本文選題：雙工件臺換臺 + 擾動抑制　； 參考：《哈爾濱工業(yè)大學》2015年碩士論文

【摘要】：雙工件臺換臺是光刻機研制的核心,也是完成后續(xù)掃描光刻任務(wù)的前提,換臺過程要求高速度和高精度,因此擾動的存在極易導致?lián)Q臺的失敗。而雙工件臺宏動系統(tǒng)主要負責換臺的大行程直線運動,只有重復定位精度達到指標要求的微米級,才能保證整個換臺過程的連續(xù)性。本文將宏動系統(tǒng)的運動歸結(jié)為X向單電機定位運動和Y向多電機同步運動,分別進行了擾動抑制技術(shù)的研究,在仿真基礎(chǔ)上設(shè)計了相應(yīng)的擾動補償器,然后在雙工件臺上換臺實現(xiàn)過程中進行了擾動抑制實驗,使系統(tǒng)的抗擾性得到了很大提高。首先,針對雙工件臺的結(jié)構(gòu)特點以及換臺的軌跡規(guī)劃,分析了換臺過程中宏動系統(tǒng)的運動情況,闡述了對宏動系統(tǒng)進行擾動分析的必要性,最后分析了換臺過程中宏動系統(tǒng)中可能存在的擾動。其次,對X向單電機定位過程中的擾動進了分析與抑制。為此,從直線電機的原理出發(fā),得出定位力擾動是該過程中的主要擾動,然后結(jié)合定位力產(chǎn)生的機理,在實驗平臺上進行了定位力擾動模型的辨識。隨后,在保證魯棒穩(wěn)定性的前提下,對擾動觀測器進行了設(shè)計,對定位力擾動進行了補償,并進行了仿真驗證。再次,對Y向多電機同步過程中的擾動進行了分析與抑制。結(jié)合現(xiàn)有的同步控制策略,介紹了基于擾動補償?shù)耐娇刂撇呗?將擾動觀測器應(yīng)用在補償回路,并進行了仿真驗證研究,然后針對X向的負載擾動,設(shè)計了負載擾動動態(tài)補償器,對上述同步控制策略進行了修正,并通過仿真驗證了其有效性。最后,在雙工件臺上進行了宏動系統(tǒng)的擾動抑制實驗,然后在宏動系統(tǒng)抗擾性達到一定程度的基礎(chǔ)上,通過解決了換臺調(diào)試中遇到的一些實際軟硬件問題,包括多運動控制卡以及存儲擴展等相關(guān)問題,使整個換臺順利得到了實現(xiàn)。不但達到了系統(tǒng)指標要求的精度,而且在換臺速度達到一定程度的基礎(chǔ)上,提高了系統(tǒng)的抗擾性。
[Abstract]:Double workpiece platform replacement is the core of lithography machine development, and also the premise to complete the subsequent scanning lithography task. The replacement process requires high speed and high precision, so the disturbance can easily lead to the failure of the replacement station. The double workpiece platform macro motion system is mainly responsible for the long stroke straight line motion of the replacement station. The continuity of the whole station changing process can be ensured only when the positioning precision reaches the micron level required by the target. In this paper, the motion of the macro motion system is reduced to the position motion of X direction single motor and the synchronous motion of Y direction multi-motor. The disturbance suppression technique is studied respectively, and the corresponding disturbance compensator is designed on the basis of simulation. Then the disturbance suppression experiment is carried out in the course of changing the platform on the double workpiece platform, and the immunity of the system is greatly improved. First of all, according to the structural characteristics of the double workpiece platform and the trajectory planning of the platform change, the motion of the macro motion system in the course of changing the platform is analyzed, and the necessity of analyzing the disturbance of the macro motion system is expounded. Finally, the possible disturbances in the macro-moving system are analyzed. Secondly, the disturbance of X-direction single motor is analyzed and suppressed. Therefore, based on the principle of linear motor, it is concluded that the disturbance of positioning force is the main disturbance in the process, and then the identification of the model of force disturbance is carried out on the experimental platform. Then, the disturbance observer is designed, and the disturbance of positioning force is compensated under the premise of robust stability, and the simulation is carried out. Thirdly, the disturbance in Y direction multi motor synchronization process is analyzed and suppressed. Combined with the existing synchronization control strategy, the synchronous control strategy based on disturbance compensation is introduced. The disturbance observer is applied in the compensation loop. The load disturbance dynamic compensator is designed, and the synchronization control strategy is modified, and its effectiveness is verified by simulation. Finally, the disturbance suppression experiment of the macro motion system is carried out on the double workpiece platform, and then, on the basis of the disturbance rejection of the macro motion system to a certain extent, some practical hardware and software problems encountered in the debugging of the changing station are solved. It includes multiple motion control card and memory expansion, which makes the whole station change realized smoothly. Not only the precision required by the system index is achieved, but also the immunity of the system is improved on the basis of the speed of the station changing to a certain extent.
【學位授予單位】：哈爾濱工業(yè)大學
【學位級別】：碩士
【學位授予年份】：2015
【分類號】：TN305.7

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本文編號：2014749