本文選題：多晶硅 + 損傷分析�。� 參考：《石河子大學(xué)》2017年碩士論文

【摘要】：多晶硅(Polysilicon)作為半導(dǎo)體材料所使用的基礎(chǔ)材料,在微電子技術(shù)和光伏發(fā)電技術(shù)中應(yīng)用普遍,被稱為“微電子大廈的基石”。多晶硅破碎長久以來一直是采用人工使用鑲嵌硬質(zhì)合金或者碳化鎢合金的破碎錘進(jìn)行敲碎作業(yè),即使在一些多晶硅技術(shù)較先進(jìn)的國家也一貫采用這種破碎方式。人工破碎靈活性好,但破碎效率低,破碎過程中產(chǎn)生的粉塵,對(duì)工人健康危害較大。隨著國內(nèi)多晶硅企業(yè)的規(guī)模和集中度大幅提升,人工破碎已難以滿足生產(chǎn)需求,自動(dòng)化破碎是多晶硅破碎發(fā)展的必然趨勢(shì)。本文以多晶硅在沖擊作用下的損傷裂紋擴(kuò)展的基礎(chǔ)上,研究設(shè)計(jì)了沖擊式多晶硅破碎裝置。采用Pro/E三維建模軟件建立了破碎裝置的三維模型,對(duì)破碎裝置的主要零部件進(jìn)行了靜力學(xué)分析,并對(duì)破碎裝置進(jìn)行了PLC運(yùn)控控制的編寫。1、采用AUTODYN軟件,結(jié)合脆性材料的損傷本構(gòu)模型,對(duì)多晶硅棒在平面破碎錘和圓頭破碎錘對(duì)多晶硅棒進(jìn)行沖擊損傷模擬,觀察其各自的裂紋擴(kuò)展分布情況。平面錘頭沖擊下裂紋擴(kuò)展較快且擴(kuò)展區(qū)域更廣,圓錘頭裂紋擴(kuò)展較慢。經(jīng)分析,平面錘頭更適合多晶硅的破碎,圓點(diǎn)的作用更適合作為輔助破碎。根據(jù)這部分的損傷模擬分析,為沖擊式多晶硅破碎裝置提供了理論依據(jù)。2、根據(jù)沖擊式多晶硅破碎裝置的設(shè)計(jì)要求,以沖擊作用下多晶硅損傷裂紋擴(kuò)展為基礎(chǔ),提出沖擊式多晶硅破碎裝置的總體設(shè)計(jì)方案,對(duì)傳動(dòng)部分進(jìn)行選型,對(duì)關(guān)鍵零部件進(jìn)行設(shè)計(jì),最后采用Pro/E進(jìn)行裝置的整體三維建模。3、采用ANSYS有限元分析軟件對(duì)裝置的關(guān)鍵零部件進(jìn)行靜力學(xué)仿真,分析了關(guān)鍵零部件在作業(yè)過程的可靠性。4、使用PLC可編程邏輯控制器,根據(jù)所要求的破碎步驟,采用GX-Developer軟件編寫梯形圖指令,實(shí)現(xiàn)破碎裝置的自動(dòng)化控制。經(jīng)軟件仿真模擬,指令編寫正確。
[Abstract]:Polysilicon, as the basic material used in semiconductor materials, is widely used in microelectronics and photovoltaic power generation technology. It is called "the cornerstone of microelectronics building". For a long time, the crushing of polysilicon has been done by using hammer embedded in cemented carbide or tungsten carbide, even in some countries with advanced polysilicon technology. The artificial crushing has good flexibility, but the crushing efficiency is low, and the dust produced in the crushing process is harmful to workers' health. With the increase of the scale and concentration of polysilicon enterprises in China, it is difficult to meet the production demand by artificial crushing. Automatic crushing is the inevitable trend of the development of polysilicon crushing. On the basis of damage crack propagation of polysilicon under impact, an impact polysilicon crushing device is designed in this paper. The 3D model of the crushing device is established by using Pro/E software. The main parts of the crushing device are statically analyzed, and the PLC operation control is compiled for the crushing device. The AUTODYN software is used to control the crushing device. Combined with the damage constitutive model of brittle materials, the impact damage of polysilicon bar on plane and round head was simulated, and their crack propagation distribution was observed. Under the impact of the plane hammer, the crack growth is faster and the propagation area is wider, and the crack growth of the circular hammer is slower. The analysis shows that the plane hammer is more suitable for the breaking of polysilicon and the dot is more suitable for the auxiliary crushing. According to the damage simulation analysis of this part, it provides a theoretical basis for the impact polysilicon crushing device. According to the design requirements of the impact polysilicon crushing device, it is based on the damage crack propagation of the impact polysilicon. The overall design scheme of the impact polysilicon crushing device is put forward. The type selection of the transmission part and the design of the key parts are carried out. Finally, the whole 3D modeling of the device is built by Pro/E. The statics simulation of the key parts of the device is carried out by using ANSYS finite element analysis software. The reliability of the key parts in the operation process is analyzed. The reliability of the key parts is analyzed. The PLC programmable logic controller is used. According to the required crushing steps, the GX-Developer software is used to write the ladder diagram instruction to realize the automatic control of the crushing device. Through the simulation of software, the instruction is written correctly.
【學(xué)位授予單位】：石河子大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TN304.12

