【摘要】：在過去幾十年里,激光技術(shù)得到極大發(fā)展,在高度工業(yè)化國家的經(jīng)濟發(fā)展中扮演著越來越重要的角色,然而光束質(zhì)量差是制約其進(jìn)一步應(yīng)用的主要瓶頸。此外,許多應(yīng)用場合需要使用大功率激光器,而目前商用單管半導(dǎo)體激光器的最高出射功率通常在mW級,需使用半導(dǎo)體激光單元組成的半導(dǎo)體激光陣列才能滿足大功率的應(yīng)用,因而研究如何提高大功率半導(dǎo)體激光陣列的光束質(zhì)量成為關(guān)鍵。本論文采取光柵-外腔光譜合束技術(shù)在ZEMAX中對半導(dǎo)體激光陣列進(jìn)行合束設(shè)計模擬,該系統(tǒng)主要由半導(dǎo)體激光陣列、準(zhǔn)直透鏡、傳輸透鏡、光柵和輸出鏡等元件構(gòu)成。利用光柵的衍射效應(yīng)使光束在遠(yuǎn)場和近場疊加,將半導(dǎo)體激光陣列各個發(fā)光單元的光束組合到一起,使輸出光束的光束質(zhì)量與單個半導(dǎo)體激光器發(fā)光單元的光束質(zhì)量相近,而功率是所有發(fā)光單元功率的疊加。具體內(nèi)容如下:(1)論文首先對半導(dǎo)體激光器的工作原理和分類做出敘述,并討論了半導(dǎo)體激光器的主要參數(shù)、光束特性以及光束質(zhì)量評價方法。(2)介紹了光柵-外腔光譜合束的原理,選用Coherent公司中心波長為1060nm的傳導(dǎo)冷卻封裝結(jié)構(gòu)半導(dǎo)體激光陣列為例,對其光束特性和光束質(zhì)量以及合束單元的入射角和中心波長進(jìn)行詳細(xì)理論計算。(3)在ZEMAX序列模式中設(shè)計了快軸準(zhǔn)直鏡+慢軸準(zhǔn)直鏡構(gòu)成的準(zhǔn)直結(jié)構(gòu)以及雙焦距單透鏡準(zhǔn)直結(jié)構(gòu),都獲得不錯的準(zhǔn)直效果。另外設(shè)計了兩兩膠合的雙透鏡組成的傳輸透鏡,用于減小像差且使不同光束在光柵上聚焦。(4)對以上兩種準(zhǔn)直結(jié)構(gòu)在ZEMAX非序列模式中分別模擬光柵-外腔光譜合束模型,均較好的完成了光譜合束,合束線寬為19.86nm。在不考慮實際諧振腔和衍射光柵的損耗時,組合效率達(dá)到99.6%和99.7%,合束光斑光束質(zhì)量與準(zhǔn)直后的單個發(fā)光單元相似。
[Abstract]:In the past few decades, laser technology has been greatly developed and plays a more and more important role in the economic development of highly industrialized countries. However, the poor beam quality is the main bottleneck of its further application. In addition, many applications require the use of high-power lasers, and at present the maximum output power of commercial single-transistor semiconductor lasers is usually in the MW level, and a semiconductor laser array composed of semiconductor laser units is required to meet the needs of high-power applications. Therefore, how to improve the beam quality of high power semiconductor laser arrays becomes the key. In this paper, the design and simulation of semiconductor laser array are carried out in ZEMAX by grating and external cavity spectral beam bonding technology. The system is composed of semiconductor laser array, collimation lens, transmission lens, grating and output mirror and so on. By using the diffraction effect of the grating, the beam is superimposed in the far field and near field, and the beam of each luminescent unit of the semiconductor laser array is combined together, so that the beam quality of the output beam is similar to that of the light emitting unit of a single semiconductor laser. The power is the superposition of the power of all the luminous cells. The main contents are as follows: (1) at first, the working principle and classification of semiconductor lasers are described, and the main parameters of semiconductor lasers are discussed. Beam characteristics and beam quality evaluation methods. (2) the principle of grating / external cavity spectral beam combination is introduced. A conductive cooling package semiconductor laser array with 1060nm central wavelength of Coherent is selected as an example. The beam characteristics, beam quality, incidence angle and central wavelength of beam combination unit are calculated in detail. (3) the collimation structure of slow axis collimating mirror of fast axis collimating mirror and the collimating structure of double focal length single lens are designed in ZEMAX sequence mode. All get good collimation effect. In addition, a two-lens transmission lens is designed to reduce aberration and make different beams focus on the grating. (4) in ZEMAX non-sequential mode, the above two collimating structures are used to simulate the grating and external cavity spectral beam model, respectively. The beam width is 19.86 nm. The combination efficiency is 99.6% and 99.7%, and the beam quality is similar to that of a single luminescent unit after collimation.
【學(xué)位授予單位】：山東大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TN248.4

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