【摘要】：加速度傳感器是一種重要的傳感器,在航空航天、地質(zhì)勘探、土木結(jié)構(gòu)振動測量等領(lǐng)域有著廣闊的應(yīng)用前景。而光纖琺珀傳感器具有抗電磁干擾能力強、不易腐蝕、尺寸小、靈敏度高等優(yōu)點。本文以激光制作的琺珀應(yīng)變傳感器為基礎(chǔ),設(shè)計并實現(xiàn)了一種光纖琺珀加速度傳感器,滿足在航空結(jié)構(gòu)的振動檢測及控制和大型旋轉(zhuǎn)設(shè)備的振動監(jiān)測等方面的需求。本文研究了193nm激光微加工制作的單琺珀空氣腔的制作工藝,研制出了單腔和雙腔琺珀傳感器,并測試了它們的傳感特性,結(jié)果表明:單琺珀空氣腔的溫度敏感系數(shù)為1.1°pm C,靜態(tài)應(yīng)變靈敏度為1.61 pm/με,雙腔結(jié)構(gòu)琺珀腔的溫度敏感系數(shù)為9.7°pm C。在成功制作出的單琺珀空氣腔的基礎(chǔ)上,提出了一種基于雙端固支梁結(jié)構(gòu)的光纖琺珀加速度傳感器設(shè)計方案。從結(jié)構(gòu)力學(xué)的角度,理論研究了雙端固支梁結(jié)構(gòu)的力學(xué)特性。通過ANSYS軟件對雙端固支梁結(jié)構(gòu)進(jìn)行模態(tài)分析和靜態(tài)分析,模擬分析了敏感質(zhì)量塊重心位置對固有頻率的影響,也分析了結(jié)構(gòu)在不同方向的應(yīng)變分布和諧振特性。最后對光纖琺珀傳感頭和雙端固支梁進(jìn)行封裝,制作出了一種對溫度不敏感、可應(yīng)用于低頻加速度測量的加速度計,測量范圍為?8?8 g。實驗測得該加速度計的靈敏度為0.13 rad/g,測量頻率為0 70 Hz,最小可探測的加速度為8 mg。以上研究工作證實了以這種具有優(yōu)異應(yīng)變特性和低溫度敏感特性的傳感器,可以封裝制作成能測量其他參量的傳感器。
[Abstract]:Acceleration sensor is an important sensor, which has a broad application prospect in aerospace, geological exploration, civil structure vibration measurement and other fields. The fiber-optic Fabry-Perot sensor has the advantages of high resistance to electromagnetic interference, low size and high sensitivity. Based on the Fabry-Perot strain sensor fabricated by laser, a fiber-optic Fabry-Perot acceleration sensor is designed and implemented to meet the needs of vibration detection and control of aeronautical structures and vibration monitoring of large rotating equipment. In this paper, the fabrication process of single Fabry-Perot air cavity fabricated by 193nm laser micromachining has been studied. The single cavity and double cavity Fabry-Perot sensors have been developed, and their sensing characteristics have been tested. The results show that the temperature sensitivity coefficient is 1.1 擄pm C, the static strain sensitivity is 1.61 pm/ 渭 蔚, and the temperature sensitivity coefficient is 9.7 擄pm C. Based on the successful fabrication of a single Fabry-Perot air chamber, a design scheme of a fiber-optic Fabry-Perot acceleration sensor based on a dual-end fixed beam structure is proposed. From the point of view of structural mechanics, the mechanical properties of two-end fixed beam structures are studied theoretically. The influence of the center of gravity of the sensitive mass block on the natural frequency and the strain distribution and resonance characteristics of the structure in different directions are simulated and analyzed by using ANSYS software for the modal analysis and static analysis of the double-end fixed beam structure. Finally, a kind of accelerometer, which is not sensitive to temperature and can be used in low frequency acceleration measurement, is fabricated by encapsulating the fiber-optic Fabry-Perot sensor head and the double-end clamping beam. The measuring range is 8g. The sensitivity of the accelerometer is 0. 13 rad/g,. The minimum detectable acceleration is 0. 70 Hz,. The minimum detectable acceleration is 8 mg.. It is proved that this kind of sensor with excellent strain characteristics and low temperature sensitivity can be packaged and fabricated to measure other parameters.
【學(xué)位授予單位】：電子科技大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2015
【分類號】：TN249;TP212

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本文編號：2228112