基于MEMS的非制冷紅外成像系統(tǒng)高速成像的分析及研究
發(fā)布時(shí)間：2018-10-14 09:38
【摘要】：近年來,基于MEMS的光學(xué)讀出式非制冷紅外成像系統(tǒng)在國內(nèi)外紅外成像領(lǐng)域中成為了一個(gè)新的研究熱點(diǎn)。這種紅外成像系統(tǒng)具有不需制冷、無需掃描,體積小、重量輕、功耗低,分辨率高等優(yōu)點(diǎn),是目前非制冷紅外探測器的重要發(fā)展方向之一。但國內(nèi)外對于該成像系統(tǒng)的研究都集中在系統(tǒng)成像質(zhì)量上,而對于系統(tǒng)的響應(yīng)時(shí)間和成像的幀頻問題目前并未有相關(guān)報(bào)道,FPA(focal plane array)幀頻提高的研究將是今后的一個(gè)重要研究方向。光讀出式微懸臂梁FPA紅外成像系統(tǒng)的響應(yīng)時(shí)間即是本文的研究重點(diǎn)。影響FPA成像速度的主要有兩個(gè)因素,一方面是通過合理的設(shè)計(jì)和提高FPA的制作工藝,使得FPA的本征響應(yīng)速度得到提高,另一方面是分析外界環(huán)境對FPA響應(yīng)速度的影響,通過改變成像環(huán)境,來提高系統(tǒng)成像速度。本文從系統(tǒng)的響應(yīng)時(shí)間入手,主要研究了如下內(nèi)容:1)分析了玻璃襯底結(jié)構(gòu)的FPA的響應(yīng)時(shí)間大小,并結(jié)合該結(jié)構(gòu)的FPA熱響應(yīng)時(shí)間的概念,分析了影響FPA響應(yīng)速度的主要因素——熱容和熱導(dǎo)。討論了FPA熱響應(yīng)時(shí)間與成像系統(tǒng)環(huán)境壓強(qiáng)和溫度之間的關(guān)系。2)應(yīng)用脈沖響應(yīng)測試法,設(shè)計(jì)實(shí)驗(yàn)測量FPA的熱響應(yīng)時(shí)間與系統(tǒng)環(huán)境壓強(qiáng)和溫度的關(guān)系。通過與計(jì)算值的對比,驗(yàn)證給出的理論模型。3)應(yīng)用實(shí)驗(yàn)室現(xiàn)有設(shè)備對不同的動態(tài)熱目標(biāo)進(jìn)行高速成像,提高成像幀頻,最終得到該系統(tǒng)可實(shí)現(xiàn)的幀頻極限,從而達(dá)到高幀頻成像的目的。4)分別用可見光和非制冷焦平面陣列成像系統(tǒng)對同一熱物體進(jìn)行成像,采集到不同情況下的視頻圖像,從而證明了FPA紅外成像系統(tǒng)可以捕捉更多的信息�；谝陨蠋c(diǎn)的研究工作,充分證明光讀出式雙材料微懸臂梁紅外焦平面陣列可以達(dá)到更高成像速度,這為進(jìn)一步增強(qiáng)紅外探測器的性能奠定了基礎(chǔ)。
[Abstract]:In recent years, the optical readout uncooled infrared imaging system based on MEMS has become a new research hotspot in the field of infrared imaging at home and abroad. This infrared imaging system has the advantages of no refrigeration, no scanning, small volume, light weight, low power consumption, high resolution and so on. It is one of the important development directions of uncooled infrared detectors. However, the research of the imaging system is focused on the quality of the system at home and abroad, and the research on the response time of the system and the frame rate of the imaging has not been reported at present. It will be an important research direction in the future to improve the, FPA (focal plane array) frame rate. The response time of optical readout micro cantilever FPA infrared imaging system is the focus of this paper. There are two main factors that affect the imaging speed of FPA. On the one hand, the intrinsic response speed of FPA is improved by reasonably designing and improving the fabrication process of FPA. On the other hand, the influence of external environment on FPA response speed is analyzed. The imaging speed of the system is improved by changing the imaging environment. In this paper, the response time of the system is studied as follows: 1) the response time of the glass substrate structure FPA is analyzed, and the concept of the FPA thermal response time of the glass substrate structure is introduced. Heat capacity and thermal conductivity are the main factors that affect the response speed of FPA. The relationship between the thermal response time of FPA and the ambient pressure and temperature of the imaging system is discussed. 2) the relationship between the thermal response time of the FPA and the pressure and temperature of the system is designed by using the pulse response test method. By comparing with the calculated values, the given theoretical model is verified. 3) the high speed imaging of different dynamic thermal targets is carried out by using the existing equipment in the laboratory, and the frame rate of the imaging is improved, and the limits of the system can be obtained. In order to achieve the purpose of high frame rate imaging. 4) using the visible light and uncooled focal plane array imaging system to image the same hot object, and collecting the video images under different conditions. It is proved that FPA infrared imaging system can capture more information. Based on the above research work, it is fully proved that the infrared focal plane array of optical readout micro-cantilever beam can achieve higher imaging speed, which lays a foundation for further enhancing the performance of infrared detector.
【學(xué)位授予單位】：北京理工大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2015
【分類號】：TN215
本文編號：2270075
[Abstract]:In recent years, the optical readout uncooled infrared imaging system based on MEMS has become a new research hotspot in the field of infrared imaging at home and abroad. This infrared imaging system has the advantages of no refrigeration, no scanning, small volume, light weight, low power consumption, high resolution and so on. It is one of the important development directions of uncooled infrared detectors. However, the research of the imaging system is focused on the quality of the system at home and abroad, and the research on the response time of the system and the frame rate of the imaging has not been reported at present. It will be an important research direction in the future to improve the, FPA (focal plane array) frame rate. The response time of optical readout micro cantilever FPA infrared imaging system is the focus of this paper. There are two main factors that affect the imaging speed of FPA. On the one hand, the intrinsic response speed of FPA is improved by reasonably designing and improving the fabrication process of FPA. On the other hand, the influence of external environment on FPA response speed is analyzed. The imaging speed of the system is improved by changing the imaging environment. In this paper, the response time of the system is studied as follows: 1) the response time of the glass substrate structure FPA is analyzed, and the concept of the FPA thermal response time of the glass substrate structure is introduced. Heat capacity and thermal conductivity are the main factors that affect the response speed of FPA. The relationship between the thermal response time of FPA and the ambient pressure and temperature of the imaging system is discussed. 2) the relationship between the thermal response time of the FPA and the pressure and temperature of the system is designed by using the pulse response test method. By comparing with the calculated values, the given theoretical model is verified. 3) the high speed imaging of different dynamic thermal targets is carried out by using the existing equipment in the laboratory, and the frame rate of the imaging is improved, and the limits of the system can be obtained. In order to achieve the purpose of high frame rate imaging. 4) using the visible light and uncooled focal plane array imaging system to image the same hot object, and collecting the video images under different conditions. It is proved that FPA infrared imaging system can capture more information. Based on the above research work, it is fully proved that the infrared focal plane array of optical readout micro-cantilever beam can achieve higher imaging speed, which lays a foundation for further enhancing the performance of infrared detector.
【學(xué)位授予單位】：北京理工大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2015
【分類號】：TN215
【參考文獻(xiàn)】
相關(guān)期刊論文 前1條
1 周立偉;夜視技術(shù)的進(jìn)展與展望[J];激光與光電子學(xué)進(jìn)展;1995年04期
，本文編號：2270075
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