發(fā)布時間：2018-05-23 07:07

  本文選題：極化聚合物 + 平面光波導(dǎo)　； 參考：《吉林大學(xué)》2015年碩士論文

【摘要】：大數(shù)據(jù)網(wǎng)絡(luò)時代的開啟極大地增加了對數(shù)據(jù)和信息的需求，傳統(tǒng)的數(shù)據(jù)和信息傳輸方式已經(jīng)不能滿足人類不斷增長的需求。以光纖作為主要傳輸媒介的通信系統(tǒng)相對于傳統(tǒng)通信系統(tǒng)具有帶寬高、誤碼率低、抗電磁干擾能力強、損耗小、速度快等優(yōu)點。作為光網(wǎng)絡(luò)中光分插復(fù)用系統(tǒng)（OADM）和光交叉連接系統(tǒng)（OXC）核心的光調(diào)制器、光開關(guān)及其陣列在波分復(fù)用技術(shù)（WDM）中起著不可或缺的作用。相比于鈮酸鋰（LiNbO3）等無機材料，極化聚合物具有介電常數(shù)低、電光系數(shù)高、工藝簡單、易于集成的優(yōu)點，基于極化聚合物的電光調(diào)制器半波電壓可降至1V以下，3dB帶寬可達100GHz以上，而聚合物電光開關(guān)的時間響應(yīng)則可達到ps量級。因此，極化聚合物電光調(diào)制器件已成為寬帶光纖通信系統(tǒng)中極具競爭力的核心器件之一。 本文對基于極化聚合物的電光調(diào)制器及開關(guān)進行了理論模擬和計算，完成了材料的合成、掩模版的設(shè)計并通過旋涂、蒸發(fā)、光刻等CMOS工藝完成了器件的制備，并對其性能進行了測試。論文主要包括以下幾部分工作： 1、設(shè)計并制備了一種共面波導(dǎo)（Co-planar waveguide, CPW）金屬電極，并利用矢量網(wǎng)絡(luò)分析儀(Vector network analyzer)對電極的S參數(shù)等微波特性進行了測量，并根據(jù)S21參數(shù)對電極的衰減常數(shù)、相位常數(shù)、特性阻抗和介電常數(shù)進行了計算、模擬；設(shè)計了掩埋型共面波導(dǎo)電極聚合物電光調(diào)制器，以NOA73(NorlandOptical Adhesive73)為包層，DR1(Disperse Red1)/PMMA為芯層，設(shè)計了波導(dǎo)和電極的掩模版，對電極和聚合物波導(dǎo)的工藝參數(shù)進行了優(yōu)化，得到NOA73凹槽的最佳刻蝕參數(shù)，獲得底面粗糙度較小、垂直度較好的形貌。最后，對電光調(diào)制器的通光和調(diào)制情況進行了測試。 2、合成了一種主客摻雜型電光聚合物材料DR1/SU-8，并對其電光系數(shù)γ33和折射率進行了測量。為限制包層的吸收、減少電光開關(guān)的損耗、提高調(diào)制效率，選用紫外固化膠NOA73作為器件的包層材料。利用原子力顯微鏡（Atomic forcemicroscope, AFM）、橢偏儀和分光光度計對NOA73的成膜性、折射率以及吸收特性進行了表征；計算了倒脊型波導(dǎo)單模傳輸條件、基模有效折射率與脊高的關(guān)系、芯層光功率占比與脊高的關(guān)系以及有效折射率與波長的關(guān)系；利用BPM（Beam propagation method）軟件對帶有微帶線（Micro-strip line, MSL）行波電極的馬赫-曾德爾干涉儀（Mach-zehnder interferometer, MZI）型電光開關(guān)中的光功率分布情況進行了模擬；對制備完成的電光開關(guān)進行了掃描電子顯微鏡（Scanning electronic microscopy, SEM）的表征。測試結(jié)果表明，通光良好，并在10KHz下得到了方波響應(yīng)信號波形，電光開關(guān)的上升時間和下降時間分別是3.199ns和2.559ns。 3、利用NOA73和DR1/SU-8設(shè)計和制備了基于表面等離子波導(dǎo)結(jié)構(gòu)及微帶線行波電極的聚合物電光開關(guān)。采用馬赫-曾德爾干涉儀型波導(dǎo)結(jié)構(gòu)，，設(shè)計了與波導(dǎo)相匹配的MSL電極，通過旋涂、紫外光刻、濕法刻蝕和熱蒸發(fā)等平面工藝完成電光開關(guān)的制備，利用接觸式電極化方法實現(xiàn)DR1/SU-8的二階光學(xué)非線性，并對電光開關(guān)性能進行了測試，在10KHz下觀察到方波響應(yīng)，電光開關(guān)的上升時間和下降時間分別是578.7ns和645.3ns。
[Abstract]:The optical modulator , optical switch and its array have the advantages of high bandwidth , low bit error rate , strong anti - electromagnetic interference , low loss , high speed and so on . The polarization polymer has the advantages of low dielectric constant , high electro - optic coefficient , simple process and easy integration .

