本文選題：直線度 + 位移�。� 參考：《浙江理工大學(xué)》2017年碩士論文

【摘要】：直線度誤差作為幾何測量領(lǐng)域中基本的參數(shù)之一,在現(xiàn)代精密設(shè)備與儀器制造中起著重要的作用。在眾多直線度測量方法當(dāng)中,基于激光外差干涉的方法因其具有納米級的測量精度、米級的測量范圍和能直接溯源到米定義等優(yōu)點而得到廣泛應(yīng)用。但是在實際測量中,除了光學(xué)元器件的非線性誤差、干涉信號處理誤差以及激光波長穩(wěn)定性等因素外,激光光束漂移是影響基于激光外差干涉原理直線度或位移測量精度的一個關(guān)鍵因素,特別是在長行程導(dǎo)軌直線度測量當(dāng)中。本論文重點研究了激光光束漂移對激光干涉長行程精密導(dǎo)軌直線度測量精度影響,提出激光光束漂移對長行程精密導(dǎo)軌直線度和位移測量的補(bǔ)償方法,旨在提高長行程導(dǎo)軌直線度和位移的測量精度。論文綜合分析了直線度測量方法和激光光束漂移檢測及補(bǔ)償方法國內(nèi)外研究現(xiàn)狀,提出了檢測兩測量光束多普勒頻移差和單測量光束多普勒頻移相結(jié)合的直線度誤差和位移的測量方法,設(shè)計了長行程精密導(dǎo)軌直線度與位移測量及補(bǔ)償系統(tǒng)的光路結(jié)構(gòu),建立了激光光束漂移與偏擺角和俯仰角分離檢測的數(shù)學(xué)模型,分析了測量過程中激光束角度偏轉(zhuǎn)與位置敏感探測器上光斑位置變化的關(guān)系,給出了水平和豎直方向上激光光束漂移以及偏擺角和俯仰角檢測表達(dá)式。分析了激光光束漂移對直線度和位移測量結(jié)果的影響,提出了激光光束漂移對直線度和位移測量的補(bǔ)償方法,設(shè)計了系統(tǒng)的信號處理方法并利用Visual Basic語言設(shè)計了系統(tǒng)測量軟件。為了驗證本論文提出的激光外差干涉長行程精密導(dǎo)軌直線度和位移測量及補(bǔ)償方法的可行性,搭建了系統(tǒng)實驗裝置,分別進(jìn)行了以下實驗:(1)激光光束靜態(tài)穩(wěn)定性實驗,實驗結(jié)果表明經(jīng)過補(bǔ)償后光斑的位置在x方向上和y方向上的穩(wěn)定性都能夠提升50%以上;(2)偏擺角和俯仰角的檢測與補(bǔ)償實驗,實驗結(jié)果表明對于同一個線性導(dǎo)軌在距離激光器不同位置上,經(jīng)過激光光束漂移補(bǔ)償后,偏擺角和俯仰角與Renishaw干涉儀角度測量組件具有較好的一致性;(3)直線度和位移測量與補(bǔ)償實驗,實驗結(jié)果表明對于同一個線性導(dǎo)軌在距離激光器不同位置上,經(jīng)過激光光束漂移補(bǔ)償后,系統(tǒng)直線度測量值與Renishaw干涉儀直線度測量組件測量值,系統(tǒng)位移測量值與導(dǎo)軌定位位移都具有良好的一致性。
[Abstract]:As one of the basic parameters in the field of geometric measurement, straightness error plays an important role in the manufacture of modern precision equipment and instruments. Among the many straightness measurement methods, the laser heterodyne interferometry method has been widely used because of its advantages of nanoscale measurement accuracy, meter level measurement range and direct traceability to meter definition. But in the actual measurement, besides the nonlinear error of optical components, the error of interference signal processing and the stability of laser wavelength, etc. Laser beam drift is a key factor that affects the straightness or displacement measurement accuracy based on laser heterodyne interferometry, especially in the measurement of long travel guideway straightness. In this paper, the influence of laser beam drift on the measurement accuracy of laser interference precision guideway straightness is studied, and the compensation method of laser beam drift to long stroke precision guideway straightness and displacement measurement is put forward. The purpose of this paper is to improve the measuring accuracy of straightness and displacement of long stroke guideway. In this paper, the research status of straightness measurement method and laser beam drift detection and compensation method at home and abroad are comprehensively analyzed. In this paper, the measurement method of the straightness error and displacement of the two measuring beam Doppler frequency shift combined with the single measurement beam Doppler frequency shift is put forward, and the optical circuit structure of the long stroke precision guideway straightness and displacement measurement and compensation system is designed. A mathematical model of laser beam drift, deflection angle and pitch angle detection is established, and the relationship between laser beam angle deflection and spot position change on position sensitive detector is analyzed. The expressions of laser beam drift, deflection angle and pitch angle in horizontal and vertical directions are given. The influence of laser beam drift on the measurement results of straightness and displacement is analyzed. The compensation method of laser beam drift to straightness and displacement measurement is proposed. The signal processing method of the system is designed and the system measurement software is designed by Visual Basic language. In order to verify the feasibility of the method of measuring and compensating the straightness and displacement of the laser heterodyne interference precision guideway proposed in this paper, the system experimental devices are set up, and the following experiments on the static stability of laser beam are carried out respectively. The experimental results show that the stability of spot position in x direction and y direction can be increased by more than 50% after compensation. The experimental results show that for the same linear guideway at different positions in the distance laser, the laser beam drift compensation, The experiment of measuring and compensating for straightness and displacement of deflection angle and pitch angle with Renishaw interferometer has been carried out. The experimental results show that for the same linear guideway at different positions in the range laser, After the laser beam drift compensation, the measured values of the system straightness are in good agreement with the measured values of the Renishaw interferometer straightness measurement module, the system displacement measurements and the guide rail positioning displacements.
【學(xué)位授予單位】：浙江理工大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TG83;TN249

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