【參考文獻(xiàn)】

相關(guān)期刊論文 前10條

1 劉國杰;;破碎理論及破碎機(jī)的研究現(xiàn)狀與展望[J];山西建筑;2016年21期

2 石祥超;陶祖文;孟英峰;蔡武強(qiáng);李皋;劉力;;致密砂巖Johnson-Holmquist損傷本構(gòu)模型參數(shù)求取及驗(yàn)證[J];巖石力學(xué)與工程學(xué)報(bào);2015年S2期

3 李運(yùn)祿;尹建平;王志軍;王義鼎;;基于SPH算法對(duì)混凝土裂紋擴(kuò)展研究[J];兵器材料科學(xué)與工程;2015年05期

4 孫強(qiáng);嚴(yán)大洲;湯傳斌;萬燁;;還原爐生產(chǎn)多晶硅常見問題及對(duì)策探討[J];有色冶金節(jié)能;2015年03期

5 周志明;;慣性圓錐破碎機(jī)細(xì)碎鋼渣的應(yīng)用實(shí)踐[J];品牌(下半月);2015年05期

6 王巖;;顎式破碎機(jī)建模仿真的研究[J];機(jī)電產(chǎn)品開發(fā)與創(chuàng)新;2015年01期

7 黃淑琴;李正峰;;新型錘式破碎機(jī)錘頭碰撞平衡計(jì)算及設(shè)計(jì)[J];煤炭技術(shù);2014年05期

8 王海兵;壽列楓;張建鑫;田宙;歐卓成;周剛;;彈丸撞擊下花崗巖靶破壞效應(yīng)實(shí)驗(yàn)與數(shù)值分析[J];巖石力學(xué)與工程學(xué)報(bào);2014年02期

9 周開亮;楊云山;趙興凡;張金清;周杰;陳科彤;;工業(yè)硅錠破碎設(shè)備的實(shí)驗(yàn)研究[J];云南冶金;2013年03期

10 楊秀雙;;S7-200PLC在伺服電機(jī)位置控制中的應(yīng)用分析[J];科技創(chuàng)業(yè)家;2013年05期

相關(guān)博士學(xué)位論文 前3條

1 余楊;光伏多晶硅原料國際價(jià)格形成機(jī)制研究[D];浙江大學(xué);2013年

2 肖毅華;有限元法與光滑粒子法的耦合算法研究[D];湖南大學(xué);2012年

3 郭彥雙;脆性材料中三維裂隙斷裂試驗(yàn)、理論與數(shù)值模擬研究[D];山東大學(xué);2007年

相關(guān)碩士學(xué)位論文 前6條

1 李基有;基于PLC控制的多傳感器物料自動(dòng)分揀系統(tǒng)設(shè)計(jì)[D];華南理工大學(xué);2015年

2 王瓊;多晶硅生產(chǎn)中還原尾氣回收過程的節(jié)能降耗Aspen Plus模擬研究[D];湖南大學(xué);2014年

3 何軼斌;寧夏電網(wǎng)光伏發(fā)電接入經(jīng)濟(jì)性研究[D];華北電力大學(xué);2013年

4 楊瑞芳;脆性材料斷裂預(yù)荷機(jī)構(gòu)的虛擬開發(fā)[D];蘭州理工大學(xué);2012年

5 李森;反擊式破碎機(jī)破碎單顆粒巖石的仿真研究[D];河南理工大學(xué);2012年

6 王淑坤;滾珠絲杠進(jìn)給系統(tǒng)定位精度分析[D];大連理工大學(xué);2006年

，

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