In this paper , the electro - optical modulator and switch based on polarized polymer are simulated and calculated theoretically , the synthesis of the material , the design of the mask plate are finished , and the performance of the device is tested by spin coating , evaporation , photoetching and other CMOS processes . The paper mainly includes the following parts :

1 . A kind of Co - planar waveguide ( CPW ) metal electrode was designed and fabricated , and the microwave characteristics of the electrode were measured by Vector Network analyzer . The attenuation constant , phase constant , characteristic impedance and dielectric constant of the electrode were calculated and simulated according to S21 parameters .
In this paper , a buried coplanar waveguide electrode polymer electro - optic modulator is designed with NOA73 ( Norland Optical Waveguide sive73 ) as cladding , DR1 ( doped Red1 ) / PMMA as core layer , waveguide and electrode mask are designed , the optimum etching parameters of the groove of NOA73 are obtained , and the topography of NOA73 groove is obtained . Finally , the light and modulation of the electro - optic modulator are tested .

2 . The electro - optic polymer material DR1 / SU - 8 was synthesized and the electro - optic coefficient 緯 33 and refractive index were measured . In order to limit the absorption of cladding , the loss of electro - optic switch was reduced , and the modulation efficiency was improved . The film - forming property , refractive index and absorption characteristics of NOA73 were characterized by atomic force microscope ( AFM ) , ellipsometers and spectrophotometer .
The relationship between the effective refractive index of the core layer and the ridge height , the relation between the effective index of the core layer and the ridge height and the relation between the effective refractive index and the wavelength are calculated .
The distribution of optical power in Mach - Zehnder interferometer ( MZI ) type electro - optical switch with micro - strip line and micro - strip line is simulated by BPM ( Beam propagation method ) software .
The scanning electron microscopy ( SEM ) was characterized by scanning electron microscopy ( SEM ) . The results show that the square wave response signal waveform is obtained at 10 KHz . The rise time and fall time of the electro - optical switch are 3.199 ns and 2.559ns , respectively .

3 . Using NOA73 and DR1 / SU - 8 , a polymer electro - optic switch based on surface plasmon waveguide structure and microstrip line traveling wave electrode was designed and fabricated . The fabrication of electro - optical switch was designed by using Mach - Zehnder interferometer type waveguide structure . The second order optical nonlinearity of DR1 / SU - 8 was realized by spin coating , UV lithography , wet etching and thermal evaporation . The performance of the electro - optical switch was tested . The square wave response was observed at 10 KHz . The rise time and fall time of the electro - optic switch were 578.7ns and 645.3ns , respectively .
【學(xué)位授予單位】：吉林大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2015
【分類號】：TN761

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本文編號：1923751