本文選題：激光加工 + 表面粗糙度��； 參考：《華中科技大學(xué)》2015年碩士論文

【摘要】：隨著激光加工技術(shù)的迅速發(fā)展,與之對應(yīng)的表面形貌檢測技術(shù)也在快速發(fā)展。在激光微加工領(lǐng)域,刻蝕工件的表面粗糙度和刻蝕尺寸是其最重要的表面形貌評價參數(shù)。其中,表面粗糙度是用來描述工件的微觀幾何形狀誤差,它是評定工件表面加工質(zhì)量的重要指標(biāo),直接影響到工件的使用性能和壽命,而刻蝕尺寸的精確測量在表面測量中也有著十分重要的作用,它直接決定加工的精度,可以在很大程度上彌補(bǔ)由其他因素(如光斑尺寸、熱效應(yīng)等)引入的加工誤差,同時,微細(xì)結(jié)構(gòu)的尺寸測量已成為當(dāng)前納米測量技術(shù)和納米計(jì)量標(biāo)準(zhǔn)的重要課題之一,在世界范圍內(nèi)得到了普遍重視。在此背景下,本文研究并開發(fā)了一種激光微加工在線檢測系統(tǒng),主要包括以下三個方面:激光在線檢測系統(tǒng)結(jié)構(gòu)設(shè)計(jì)、數(shù)據(jù)處理技術(shù)的研究和應(yīng)用軟件的開發(fā)。激光檢測系統(tǒng)由激光傳感器、三維精密位移平臺和計(jì)算機(jī)組成,且集成到激光微加工系統(tǒng)中,構(gòu)成了集加工和檢測為一體的一整套系統(tǒng)。在數(shù)據(jù)處理技術(shù)方面,針對測量過程中的噪聲,研究并設(shè)計(jì)了巴特沃斯降噪濾波器;針對濾波問題,研究并設(shè)計(jì)了最小二乘中線濾波和高斯濾波兩種方法,通過輪廓調(diào)平的方法解決了刻蝕尺寸測量中的傾斜問題。在軟件方面,開發(fā)了界面美觀、操作方便的應(yīng)用軟件,它由設(shè)備控制軟件和數(shù)據(jù)處理軟件兩部分組成,共同實(shí)現(xiàn)了在線檢測的功能。實(shí)驗(yàn)部分,該系統(tǒng)通過大量樣品的在線加工和檢測實(shí)驗(yàn),并采用Dektak 150 Surface Profiler表面輪廓測量儀的檢測結(jié)果進(jìn)行對比和不斷修正,獲得了在線檢測精度能達(dá)到1.6μm,且具有良好的重復(fù)性、穩(wěn)定性和可靠性的激光微加工在線檢測系統(tǒng)。利用本文開發(fā)的激光微加工在線檢測系統(tǒng)對激光加工的工件的表面質(zhì)量和尺寸進(jìn)行在線檢測,極大地提高了加工效率,提高了加工精度,還能節(jié)省大量試驗(yàn)用材料,且非接觸測量方法不會損傷樣品表面,同時,大的測量范圍和寬松的測量環(huán)境要求為三維曲面測量提供了必要的條件。
[Abstract]:With the rapid development of laser processing technology, the corresponding surface morphology detection technology is also developing rapidly. In the field of laser micromachining, the surface roughness and etching size of the etched workpiece are the most important parameters for evaluating the surface morphology. Among them, the surface roughness is used to describe the micro geometric error of the workpiece, and it is an important index to evaluate the workpiece surface processing quality, which directly affects the working performance and service life of the workpiece. The accurate measurement of etching size also plays an important role in surface measurement. It directly determines the processing accuracy, and can compensate for the machining errors introduced by other factors (such as spot size, thermal effect, etc.) to a great extent, at the same time, The measurement of microstructures has become one of the most important subjects in the field of nanometer measurement technology and nanometer measurement standards, and has been paid more and more attention to all over the world. Under this background, this paper studies and develops a laser micromachining on-line detection system, which mainly includes the following three aspects: the structure design of laser on-line detection system, the research of data processing technology and the development of application software. The laser detection system is composed of laser sensor, 3D precision displacement platform and computer, and integrated into the laser micromachining system. In the aspect of data processing, the Butterworth filter is studied and designed for the noise in the measurement process, and the least square midline filter and Gao Si filter are studied and designed for the filtering problem. The slanting problem in etching dimension measurement is solved by the method of profile leveling. In the aspect of software, the application software with beautiful interface and convenient operation is developed, which is composed of two parts: equipment control software and data processing software, and realizes the function of on-line detection together. In the experiment part, through the on-line processing and testing experiments of a large number of samples, the results of Dektak 150 Surface Profiler surface profile measuring instrument are compared and revised continuously. The on-line detection accuracy can reach 1.6 渭 m, and the system has good repeatability. Stability and reliability of laser micromachining online detection system. The surface quality and size of the workpiece machined by laser are tested on line by using the laser micromachining on-line inspection system developed in this paper. The processing efficiency is greatly improved, the machining precision is improved, and a large number of experimental materials are saved. The non-contact measurement method does not damage the surface of the sample, and the large measurement range and the loose measuring environment provide the necessary conditions for 3D surface measurement.
【學(xué)位授予單位】：華中科技大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2015
【分類號】：TN249;TP274

【引證文獻(xiàn)】

相關(guān)碩士學(xué)位論文 前1條

1 夏晨光;彈藥飛行環(huán)境磁場模擬與控制技術(shù)研究[D];中北大學(xué);2017年

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本文編號：2053334