【摘要】：隨著對(duì)電磁波研究的不斷加深,科學(xué)家們發(fā)現(xiàn)在毫米波段和紅外波段之間還存在一段具有很高科學(xué)研究?jī)r(jià)值的電磁 空白‖區(qū)域——THz(Terahertz)波。太赫茲波是指頻率范圍在0.1T-10T(波長(zhǎng)范圍為3000-30μm)的電磁波(1THz=1012Hz)。THz波在電磁波的頻譜范圍內(nèi)占有非常特殊的位置,其還未被全面開(kāi)發(fā)出來(lái)的主要原因:一是技術(shù),特別是加工技術(shù)上的限制,二是THz源還沒(méi)得到很好的解決。本論文主要是針對(duì)THz源中的電子光學(xué)系統(tǒng)進(jìn)行研究,并設(shè)計(jì)適用于THz頻段的低電壓,結(jié)構(gòu)緊湊的電子光學(xué)系統(tǒng)。論文采用柱狀Pierce結(jié)構(gòu)的電子槍,通過(guò)電子注在系統(tǒng)中的受力、場(chǎng)分析和電子注的運(yùn)動(dòng)軌跡方程來(lái)研究和設(shè)計(jì)合適的電子槍結(jié)構(gòu)。本文對(duì)多維和一維空間電荷限制流進(jìn)行比較,并用CST軟件對(duì)陰陽(yáng)極之間的電壓U、陰陽(yáng)極之間的間距d、陰極發(fā)射面半徑R和不同的比例系數(shù)K(K=R/d)進(jìn)行了研究。選取二維與一維空間電荷限制流誤差較小的一些結(jié)構(gòu)參量作為電子槍結(jié)構(gòu)的初始參量,得到電子槍的主要參量:陰陽(yáng)極間距d=3mm,K=0.25,rm≈0.05mm。為了得到層流性和流通性較好的電子束,本論文探索了兩種不同結(jié)構(gòu)的磁路結(jié)構(gòu),一種是螺旋管線圈結(jié)構(gòu)磁路,另一種是特殊結(jié)構(gòu)的永磁磁路。通過(guò)FEMM和CST軟件,分別對(duì)它們進(jìn)行建模和仿真,分析了螺旋管線圈的參數(shù)和永磁結(jié)構(gòu)的參數(shù)對(duì)磁場(chǎng)的影響,經(jīng)過(guò)一系列的優(yōu)化仿真,得到它們的最優(yōu)參數(shù)。在上述磁場(chǎng)作用下,當(dāng)電壓為8.5kV、陰極發(fā)射電流密度J5A/cm2時(shí),用CST軟件對(duì)電子注的流通性進(jìn)行優(yōu)化分析,得到螺旋管磁場(chǎng)結(jié)構(gòu)中電子槍的優(yōu)化結(jié)果:流通率ηα=93.7%,J=3.47A/cm2,J1=138.8A/cm2,壓縮比M2≈40,導(dǎo)流系數(shù)P=0.0281μP;永磁結(jié)構(gòu)中電子槍的優(yōu)化結(jié)果:流通率ηα=97.23%,J=2.1A/cm2,J1=111.3A/cm2,壓縮比M2≈53,導(dǎo)流系數(shù)P=0.0288μP。
[Abstract]:With the deepening of the study of electromagnetic waves, scientists have found that there is a high scientific value between the millimeter band and the infrared band in the electromagnetic field, the THz (Terahertz) wave. Terahertz wave is a very special position of electromagnetic wave (1THz=1012Hz). THz wave in 0.1T-10T (wavelength range 3000-30 渭 m), which has not been fully developed. First, the limitation of technology, especially processing technology, is one of the main reasons why terahertz wave is not fully developed. Second, the THz source has not been well resolved. This paper mainly focuses on the research of THz source electron optical system and designs a low voltage compact electronic optical system suitable for THz frequency band. In this paper, the electron gun with columnar Pierce structure is used to study and design the appropriate electron gun structure through the force of electron beam in the system, the field analysis and the motion trajectory equation of electron beam. In this paper, the multi-dimensional and one-dimensional space charge limiting currents are compared. The voltage between cathode and anode, the distance between cathode and cathode D, the radius of cathode emission surface R and the ratio coefficient K (K=R/d) are studied by CST software. Two dimensional and one dimensional space charge limiting current parameters are selected as the initial parameters of the electron gun structure. The main parameters of the electron gun are as follows: the distance between cathode and cathode is 3 mm ~ 0. 25 mm km 鈮，

本文編號(hào)：2212540