快脈沖放電電路的延時抖動研究
發(fā)布時間：2018-10-20 14:18
【摘要】：全固態(tài)磁壓縮放電電路的高重復性、長壽命等優(yōu)點,使其在脈沖功率技術(shù)中的應(yīng)用越來越廣泛,尤其是光刻用準分子激光器。隨著對光刻光源線寬、功率要求的提高,光刻用準分子激光器一般采用雙腔結(jié)構(gòu),這種結(jié)構(gòu)對雙腔放電的延時抖動異常敏感。因此,如何降低全固態(tài)磁壓縮放電電路的放電延時抖動成為這類快脈沖放電電路的重點問題。本論文基于實驗室研制的用于準分子激光器的快脈沖放電電路進行研究,通過放電實驗對電路的放電延時抖動進行分析,初步找出抖動原因,發(fā)現(xiàn)使用一種特制的兩級耦合復位回路能夠顯著降低放電抖動。為找出復位電路的工作機理,進一步控制放電抖動,使用PSpice軟件對電路進行分析。通過磁芯的實際B-H回線建立磁開關(guān)、可飽和脈沖變壓器的仿真模型,使用ABM器件對充電電源進行模擬,實現(xiàn)了對整體脈沖電路的仿真。通過建立的電路仿真模型,對電路放電抖動的相關(guān)因素進行仿真驗證,發(fā)現(xiàn)初始充電電壓值1 V的電壓波動會引起5-10 ns的放電抖動。對兩級耦合復位回路進行仿真分析,證實復位回路可將放電抖動從μs量級降低到ns量級,對復位電路的工作原理進行研究,發(fā)現(xiàn)復位的關(guān)鍵因素在于復位回路可在放電過程之前有效地對各級磁芯狀態(tài)實現(xiàn)穩(wěn)定復位。通過對復位回路中復位線圈的繞組方式、繞組匝數(shù)、回路串聯(lián)電感、充電電源的開關(guān)頻率進行優(yōu)化分析,選取復位效果最佳參數(shù)可將放電抖動降低到86 ns;通過在二級復位回路中引入合適的復位電流源,進一步將抖動控制到37 ns。同時,對主回路中諧振電感及各級磁芯繞組匝數(shù)對電路工作狀態(tài)的影響進行仿真分析。為實現(xiàn)對充電電源的精確模擬,通過分析電路充電電源的工作過程,計算電源相關(guān)參數(shù),設(shè)計相應(yīng)的控制電路實現(xiàn)對充電電源的仿真。通過驗證,使用精確電源模型下的仿真電路在一定程度上更加符合實際電路的工作狀態(tài)。本論文建立的電路仿真模型,對低放電抖動的脈沖放電激勵電路設(shè)計可提供參考。
[Abstract]:Due to the advantages of high repeatability and long life of all-solid-state magnetic compression discharge circuit, it has been widely used in pulse power technology, especially in excimer lasers used in lithography. With the improvement of the line width and power requirement of the lithography source, the excimer laser used in lithography generally adopts a dual-cavity structure, which is very sensitive to the delay jitter of the double-cavity discharge. Therefore, how to reduce the discharge delay jitter of all solid state magnetic compression discharge circuit becomes the key problem of this kind of fast pulse discharge circuit. In this paper, the fast pulse discharge circuit for excimer laser is studied in laboratory. The jitter of the circuit is analyzed by discharge experiment, and the cause of jitter is found out. It is found that using a special two-stage coupled reset loop can significantly reduce the discharge jitter. In order to find out the working mechanism of the reset circuit and further control the discharge jitter, the circuit is analyzed by PSpice software. The simulation model of magnetic switch and saturable pulse transformer is established through the actual B-H loop of magnetic core. The charging power supply is simulated by ABM device, and the whole pulse circuit is simulated. Based on the circuit simulation model, the related factors of the circuit discharge jitter are simulated and verified. It is found that the voltage fluctuation of the initial charge voltage of 1 V will cause the discharge jitter of 5-10 ns. The simulation analysis of the two-stage coupled reset circuit shows that the reset circuit can reduce the discharge jitter from 渭 s to ns. The working principle of the reset circuit is studied. It is found that the key factor of reset is that the reset loop can effectively reset the core states at all levels before the discharge process. By optimizing the winding mode, the number of turns of the reset coil, the series inductance of the circuit and the switching frequency of the charging power supply in the reset loop, Selecting the best parameters of reset effect can reduce the discharge jitter to 86 ns; and further control the jitter to 37 ns. by introducing an appropriate reset current source in the secondary reset loop. At the same time, the influence of resonant inductance and the turn number of core winding on the working state of the circuit is simulated and analyzed. In order to realize the accurate simulation of the charging power supply, by analyzing the working process of the circuit charging power supply, calculating the relevant parameters of the power supply, designing the corresponding control circuit to realize the simulation of the charging power supply. It is verified that the simulation circuit under the accurate power supply model is more in line with the working state of the actual circuit to a certain extent. The circuit simulation model established in this paper can provide a reference for the design of pulse discharge excitation circuit with low discharge jitter.
