本文選題：激光轉(zhuǎn)印技術(shù)　切入點(diǎn)：太赫茲超材料　出處：《中國計(jì)量學(xué)院》2015年碩士論文

【摘要】：超材料是一種基于表面有序微納米結(jié)構(gòu)的人工材料,通過合理地設(shè)計(jì)金屬結(jié)構(gòu),可以實(shí)現(xiàn)多種自然界材料中不具備的嶄新而特殊的電磁傳播特性,如負(fù)折射效應(yīng)、超透鏡、電磁隱身、高頻磁響應(yīng)等。目前大多數(shù)太赫茲超材料微結(jié)構(gòu)器件都采用傳統(tǒng)的光刻技術(shù)來制備,但是光刻技術(shù)制備成本較高、周期長、步驟復(fù)雜。因此,尋求一種低成本、高效率、步驟簡單且性能優(yōu)越的方法制備微結(jié)構(gòu)器件引起了廣泛關(guān)注。激光轉(zhuǎn)印技術(shù)是一項(xiàng)基于納米金屬懸浮液(納米銀漿)激光誘導(dǎo)轉(zhuǎn)移的新興激光直寫技術(shù)。它通過計(jì)算機(jī)編制超材料諧振單元結(jié)構(gòu)圖形到空間光調(diào)制器,經(jīng)顯微物鏡成像,照射在涂布有納米銀漿的基底材料上,利用激光脈沖的能量轟擊使被激光光斑照亮的區(qū)域銀層脫落,在敷銀基片或接收襯底上形成微結(jié)構(gòu)器件。該技術(shù)在發(fā)展、定制、修改和修復(fù)微電子電路、制備超材料微結(jié)構(gòu)器件等方面具有很大的潛力。我們在國內(nèi)首次研究并利用激光轉(zhuǎn)印技術(shù)成功制備了太赫茲超材料微結(jié)構(gòu)器件。本文的研究工作主要包括:(1)對激光轉(zhuǎn)印技術(shù)進(jìn)行了系統(tǒng)的研究,包括系統(tǒng)的光路搭建及優(yōu)化、超材料器件加工程序設(shè)計(jì),樣品制備流程、工藝因素影響及工藝優(yōu)化等。目前,我們利用激光轉(zhuǎn)印技術(shù)已實(shí)現(xiàn)了在石英晶片上制備正結(jié)構(gòu)和互補(bǔ)結(jié)構(gòu)的超材料微結(jié)構(gòu)器件。對于互補(bǔ)結(jié)構(gòu)器件,器件結(jié)構(gòu)部分被激光光斑照亮脫落;而對于正結(jié)構(gòu)器件,大面積的銀層被光斑照亮而脫落,在敷銀基片上留下未被曝光的器件結(jié)構(gòu)部分。受能量密度的限制,目前制備的正結(jié)構(gòu)器件周期最大為100μm,互補(bǔ)結(jié)構(gòu)器件則沒有這個限制。制備的器件結(jié)構(gòu)最小線寬為4μm,銀層厚度在100 nm~500 nm范圍內(nèi)可調(diào),并且呈現(xiàn)出良好的厚度均勻性、清晰的邊緣特征、較少的納米銀顆粒殘留等。(2)利用激光轉(zhuǎn)印技術(shù)在厚度為200μm的石英晶片上制備了一種雙開口環(huán)橋式結(jié)構(gòu)和其互補(bǔ)結(jié)構(gòu)的太赫茲超材料諧振器。利用臺階儀和THz-TDS系統(tǒng)對其性能進(jìn)行了測試,測試結(jié)果顯示制備的微結(jié)構(gòu)器件共振單元具有良好的重復(fù)性,透射譜結(jié)果與模擬仿真分析結(jié)果基本吻合,可以用來制備超材料太赫茲器件。(3)研究了一種互補(bǔ)雙開口環(huán)太赫茲濾波器,該濾波器在0.2-1.4 THz范圍內(nèi)有三個諧振峰,可以通過調(diào)節(jié)內(nèi)環(huán)和外環(huán)的結(jié)構(gòu)尺寸靈活選擇諧振頻率的范圍。利用CST模擬仿真分析了在電磁波的作用下濾波器電磁特性變化,外環(huán)對三個通頻帶的產(chǎn)生都有一定的影響,內(nèi)環(huán)主要對第二個通頻帶的產(chǎn)生起作用。運(yùn)用激光轉(zhuǎn)印技術(shù)在石英晶片表面制備了樣品結(jié)構(gòu),實(shí)驗(yàn)結(jié)果顯示在0.40 THz、0.82 THz、1.15 THz附近有明顯的諧振效應(yīng),與仿真分析結(jié)果基本相符。目前我們使用的是低粘度的納米銀漿,可以在敷銀基片上制備微結(jié)構(gòu)器件。未來工藝優(yōu)化之后有望使用高粘度的納米銀漿在接收襯底上制備器件。
[Abstract]:Metamaterials are artificial materials based on ordered surface microstructures. By reasonably designing metal structures, new and special electromagnetic propagation characteristics, such as negative refraction effect, superlens, can be realized which are not possessed in many natural materials. Electromagnetic stealth, high frequency magnetic response and so on. At present, most terahertz supermaterial microstructural devices are fabricated by traditional lithography technology, but the cost of lithography technology is high, the period is long, and the steps are complicated. High efficiency, The fabrication of microstructural devices with simple steps and superior performance has attracted much attention. Laser transfer technology is a new laser direct-writing technique based on laser induced transfer of nanometallic suspensions (nanocrystalline silver paste). Computer program supermaterial resonant unit structure graphics to spatial light modulator, After microscopic objective imaging, the silver layer of the region illuminated by laser spot is shedded off by laser pulse energy bombardment on the substrate coated with nano-silver paste. A microstructural device is formed