本文選題：柔性神經(jīng)微電極 + Parylene��； 參考：《石家莊鐵道大學(xué)》2015年碩士論文

【摘要】：植入式微系統(tǒng)正在被廣泛應(yīng)用于諸多領(lǐng)域,例如:腦-機(jī)接口(Brain-Machine Interface,BCI)和神經(jīng)假體等。通過(guò)它們的幫助人們可以更加深入地了解神經(jīng)系統(tǒng),治療神經(jīng)性疾病。植入式神經(jīng)微電極是外部電子系統(tǒng)與神經(jīng)系統(tǒng)連接的關(guān)鍵器件,隨著神經(jīng)科學(xué)研究和醫(yī)療需求的發(fā)展,植入式微電極的應(yīng)用越來(lái)越廣泛,對(duì)電極性能的要求也越來(lái)越高。本文主要工作集中在植入式柔性神經(jīng)微電極的一致性及其改性研究。本文進(jìn)行了基于普通硅片的不同規(guī)格的柔性神經(jīng)微電極設(shè)計(jì)、制作、封裝以及電學(xué)性能測(cè)試;研究了氧反應(yīng)離子刻蝕Parylene襯底表面以增強(qiáng)Parylene襯底和器件金屬膜層之間粘附性能的刻蝕工藝;研究了基于普通硅片的一致性好的柔性神經(jīng)微電極的電學(xué)性能的改進(jìn)。本文主要的研究成果和創(chuàng)新點(diǎn)如下:根據(jù)動(dòng)物實(shí)驗(yàn)需求,設(shè)計(jì)了7種不同規(guī)格的柔性神經(jīng)微電極。根據(jù)本研究小組開(kāi)發(fā)的基于硅片的工藝特點(diǎn),實(shí)現(xiàn)了在單片4英寸片完成普通硅片上500多個(gè)柔性神經(jīng)微電極的工藝版圖設(shè)計(jì),實(shí)現(xiàn)了柔性神經(jīng)微電極工程制備的能效最優(yōu)化。通過(guò)氧反應(yīng)離子刻蝕對(duì)柔性神經(jīng)微電極中柔性襯底Parylene薄膜和金屬層薄膜的粘附性能進(jìn)行改善。研究了與柔性神經(jīng)微電極制備工藝兼容的、具有批量化修飾能力的氧反應(yīng)離子刻蝕方法,通過(guò)對(duì)氧反應(yīng)離子刻蝕的壓強(qiáng)、氧氣流量和刻蝕時(shí)間參數(shù)的實(shí)驗(yàn)研究,通過(guò)百格法的粘附性能測(cè)試,得到了可使Parylene薄膜和金屬層薄膜增強(qiáng)的干刻條件,實(shí)現(xiàn)了柔性神經(jīng)微電極的產(chǎn)品化。對(duì)所制備的柔性神經(jīng)微電極進(jìn)行了適合工程化制備的電學(xué)改性方法研究。將氧反應(yīng)離子刻蝕的工藝方法應(yīng)用于柔性神經(jīng)微電極的制備過(guò)程中,通過(guò)對(duì)氧反應(yīng)離子刻蝕參數(shù)的實(shí)驗(yàn)研究,得到了可使電極阻抗降低20倍的氧反應(yīng)離子刻蝕條件,提高了電極的一致性,并改進(jìn)了柔性神經(jīng)微電極的電學(xué)性能。
[Abstract]:Implantable microsystems are widely used in many fields, such as Brain-Machine Interface (BCII) and neuroprosthesis. Through their help people can better understand the nervous system, the treatment of neurological diseases. Implantable neural microelectrode is the key device to connect the external electronic system with the nervous system. With the development of neuroscience and medical needs, the implanted microelectrode is more and more widely used, and the performance of the electrode is required more and more. This paper focuses on the consistency and modification of implanted flexible neural microelectrodes. In this paper, the design, fabrication, encapsulation and electrical performance testing of flexible neural microelectrodes with different specifications based on common silicon wafers are carried out. The etching process of oxygen reactive ion etching on the surface of Parylene substrate to enhance the adhesion between Parylene substrate and metal film was studied, and the improvement of electrical properties of flexible neural microelectrode based on common silicon wafer was studied. The main achievements and innovations of this paper are as follows: according to animal experimental requirements, seven kinds of flexible neural microelectrodes with different specifications have been designed. According to the technological characteristics of silicon wafer developed by this research group, the process layout design of 500 flexible neural microelectrodes on a single 4 inch wafer is realized, and the energy efficiency optimization of the fabrication of flexible neural microelectrode is realized. The adhesion properties of flexible substrates Parylene thin films and metal layer films in flexible neural microelectrode were improved by oxygen reactive ion etching. The oxygen reactive ion etching method, which is compatible with the preparation process of flexible neural microelectrode and has the ability of mass modification, is studied. The experimental study on the pressure, oxygen flow rate and etching time parameters of oxygen reactive ion etching is carried out. The dry etching conditions of Parylene thin film and metal layer film were obtained by testing the adhesive properties of the bounding method, and the production of flexible neural microelectrode was realized. The electrical modification method suitable for engineering preparation of the flexible neural microelectrode was studied. The process of oxygen reactive ion etching was applied to the preparation of flexible neural microelectrode. Through the experimental study of oxygen reactive ion etching parameters, the oxygen reactive ion etching condition was obtained, which can reduce the electrode impedance by 20 times. The uniformity of the electrode and the electrical properties of the flexible neural microelectrode are improved.
【學(xué)位授予單位】：石家莊鐵道大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TN305.7

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