本文選題：磁懸浮微動(dòng)臺(tái) + 電磁力建模　； 參考：《電子科技大學(xué)》2015年碩士論文

【摘要】：磁懸浮微動(dòng)臺(tái)作為光刻機(jī)粗精疊層超精密運(yùn)動(dòng)平臺(tái)的關(guān)鍵部件之一,其運(yùn)動(dòng)行程小、精度要求高,同時(shí)其運(yùn)動(dòng)及定位精度將直接決定晶圓在光刻工藝中質(zhì)量的優(yōu)劣。本文以一種采用新型重力補(bǔ)償結(jié)構(gòu)的磁懸浮微動(dòng)臺(tái)為對(duì)象,針對(duì)其各個(gè)自由度運(yùn)動(dòng)間的耦合進(jìn)行研究,并在精確解耦的基礎(chǔ)上進(jìn)行控制器設(shè)計(jì),滿足磁懸浮微動(dòng)臺(tái)的運(yùn)動(dòng)性能指標(biāo)。首先,考慮當(dāng)微動(dòng)臺(tái)運(yùn)動(dòng)造成驅(qū)動(dòng)音圈電機(jī)永磁磁鋼相對(duì)于線圈偏移將引起驅(qū)動(dòng)電磁力的變化,由于電磁力不同將引起非平衡驅(qū)動(dòng),同時(shí)各自由度將產(chǎn)生耦合,因此建立磁懸浮微動(dòng)臺(tái)驅(qū)動(dòng)音圈電機(jī)的電磁場(chǎng)和電磁力的解析模型,并通過仿真和實(shí)驗(yàn)驗(yàn)證解析模型的正確性。其次,重力平衡組件以及驅(qū)動(dòng)電機(jī)在安裝、制造、裝配等環(huán)節(jié)中不可避免存在誤差,造成實(shí)際模型與理論模型的不一致,從而使得基于理論模型的驅(qū)動(dòng)力分配將引起各自由度間的耦合以及驅(qū)動(dòng)力的誤差,通過仿真驗(yàn)證分析結(jié)果。再次,針對(duì)磁懸浮微動(dòng)臺(tái)時(shí)域和頻域性能指標(biāo),在對(duì)其模型辨識(shí)基礎(chǔ)上設(shè)計(jì)相位超前-滯后反饋控制器對(duì)其進(jìn)行運(yùn)動(dòng)控制,同時(shí),為減小高頻段柔性振蕩對(duì)位置誤差的放大,采用低通濾波器對(duì)高頻段的能量進(jìn)行衰減,并通過磁懸浮微動(dòng)臺(tái)的運(yùn)動(dòng)控制實(shí)驗(yàn)進(jìn)行驗(yàn)證。最后,建立磁懸浮微動(dòng)臺(tái)的六自由度輸入輸出模型,結(jié)合最小二乘法提出一種離線計(jì)算電流分配系數(shù)的方法對(duì)其解耦,并通過實(shí)驗(yàn)對(duì)其進(jìn)行了驗(yàn)證,同時(shí)提出采用遞推最小二乘法在線計(jì)算電流分配系數(shù)進(jìn)行解耦。
[Abstract]:As one of the key components of the ultra-precision motion platform of lithography machine, the maglev micro-motion platform has small movement stroke and high precision requirement. At the same time, its motion and positioning accuracy will directly determine the quality of wafer in lithography process. In this paper, a magnetic levitation micro-motion platform with a new gravity compensation structure is used as an object, the coupling between the motion of each degree of freedom is studied, and the controller is designed on the basis of precise decoupling. Meet the motion performance index of the maglev fretting platform. First of all, it is considered that when the motion of the fretting platform causes the permanent magnet of the drive coil motor to deviate from the coil, it will cause the change of the driving electromagnetic force, and the non-equilibrium drive will be caused by the difference of the electromagnetic force, and at the same time each degree of freedom will be coupled. Therefore, an analytical model of electromagnetic field and electromagnetic force of the voice coil motor driven by the maglev fretting platform is established, and the correctness of the analytical model is verified by simulation and experiment. Secondly, there are inevitable errors in the installation, manufacture and assembly of the gravity balance module and the driving motor, which leads to the inconsistency between the actual model and the theoretical model. Therefore, the driving force allocation based on the theoretical model will lead to coupling between degrees of freedom and the error of driving force. The results are verified by simulation. Thirdly, aiming at the time domain and frequency domain performance indexes of the maglev micromotion platform, the phase lead-lag feedback controller is designed on the basis of the model identification. At the same time, in order to reduce the amplification of the position error of the flexible oscillation in the high frequency band, the phase lead-lag feedback controller is designed to control the motion of the maglev micro-motion platform. The low pass filter is used to attenuate the energy of high frequency band, and it is verified by the motion control experiment of the maglev micromotion platform. Finally, a six-degree-of-freedom input and output model of the maglev fretting platform is established, and an off-line method to calculate the current distribution coefficient is presented, which is decoupled by the least square method and verified by experiments. At the same time, the recursive least square method is used to calculate the current distribution coefficient on line to decouple.
【學(xué)位授予單位】：電子科技大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TN305.7
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本文編號(hào)：2016850