【摘要】：全固態(tài)磁壓縮放電電路的高重復(fù)性、長(zhǎng)壽命等優(yōu)點(diǎn),使其在脈沖功率技術(shù)中的應(yīng)用越來(lái)越廣泛,尤其是光刻用準(zhǔn)分子激光器。隨著對(duì)光刻光源線寬、功率要求的提高,光刻用準(zhǔn)分子激光器一般采用雙腔結(jié)構(gòu),這種結(jié)構(gòu)對(duì)雙腔放電的延時(shí)抖動(dòng)異常敏感。因此,如何降低全固態(tài)磁壓縮放電電路的放電延時(shí)抖動(dòng)成為這類快脈沖放電電路的重點(diǎn)問(wèn)題。本論文基于實(shí)驗(yàn)室研制的用于準(zhǔn)分子激光器的快脈沖放電電路進(jìn)行研究,通過(guò)放電實(shí)驗(yàn)對(duì)電路的放電延時(shí)抖動(dòng)進(jìn)行分析,初步找出抖動(dòng)原因,發(fā)現(xiàn)使用一種特制的兩級(jí)耦合復(fù)位回路能夠顯著降低放電抖動(dòng)。為找出復(fù)位電路的工作機(jī)理,進(jìn)一步控制放電抖動(dòng),使用PSpice軟件對(duì)電路進(jìn)行分析。通過(guò)磁芯的實(shí)際B-H回線建立磁開(kāi)關(guān)、可飽和脈沖變壓器的仿真模型,使用ABM器件對(duì)充電電源進(jìn)行模擬,實(shí)現(xiàn)了對(duì)整體脈沖電路的仿真。通過(guò)建立的電路仿真模型,對(duì)電路放電抖動(dòng)的相關(guān)因素進(jìn)行仿真驗(yàn)證,發(fā)現(xiàn)初始充電電壓值1 V的電壓波動(dòng)會(huì)引起5-10 ns的放電抖動(dòng)。對(duì)兩級(jí)耦合復(fù)位回路進(jìn)行仿真分析,證實(shí)復(fù)位回路可將放電抖動(dòng)從μs量級(jí)降低到ns量級(jí),對(duì)復(fù)位電路的工作原理進(jìn)行研究,發(fā)現(xiàn)復(fù)位的關(guān)鍵因素在于復(fù)位回路可在放電過(guò)程之前有效地對(duì)各級(jí)磁芯狀態(tài)實(shí)現(xiàn)穩(wěn)定復(fù)位。通過(guò)對(duì)復(fù)位回路中復(fù)位線圈的繞組方式、繞組匝數(shù)、回路串聯(lián)電感、充電電源的開(kāi)關(guān)頻率進(jìn)行優(yōu)化分析,選取復(fù)位效果最佳參數(shù)可將放電抖動(dòng)降低到86 ns;通過(guò)在二級(jí)復(fù)位回路中引入合適的復(fù)位電流源,進(jìn)一步將抖動(dòng)控制到37 ns。同時(shí),對(duì)主回路中諧振電感及各級(jí)磁芯繞組匝數(shù)對(duì)電路工作狀態(tài)的影響進(jìn)行仿真分析。為實(shí)現(xiàn)對(duì)充電電源的精確模擬,通過(guò)分析電路充電電源的工作過(guò)程,計(jì)算電源相關(guān)參數(shù),設(shè)計(jì)相應(yīng)的控制電路實(shí)現(xiàn)對(duì)充電電源的仿真。通過(guò)驗(yàn)證,使用精確電源模型下的仿真電路在一定程度上更加符合實(shí)際電路的工作狀態(tài)。本論文建立的電路仿真模型,對(duì)低放電抖動(dòng)的脈沖放電激勵(lì)電路設(shè)計(jì)可提供參考。
[Abstract]:Due to the advantages of high repeatability and long life of all-solid-state magnetic compression discharge circuit, it has been widely used in pulse power technology, especially in excimer lasers used in lithography. With the improvement of the line width and power requirement of the lithography source, the excimer laser used in lithography generally adopts a dual-cavity structure, which is very sensitive to the delay jitter of the double-cavity discharge. Therefore, how to reduce the discharge delay jitter of all solid state magnetic compression discharge circuit becomes the key problem of this kind of fast pulse discharge circuit. In this paper, the fast pulse discharge circuit for excimer laser is studied in laboratory. The jitter of the circuit is analyzed by discharge experiment, and the cause of jitter is found out. It is found that using a special two-stage coupled reset loop can significantly reduce the discharge jitter. In order to find out the working mechanism of the reset circuit and further control the discharge jitter, the circuit is analyzed by PSpice software. The simulation model of magnetic switch and saturable pulse transformer is established through the actual B-H loop of magnetic core. The charging power supply is simulated by ABM device, and the whole pulse circuit is simulated. Based on the circuit simulation model, the related factors of the circuit discharge jitter are simulated and verified. It is found that the voltage fluctuation of the initial charge voltage of 1 V will cause the discharge jitter of 5-10 ns. The simulation analysis of the two-stage coupled reset circuit shows that the reset circuit can reduce the discharge jitter from 渭 s to ns. The working principle of the reset circuit is studied. It is found that the key factor of reset is that the reset loop can effectively reset the core states at all levels before the discharge process. By optimizing the winding mode, the number of turns of the reset coil, the series inductance of the circuit and the switching frequency of the charging power supply in the reset loop, Selecting the best parameters of reset effect can reduce the discharge jitter to 86 ns; and further control the jitter to 37 ns. by introducing an appropriate reset current source in the secondary reset loop. At the same time, the influence of resonant inductance and the turn number of core winding on the working state of the circuit is simulated and analyzed. In order to realize the accurate simulation of the charging power supply, by analyzing the working process of the circuit charging power supply, calculating the relevant parameters of the power supply, designing the corresponding control circuit to realize the simulation of the charging power supply. It is verified that the simulation circuit under the accurate power supply model is more in line with the working state of the actual circuit to a certain extent. The circuit simulation model established in this paper can provide a reference for the design of pulse discharge excitation circuit with low discharge jitter.
【學(xué)位授予單位】：華中科技大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TN248

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本文編號(hào)：2283426