this paper. The effectiveness of the controller is verified by simulation and experiment, and the tracking accuracy and rapidity of the system are improved. Firstly, the working characteristics, the structure and the performance index of the platform are introduced, and the S curve is designed as the reference track according to the motion characteristics of the platform. By analyzing the disturbance on the platform, it is pointed out that the nonlinear disturbance, parameter perturbation, model uncertainty and mechanical resonance are not conducive to the control of the platform. Finally, the frequency domain response of the platform is obtained by the sweep experiment, and the second order transfer function is used to fit the platform transfer function. Secondly, in order to overcome the disadvantages of the platform and improve the performance of the system, a sliding mode control method using improved particle swarm optimization (PSO) is proposed on the basis of the transfer function obtained by sweep frequency. The linear sliding mode surface is used to improve the sliding mode term through the boundary layer method in order to suppress buffeting. Finally, the simulation results show that the interference suppression ability is stronger than the PID control method, and better tracking accuracy and rapidity are obtained. Thirdly, although the performance of the sliding mode algorithm is improved compared with the traditional PID algorithm, there are some problems, such as the need to improve the rapidity and the more serious buffeting problem, so it is necessary to improve the algorithm. In order to improve the rapidity, the former sliding mode surface is replaced by the terminal sliding mode surface, which improves the speed of the state reaching the sliding mode surface and improves the accuracy. In order to suppress buffeting, the boundary layer method is abandoned and the second-order sliding mode is chosen. This control method can greatly suppress the chattering and improve the tracking accuracy without reducing the anti-disturbance ability of the sliding mode. The simulation results of three sliding mode control methods show the superiority of the second order nonsingular fast terminal algorithm. Finally, every link of the motion platform control system is introduced, the above control methods are realized on the hardware platform, and the motion platform is controlled for experiment. The control algorithms are compared in terms of tracking accuracy, rapidity and buffeting. The advantages of the sliding mode of the second order nonsingular fast terminal are proved, and the performance of the system is improved.
【學位授予單位】：哈爾濱工業(yè)大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TP273;TN405
本文編號：2329844
[Abstract]:A large number of moving parts are involved in the lithography system, their forms and indexes are different, and the complex motion such as changing, stepping, scanning and so on are completed through coordination, but their essence belongs to the motion platform. Due to the high performance requirement of motion control, it is necessary to study the motion platform. Therefore, this paper selects the typical long-stroke precision linear motion platform in the lithography system to carry out the research. In order to suppress all kinds of interference on the platform, the sliding mode control is applied to the platform in this paper. The effectiveness of the controller is verified by simulation and experiment, and the tracking accuracy and rapidity of the system are improved. Firstly, the working characteristics, the structure and the performance index of the platform are introduced, and the S curve is designed as the reference track according to the motion characteristics of the platform. By analyzing the disturbance on the platform, it is pointed out that the nonlinear disturbance, parameter perturbation, model uncertainty and mechanical resonance are not conducive to the control of the platform. Finally, the frequency domain response of the platform is obtained by the sweep experiment, and the second order transfer function is used to fit the platform transfer function. Secondly, in order to overcome the disadvantages of the platform and improve the performance of the system, a sliding mode control method using improved particle swarm optimization (PSO) is proposed on the basis of the transfer function obtained by sweep frequency. The linear sliding mode surface is used to improve the sliding mode term through the boundary layer method in order to suppress buffeting. Finally, the simulation results show that the interference suppression ability is stronger than the PID control method, and better tracking accuracy and rapidity are obtained. Thirdly, although the performance of the sliding mode algorithm is improved compared with the traditional PID algorithm, there are some problems, such as the need to improve the rapidity and the more serious buffeting problem, so it is necessary to improve the algorithm. In order to improve the rapidity, the former sliding mode surface is replaced by the terminal sliding mode surface, which improves the speed of the state reaching the sliding mode surface and improves the accuracy. In order to suppress buffeting, the boundary layer method is abandoned and the second-order sliding mode is chosen. This control method can greatly suppress the chattering and improve the tracking accuracy without reducing the anti-disturbance ability of the sliding mode. The simulation results of three sliding mode control methods show the superiority of the second order nonsingular fast terminal algorithm. Finally, every link of the motion platform control system is introduced, the above control methods are realized on the hardware platform, and the motion platform is controlled for experiment. The control algorithms are compared in terms of tracking accuracy, rapidity and buffeting. The advantages of the sliding mode of the second order nonsingular fast terminal are proved, and the performance of the system is improved.
【學位授予單位】：哈爾濱工業(yè)大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TP273;TN405
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