【學位授予單位】：華中科技大學
【學位級別】：碩士
【學位授予年份】：2015
【分類號】：TN248
本文編號：2283426
[Abstract]:Due to the advantages of high repeatability and long life of all-solid-state magnetic compression discharge circuit, it has been widely used in pulse power technology, especially in excimer lasers used in lithography. With the improvement of the line width and power requirement of the lithography source, the excimer laser used in lithography generally adopts a dual-cavity structure, which is very sensitive to the delay jitter of the double-cavity discharge. Therefore, how to reduce the discharge delay jitter of all solid state magnetic compression discharge circuit becomes the key problem of this kind of fast pulse discharge circuit. In this paper, the fast pulse discharge circuit for excimer laser is studied in laboratory. The jitter of the circuit is analyzed by discharge experiment, and the cause of jitter is found out. It is found that using a special two-stage coupled reset loop can significantly reduce the discharge jitter. In order to find out the working mechanism of the reset circuit and further control the discharge jitter, the circuit is analyzed by PSpice software. The simulation model of magnetic switch and saturable pulse transformer is established through the actual B-H loop of magnetic core. The charging power supply is simulated by ABM device, and the whole pulse circuit is simulated. Based on the circuit simulation model, the related factors of the circuit discharge jitter are simulated and verified. It is found that the voltage fluctuation of the initial charge voltage of 1 V will cause the discharge jitter of 5-10 ns. The simulation analysis of the two-stage coupled reset circuit shows that the reset circuit can reduce the discharge jitter from 渭 s to ns. The working principle of the reset circuit is studied. It is found that the key factor of reset is that the reset loop can effectively reset the core states at all levels before the discharge process. By optimizing the winding mode, the number of turns of the reset coil, the series inductance of the circuit and the switching frequency of the charging power supply in the reset loop, Selecting the best parameters of reset effect can reduce the discharge jitter to 86 ns; and further control the jitter to 37 ns. by introducing an appropriate reset current source in the secondary reset loop. At the same time, the influence of resonant inductance and the turn number of core winding on the working state of the circuit is simulated and analyzed. In order to realize the accurate simulation of the charging power supply, by analyzing the working process of the circuit charging power supply, calculating the relevant parameters of the power supply, designing the corresponding control circuit to realize the simulation of the charging power supply. It is verified that the simulation circuit under the accurate power supply model is more in line with the working state of the actual circuit to a certain extent. The circuit simulation model established in this paper can provide a reference for the design of pulse discharge excitation circuit with low discharge jitter.
【學位授予單位】：華中科技大學
【學位級別】：碩士
【學位授予年份】：2015
【分類號】：TN248
【參考文獻】
相關(guān)期刊論文 前10條
1 厲彥超;游利兵;王慶勝;余吟山;方曉東;;準分子激光電源磁脈沖壓縮開關(guān)的磁芯復位研究[J];激光技術(shù);2013年06期
2 趙家敏;高健;梁勖;王效順;游利兵;王慶勝;余吟山;方曉東;;雙腔準分子激光器脈沖充電電源的研究[J];激光技術(shù);2013年01期
3 張晗;李勝利;伍衡;盧文浩;;新型納秒脈沖電源的參數(shù)設(shè)計與實驗研究[J];電力電子技術(shù);2013年01期
4 梁琳;余岳輝;;半導體脈沖功率開關(guān)發(fā)展綜述[J];電力電子技術(shù);2012年12期
5 任亞東;李世平;顏驥;熊輝;熊思宇;余偉;曾文彬;張方毅;;半導體脈沖功率開關(guān)的最新進展[J];強激光與粒子束;2012年04期
6 江偉華;;高重復頻率脈沖功率技術(shù)及其應(yīng)用:(1)概述[J];強激光與粒子束;2012年01期
7 游利兵;周翊;梁勖;余吟山;方曉東;王宇;;近期光刻用ArF準分子激光技術(shù)發(fā)展[J];量子電子學報;2010年05期
8 余吟山;游利兵;梁勖;方曉東;;準分子激光技術(shù)發(fā)展(邀請論文)[J];中國激光;2010年09期
9 謝瑞;劉軍;何湘寧;;脈沖功率技術(shù)在環(huán)境保護中的應(yīng)用[J];電力電子技術(shù);2010年04期
10 王冬冬;邱劍;劉克富;;基于半導體開關(guān)和磁開關(guān)的全固態(tài)脈沖電源[J];強激光與粒子束;2010年04期
相關(guān)碩士學位論文 前4條
1 胡耀文;基于磁開關(guān)壓縮的準分子激光器放電電路研究[D];華中科技大學;2013年
2 白浩銀;重復頻率高功率脈沖電源的研究[D];華中科技大學;2011年
3 潘文輝;磁開關(guān)脈沖壓縮系統(tǒng)的設(shè)計與仿真實驗研究[D];大連理工大學;2009年
4 胡群力;TEA CO_2激光器充電電源及其數(shù)字控制[D];華中科技大學;2007年
，本文編號：2283426
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