【摘要】：光學(xué)微環(huán)諧振器的概念和結(jié)構(gòu)自1969年由Marcatili提出以來,以其體積小、損耗低、高Q值、高靈敏度、易于集成等諸多優(yōu)點(diǎn),在光學(xué)通信、信息處理和傳感等不同領(lǐng)域引起了廣泛關(guān)注。經(jīng)過30多年理論和實(shí)驗(yàn)上的深入研究,不論是在特殊應(yīng)用領(lǐng)域,還是在多樣性的材料選擇及其性能改善上都取得了很大程度的發(fā)展。傳統(tǒng)的傳感器具有體積偏大、集成度低、結(jié)構(gòu)復(fù)雜、測量范圍有限、靈敏度低等缺點(diǎn),在很多應(yīng)用領(lǐng)域表現(xiàn)出一定的局限性。近年來,傳感器正處于由傳統(tǒng)型向新型傳感器轉(zhuǎn)型的發(fā)展階段,許多新穎傳感器逐漸出現(xiàn),微環(huán)傳感器就是具有代表性的一種,基于不同結(jié)構(gòu)、材料和應(yīng)用領(lǐng)域的微環(huán)傳感器在理論和實(shí)踐上都得到了廣泛的研究。本文提出了基于U型波導(dǎo)耦合單微環(huán)結(jié)構(gòu)的光學(xué)傳感理論與應(yīng)用研究,并通過理論仿真獲得了較高的靈敏度和大的測量范圍,本文主要工作為:首先,闡述了微環(huán)傳感器的研究意義,并以近期報(bào)道出來的具有代表性的微環(huán)加速度傳感器、溫度傳感器以及生物化學(xué)傳感器為例,詳細(xì)介紹了微環(huán)傳感器的研究現(xiàn)狀,重點(diǎn)分析了微環(huán)結(jié)構(gòu)緊湊,集成度高、微型化、靈敏度高等特點(diǎn)。其次,以光波導(dǎo)和耦合模理論為基礎(chǔ),介紹了微環(huán)諧振器基本的研究方法—傳輸矩陣法,并詳細(xì)介紹了微環(huán)的基本原理、主要的性能參數(shù)、數(shù)學(xué)模型以及制造工藝,并采用U型波導(dǎo)耦合單微環(huán)結(jié)構(gòu)作為光學(xué)傳感器的數(shù)學(xué)模型,通過傳輸矩陣法分析了其傳輸特性,并分別討論了耦合系數(shù)、損耗、波導(dǎo)有效折射率、微環(huán)半徑以及U型波導(dǎo)兩個(gè)耦合點(diǎn)之間的間距對于輸出光譜的影響,為此類光學(xué)傳感應(yīng)用研究與設(shè)計(jì)提供了理論基礎(chǔ)。最后,對基于U型波導(dǎo)耦合單微環(huán)結(jié)構(gòu)的濕度傳感器及溫度傳感器進(jìn)行傳感特性分析。濕度傳感器采用聚酰亞胺為感濕介質(zhì),基本原理為:相對濕度的變化引起輸出光譜的漂移,并討論了最佳感濕部位的選擇方案,通過仿真發(fā)現(xiàn)其靈敏度比傳統(tǒng)的濕度傳感器有了大幅度提高,并分析了抑制溫度干擾的措施;溫度傳感器采用SOI為材料,基本原理為:溫度的變化引起有效折射率變化,導(dǎo)致輸出光譜漂移。通過仿真發(fā)現(xiàn)其測量范圍近似為傳統(tǒng)單微環(huán)溫度傳感器的兩倍,但仍較小,進(jìn)而采取減小半徑的方式進(jìn)一步增大了溫度測量范圍,但會增加彎曲損耗,因此分析了減小彎曲損耗的方法。
[Abstract]:The concept and structure of optical microring resonator have been proposed by Marcatili since 1969. It has many advantages such as small volume, low loss, high Q value, high sensitivity, easy integration and so on. Various fields such as information processing and sensing have attracted wide attention. After more than 30 years of theoretical and experimental research, a great deal of progress has been made in the field of special applications, in the selection of diverse materials and in the improvement of their properties. Traditional sensors have the disadvantages of large volume, low integration, complex structure, limited range of measurement, low sensitivity, and so on, so they have some limitations in many application fields. In recent years, the sensor is in the transition from the traditional type to the new type of sensor. Many novel sensors are emerging gradually. The microloop sensor is a representative one, based on different structures. Microloop sensors in materials and applications have been widely studied in theory and practice. In this paper, the theory and application of optical sensing based on U-shaped waveguide coupled single microloop structure are proposed, and the high sensitivity and wide measurement range are obtained by theoretical simulation. The main work of this paper is as follows: first of all, The research significance of microloop sensor is expounded, and the research status of microloop sensor is introduced in detail, taking the typical microloop accelerometer, temperature sensor and biochemistry sensor as examples. The characteristics of compact structure, high integration, miniaturization and high sensitivity are analyzed. Secondly, based on the theory of optical waveguide and coupling mode, the basic research method of microring resonator, the transmission matrix method, is introduced, and the basic principle, main performance parameters, mathematical model and manufacturing process of microloop are introduced in detail. Using the U-shaped waveguide coupled single microloop structure as the mathematical model of the optical sensor, the transmission characteristics are analyzed by the transmission matrix method, and the coupling coefficient, the loss and the effective refractive index of the waveguide are discussed, respectively. The influence of the radius of the microloop and the spacing between the two coupling points of the U-shaped waveguide on the output spectrum provides a theoretical basis for the application and design of this kind of optical sensor. Finally, the characteristics of humidity sensor and temperature sensor based on U-waveguide coupled single microloop structure are analyzed. The humidity sensor adopts polyimide as humidity sensitive medium. The basic principle is that the change of relative humidity causes the drift of output spectrum. The simulation results show that the sensitivity of the sensor is much higher than that of the traditional humidity sensor, and the measures to suppress the temperature interference are analyzed. The temperature sensor uses SOI as the material. The basic principle is that the change of temperature causes the change of effective refractive index and the output spectrum drift. It is found by simulation that the measurement range is approximately twice as large as that of the traditional single microloop temperature sensor, but is still small. By reducing the radius, the temperature measurement range is further enlarged, but the bending loss is increased. Therefore, the methods to reduce the bending loss are analyzed.
【學(xué)位授予單位】：燕山大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2015
【分類號】：TN629.1

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