on a silver substrate or on a receiving substrate. The technology is developing, customizing, modifying and repairing microelectronic circuits, There is great potential in the fabrication of metamaterial microstructural devices. We have successfully fabricated terahertz microstructural devices using laser transfer technology for the first time in China. The research work in this paper mainly includes: 1) polarization. The optical transfer printing technology is studied systematically. Including system optical circuit construction and optimization, supermaterial device processing program design, sample preparation process, process factors and process optimization. We have made use of laser transfer technology to fabricate metamaterial microstructures on quartz wafers. For complementary devices, the structure of the devices is partly illuminated by laser speckles, and for positive structure devices, A large area of silver is illuminated by the spot and falls off, leaving unexposed parts of the device on the silver substrate. Limited by the energy density, At present, the maximum period of positive structure device is 100 渭 m, while that of complementary structure device is not limited. The minimum linewidth of the fabricated device is 4 渭 m, the thickness of silver layer is adjustable in the range of 100 nm~500 nm, and the thickness uniformity is good. Clear edge features, A terahertz supermaterial resonator with double open annular bridge structure and its complementary structure was prepared on quartz wafer with thickness of 200 渭 m by laser transfer printing technique. The terahertz supermaterial resonator was fabricated with step meter and THz-TDS system. Its performance was tested, The test results show that the resonant unit of the microstructural device has good repeatability, and the transmission spectrum results are in good agreement with the simulation results. A complementary double open loop terahertz filter is studied, which has three resonance peaks in the range of 0.2-1.4 THz. The range of resonant frequency can be flexibly selected by adjusting the structure size of inner and outer rings. The electromagnetic characteristics of the filter under the action of electromagnetic wave are simulated and analyzed by CST simulation. The outer loop has a certain influence on the generation of three passbands. The structure of the sample was prepared on the surface of quartz wafer by laser transfer printing technique. The experimental results show that there is an obvious resonance effect in the vicinity of 0.40THZ 0.82THzN 1.15 THz. The results are in good agreement with the simulation results. At present, we use low viscosity nano-silver paste, which can be used to fabricate microstructural devices on silver coated substrates. It is expected that high viscosity nano-silver paste can be used to fabricate devices on receiving substrates after optimization of the future process.
【學(xué)位授予單位】：中國計(jì)量學(xué)院
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2015
【分類號】：TN249

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