發(fā)布時(shí)間：2018-05-16 14:16

  本文選題：橫向場激勵 + 諧振器�。� 參考：《寧波大學(xué)》2017年碩士論文

【摘要】：橫向場激勵是一種新的激勵模式,不同于傳統(tǒng)的厚度場激勵模式,其電極位于晶體板的同一表面上。這種新型激勵模式相比于厚度場激勵模式具有很多優(yōu)勢,如品質(zhì)因數(shù)值高、頻率穩(wěn)定性好、晶體老化率低等特點(diǎn)。有關(guān)橫向場器件聲波振動分析方法的研究成果還非常缺乏,直接影響到器件最佳設(shè)計(jì)參數(shù)的確定。本文中以橫向電場激勵的非理想電極慢剪切模態(tài)石英晶體諧振器為研究對象。主要完成了以下工作:基于Mindlin板理論推導(dǎo)了橫向場激勵的板方程,對方程組進(jìn)行截?cái)?忽略掉高階位移與電勢,保留零階與一階項(xiàng),得到考慮能量耗散的橫向場激勵石英晶體的一階板方程;利用橫向場激勵的一階板方程對晶體板的自由振動進(jìn)行了分析,得到其電極區(qū)和非電極區(qū)的色散關(guān)系;考慮厚度扭曲振動與面剪切振動的耦合,求得了橫向場激勵石英晶體板振動時(shí)的頻譜關(guān)系,即頻率和板長/厚比的關(guān)系;對橫向場激勵的石英晶體板進(jìn)行了受迫振動分析,得到其動態(tài)電容與諧振頻率的關(guān)系;通過分析各諧振模態(tài)的厚度扭曲與面剪切振動耦合情況,確定了符合良好能陷特性的諧振模態(tài);最后分析了不同器件參數(shù),如電極間距值、電極尺寸、電極質(zhì)量比R等對器件振動特性的影響。然后設(shè)計(jì)并制作橫向場器件,通過測試器件的阻抗特性,對理論結(jié)果進(jìn)行了驗(yàn)證。研究結(jié)果可為橫向場激勵石英體聲波器件的尺寸參數(shù)設(shè)計(jì)提供理論依據(jù),對利用橫向場器件研制高性能諧振器和傳感器具有積極促進(jìn)作用。
[Abstract]:Transverse field excitation is a new excitation mode, which is different from the traditional thickness field excitation mode, and its electrode is located on the same surface of the crystal plate. Compared with the thickness field excitation model, this new excitation mode has many advantages, such as high quality, good frequency stability and low aging rate. The research results on acoustic vibration analysis of transverse field devices are still very scarce, which directly affect the determination of the optimum design parameters of the devices. The slow shear mode quartz crystal resonator with non-ideal electrode excited by transverse electric field is studied in this paper. The main works are as follows: based on the Mindlin plate theory, the plate equation of transverse field excitation is derived, the equations are truncated, the higher-order displacement and potential are ignored, and the zero-order and first-order terms are retained. The first order plate equation of quartz crystal excited by transverse field with energy dissipation is obtained, the free vibration of crystal plate is analyzed by the first order plate equation excited by transverse field, and the dispersion relation between the electrode region and the non electrode region is obtained. Considering the coupling of thickness torsional vibration and plane shear vibration, the frequency spectrum relation of quartz crystal plate excited by transverse field is obtained, that is, the relation between frequency and length / thickness ratio, and the forced vibration of quartz crystal plate excited by transverse field is analyzed. The relationship between the dynamic capacitance and the resonant frequency is obtained. By analyzing the coupling of thickness distortion and plane shear vibration of each resonant mode, the resonant mode with good energy trapping characteristics is determined. Finally, different device parameters, such as electrode spacing, are analyzed. The effect of electrode size and electrode mass ratio R on the vibration characteristics of the device. Then the transverse field devices are designed and fabricated, and the theoretical results are verified by testing the impedance characteristics of the devices. The results can provide a theoretical basis for the design of dimension parameters of quartz bulk acoustic devices excited by transverse field, and can promote the development of high performance resonators and sensors using transverse field devices.
【學(xué)位授予單位】：寧波大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TN65

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