GeSbSe基質(zhì)光子晶體波導(dǎo)傳輸特性與制備研究
發(fā)布時間:2018-04-14 20:08
本文選題:光子晶體波導(dǎo) + 傳輸特性。 參考:《寧波大學(xué)》2015年碩士論文
【摘要】:Ge Sb Se硫系光子晶體波導(dǎo)結(jié)合了硫系材料和光子晶體帶隙的特征。由于硫系材料具有較高的折射率、較低的雙光子吸收、良好的三階非線性和中紅外透過性等優(yōu)點(diǎn),使硫系光子晶體波導(dǎo)廣泛應(yīng)用在非線性光學(xué)和紅外傳感領(lǐng)域。本文從理論上研究了硫系光子晶體彎曲波導(dǎo)的傳輸特性,并對硫系直波導(dǎo)的制備做了簡單研究。本文從硫系光子晶體的結(jié)構(gòu)設(shè)計(jì)開始著手,分別設(shè)計(jì)了通信波段和中紅外波段硫系光子晶體波導(dǎo)結(jié)構(gòu);接著對通信波段和中紅外波段硫系60°彎曲波導(dǎo)傳輸特性進(jìn)行了研究,使這兩種波段的波導(dǎo)在很長工作波長范圍內(nèi)都有很高的傳輸效率,在此基礎(chǔ)上并對連續(xù)60°彎曲中紅外波段波導(dǎo)進(jìn)行簡單結(jié)構(gòu)優(yōu)化;最后對硫系光子晶體直波導(dǎo)的制備做了簡單的介紹,分別利用電子束曝光加ICP刻蝕和聚焦離子束這兩種方法來刻蝕硫系光子晶體直波導(dǎo),并對制備出的直波導(dǎo)結(jié)構(gòu)參數(shù)做了簡單分析。第一章首先介紹了光子晶體的概念及其特性和應(yīng)用范圍,接著介紹了硫系玻璃的特征及優(yōu)點(diǎn),并對硫系光子晶體波導(dǎo)研究現(xiàn)狀做了簡單介紹,最后對本文的研究背景做了簡單說明。第二章介紹光子晶體相關(guān)的理論知識。詳細(xì)介紹了用于計(jì)算光子晶體帶隙的平面波展開法(PWE)和用于模擬傳輸特性的時域有限差分法(FDTD),并對這兩種方法公式做了簡單的推導(dǎo)。第三章從光學(xué)軟件RSoft的基本操作入手,分別設(shè)計(jì)了通信波段和中紅外波段硫系光子晶體波導(dǎo)結(jié)構(gòu),設(shè)計(jì)時主要分析了硫系光子晶體結(jié)構(gòu)類型、晶格類型、半徑等對硫系光子晶體帶隙的影響,最終得到了寬帶隙的硫系光子晶體,當(dāng)在設(shè)計(jì)好的硫系光子晶體中引入線缺陷時,可以得到性能優(yōu)良的硫系光子晶體波導(dǎo)。第四章重點(diǎn)介紹了硫系光子晶體60°彎曲波導(dǎo)在通信波段和中紅外波段傳輸特性的優(yōu)化,對于通信波段彎曲波導(dǎo),未優(yōu)化的波導(dǎo)在通信波段的傳輸效率很低,通過在彎曲區(qū)域加上若干空氣孔使其盡量緩平,可以大大提高其傳輸效率。同理對于中紅外波段彎曲波導(dǎo),未優(yōu)化的波導(dǎo)傳輸效率也很低?梢允紫仍趶澢鷧^(qū)域引入兩個空氣孔使其盡量緩平,再在線缺陷區(qū)域引入若干空氣孔,經(jīng)過上述兩步優(yōu)化的中紅外波段硫系光子晶體波導(dǎo)無論是傳輸帶寬還是傳輸效率都能得到很大的提高,為集成光學(xué)的實(shí)現(xiàn)提供了可能。第五章介紹了硫系光子晶體直波導(dǎo)的制備工藝,重點(diǎn)介紹電子束曝光和聚焦離子束刻蝕來制備硫系光子晶體直波導(dǎo),最后對制備所得波導(dǎo)結(jié)構(gòu)做了簡單的性能分析,并比較了這兩種制備方法的優(yōu)缺點(diǎn)。第六章對全文的總結(jié),并指出本論文不足之處。
[Abstract]:Ge Sb Se chalcogenide photonic crystal waveguide materials and combines with the characteristics of photonic crystal band gap chalcogenide. Because of the refraction chalcogenide material has high rate, low two-photon absorption, three order nonlinear and good in infrared transmission advantages, make chalcogenide photonic crystal waveguide is widely used in nonlinear optics and infrared the sensing field. This paper studies the transmission properties of chalcogenide photonic crystal waveguide theoretically, and the sulfur straight waveguide preparation to do a simple research. This article starts from the structure design of chalcogenide photonic crystal, respectively designs the communication band and red band chalcogenide photonic crystal waveguide structure; then study on the transmission characteristics of communication band and infrared chalcogenide 60 degree bend waveguide, the waveguide of the two band has high transmission efficiency in the long wavelength range, on the basis of continuous 60 degree bend Song in the infrared band waveguide has the advantages of simple structure optimization; at the end of the straight waveguide chalcogenide photonic crystals is briefly introduced, respectively by electron beam lithography and ICP etching and focused ion beam etching method to the two kinds of chalcogenide photonic crystal waveguide, the