本文選題：磁懸浮微動臺 + 電磁力建模��； 參考：《電子科技大學》2015年碩士論文

【摘要】：磁懸浮微動臺作為光刻機粗精疊層超精密運動平臺的關(guān)鍵部件之一,其運動行程小、精度要求高,同時其運動及定位精度將直接決定晶圓在光刻工藝中質(zhì)量的優(yōu)劣。本文以一種采用新型重力補償結(jié)構(gòu)的磁懸浮微動臺為對象,針對其各個自由度運動間的耦合進行研究,并在精確解耦的基礎上進行控制器設計,滿足磁懸浮微動臺的運動性能指標。首先,考慮當微動臺運動造成驅(qū)動音圈電機永磁磁鋼相對于線圈偏移將引起驅(qū)動電磁力的變化,由于電磁力不同將引起非平衡驅(qū)動,同時各自由度將產(chǎn)生耦合,因此建立磁懸浮微動臺驅(qū)動音圈電機的電磁場和電磁力的解析模型,并通過仿真和實驗驗證解析模型的正確性。其次,重力平衡組件以及驅(qū)動電機在安裝、制造、裝配等環(huán)節(jié)中不可避免存在誤差,造成實際模型與理論模型的不一致,從而使得基于理論模型的驅(qū)動力分配將引起各自由度間的耦合以及驅(qū)動力的誤差,通過仿真驗證分析結(jié)果。再次,針對磁懸浮微動臺時域和頻域性能指標,在對其模型辨識基礎上設計相位超前-滯后反饋控制器對其進行運動控制,同時,為減小高頻段柔性振蕩對位置誤差的放大,采用低通濾波器對高頻段的能量進行衰減,并通過磁懸浮微動臺的運動控制實驗進行驗證。最后,建立磁懸浮微動臺的六自由度輸入輸出模型,結(jié)合最小二乘法提出一種離線計算電流分配系數(shù)的方法對其解耦,并通過實驗對其進行了驗證,同時提出采用遞推最小二乘法在線計算電流分配系數(shù)進行解耦。
[Abstract]:As one of the key components of the ultra-precision motion platform of lithography machine, the maglev micro-motion platform has small movement stroke and high precision requirement. At the same time, its motion and positioning accuracy will directly determine the quality of wafer in lithography process. In this paper, a magnetic levitation micro-motion platform with a new gravity compensation structure is used as an object, the coupling between the motion of each degree of freedom is studied, and the controller is designed on the basis of precise decoupling. Meet the motion performance index of the maglev fretting platform. First of all, it is considered that when the motion of the fretting platform causes the permanent magnet of the drive coil motor to deviate from the coil, it will cause the change of the driving electromagnetic force, and the non-equilibrium drive will be caused by the difference of the electromagnetic force, and at the same time each degree of freedom will be coupled. Therefore, an analytical model of electromagnetic field and electromagnetic force of the voice coil motor driven by the maglev fretting platform is established, and the correctness of the analytical model is verified by simulation and experiment. Secondly, there are inevitable errors in the installation, manufacture and assembly of the gravity balance module and the driving motor, which leads to the inconsistency between the actual model and the theoretical model. Therefore, the driving force allocation based on the theoretical model will lead to coupling between degrees of freedom and the error of driving force. The results are verified by simulation. Thirdly, aiming at the time domain and frequency domain performance indexes of the maglev micromotion platform, the phase lead-lag feedback controller is designed on the basis of the model identification. At the same time, in order to reduce the amplification of the position error of the flexible oscillation in the high frequency band, the phase lead-lag feedback controller is designed to control the motion of the maglev micro-motion platform. The low pass filter is used to attenuate the energy of high frequency band, and it is verified by the motion control experiment of the maglev micromotion platform. Finally, a six-degree-of-freedom input and output model of the maglev fretting platform is established, and an off-line method to calculate the current distribution coefficient is presented, which is decoupled by the least square method and verified by experiments. At the same time, the recursive least square method is used to calculate the current distribution coefficient on line to decouple.
【學位授予單位】：電子科技大學
【學位級別】：碩士
【學位授予年份】：2015
【分類號】：TN305.7
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本文編號：2016850