本文選題：集成電路 + 模具　； 參考：《北京交通大學(xué)》2015年碩士論文

【摘要】：集成電路是電子信息產(chǎn)業(yè)的心臟,集成電路每1元的產(chǎn)值,可以帶動(dòng)GDP100元的產(chǎn)值,對(duì)國(guó)民經(jīng)濟(jì)的發(fā)展具有很高的貢獻(xiàn)率。集成電路的發(fā)展離不開(kāi)高質(zhì)量的鍵合金絲,從而對(duì)有硬脆性材料制成的集成電路精密引線模具提出了越來(lái)越高的要求。超聲加工技術(shù)是加工硬脆性材料的主要方法,在上述模具的制造過(guò)程中扮演著重要的角色。但集成電路精密引線模具孔徑微小,目前尚沒(méi)有成熟的具有在線監(jiān)控功能的臥式超聲加工設(shè)備。 本文從這一角度出發(fā),研發(fā)了集成電路精密引線模具臥式超聲加工機(jī)床,主要工作內(nèi)容為：1.選擇介電損耗正切值盡可能小,材料的機(jī)械品質(zhì)因數(shù)大的壓電陶瓷元件,結(jié)合聲學(xué)、電學(xué)、機(jī)械學(xué)設(shè)計(jì)結(jié)構(gòu)合理,設(shè)計(jì)制造出專(zhuān)用的、高共振頻率的、工作可靠的壓電換能器。2.選取階梯型變幅桿應(yīng)用理論解析法進(jìn)行分析,得出了變截面桿的振動(dòng)方程。運(yùn)用ANSYS軟件對(duì)階梯型變幅桿進(jìn)行了模態(tài)分析和諧響應(yīng)分析,針對(duì)諧響應(yīng)分析中所存在的應(yīng)力集中現(xiàn)象進(jìn)行了結(jié)構(gòu)優(yōu)化和驗(yàn)證。3.在超聲換能器、變幅桿研究的基礎(chǔ)上,對(duì)專(zhuān)用的超聲加工機(jī)床的設(shè)計(jì)制造進(jìn)行研究,對(duì)機(jī)床的主體結(jié)構(gòu)給予詳細(xì)的分析和零件設(shè)計(jì),最后經(jīng)過(guò)計(jì)算與校核,設(shè)計(jì)制造一臺(tái)具有在線檢測(cè)功能、適用于集成電路精密引線模具的臥式超聲加工機(jī)床。4.在超聲加工實(shí)驗(yàn)結(jié)果及分析上采用正交實(shí)驗(yàn)方法設(shè)計(jì)了三因素三水平正交實(shí)驗(yàn),考察了磨粒粒度、工件轉(zhuǎn)速和磨料濃度三個(gè)參數(shù)對(duì)材料去除率的實(shí)際影響和作用規(guī)律。
[Abstract]:Integrated circuit is the heart of electronic information industry. The output value of integrated circuit every 1 yuan can drive the output value of GDP100 yuan, and it has a high contribution rate to the development of national economy. The development of integrated circuit can not be separated from the high quality bond alloy wire, so the precision lead mould made of hard and brittle material is demanded more and more. Ultrasonic machining technology is the main method of processing hard brittle materials and plays an important role in the manufacturing process of the above die. However, the aperture of IC precision lead die is small, so there is no mature horizontal ultrasonic machining equipment with on-line monitoring function. From this point of view, a horizontal ultrasonic machining machine for precision lead die of integrated circuit is developed in this paper. The main work is: 1: 1. The piezoelectric ceramic elements with low dielectric loss tangent value and high mechanical quality factor are selected. The piezoelectric transducer with high resonance frequency and reliable working is designed and manufactured with reasonable design structure of acoustics, electricity and mechanics. The vibration equation of variable cross section bar is obtained by using theoretical analysis method. The modal analysis and harmonic response analysis of stepped horn are carried out by using ANSYS software. The stress concentration phenomenon in harmonic response analysis is optimized and verified. Based on the research of ultrasonic transducer and amplitude change pole, the design and manufacture of the special ultrasonic machining machine tool are studied. The main structure of the machine tool is analyzed in detail and the parts are designed. Design and manufacture a horizontal ultrasonic machining machine tool. 4. Based on the experimental results and analysis of ultrasonic machining, a three-factor and three-level orthogonal experiment was designed by orthogonal experimental method. The effects of three parameters, such as particle size, workpiece speed and abrasive concentration, on the material removal rate were investigated.
【學(xué)位授予單位】：北京交通大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類(lèi)號(hào)】：TN405

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