straight waveguide structure parameters and the prepared to do a simple analysis. The first chapter introduces the concept of photonic crystals and its characteristics and application scope, and then introduces the characteristics and advantages of chalcogenide glass, and the research status of chalcogenide photonic crystal waveguide is introduced, finally the background of this study made a simple description. The second chapter introduces the related theoretical knowledge of photonic crystal details of the calculation for planar photonic band gap wave expansion method (PWE) and used to simulate the transmission characteristics of the finite-difference time-domain method (FDTD), and the two methods to do a simple formula is derived. The third chapter Starting from the basic operation of the optical software RSoft, designs communication band and infrared band chalcogenide photonic crystal waveguide structure design, mainly analyzes the chalcogenide photonic crystal structure, lattice type, the radius of influence on chalcogenide photonic crystal band gap, finally got the chalcogenide photonic crystal band gap, when the line defect in chalcogenide photonic crystal in good design, can get the chalcogenide photonic crystal waveguide with excellent performance. The fourth chapter focuses on the optimization of chalcogenide photonic crystal 60 degree bend waveguide in communication band and infrared transmission characteristics, the communication band bend waveguide, waveguide non optimized transmission efficiency in communication the band is very low, through the curved region plus several air holes to minimize corrosion, can greatly improve the transmission efficiency. Empathy for the mid infrared band bend waveguide, wave guide transmission efficiency is not optimized The rate is very low. It first introduces two air holes in the curved region to minimize corrosion, then the defect area online introduces a number of air holes, through infrared chalcogenide photonic crystal waveguide of the two step optimization of both the transmission bandwidth or transmission efficiency can be greatly improved, provides the possibility to realize integration optics. The fifth chapter introduces the preparation technology of straight waveguide chalcogenide photonic crystal, focuses on electron beam lithography and focused ion beam etching to prepare chalcogenide photonic crystal waveguide, finally makes a simple analysis to the preparation of the waveguide structure, and compared the advantages and disadvantages of the two kinds of preparation methods. In the sixth chapter, the summary of the whole thesis, and points out the deficiency of this paper.
【學(xué)位授予單位】:寧波大學(xué)
【學(xué)位級別】:碩士
【學(xué)位授予年份】:2015
【分類號】:TN252
【參考文獻(xiàn)】
相關(guān)期刊論文 前1條
1 張巍;陳昱;付晶;陳飛飛;沈祥;戴世勛;林常規(guī);徐鐵峰;;Ge-Sb-Se硫系薄膜制備及光學(xué)特性研究[J];物理學(xué)報(bào);2012年05期
,本文編號:1750827
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