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基于激光自混合的微納米振動測量關鍵技術研究

發(fā)布時間:2018-03-30 00:15

  本文選題:激光自混合 切入點:小波分解 出處:《南京師范大學》2017年博士論文


【摘要】:激光自混合效應是指激光器既是光的發(fā)射器又是接收器,激光內腔受反射光影響改變激發(fā)射光功率、光譜和相位等特性的現(xiàn)象。自混合中激光器可被外腔光程和自身驅動條件(電流注入、電子束或光束泵浦)的變化輸出特定的低頻光波,攜帶被測物的位向信息,通過分析輸出光特性可獲知被測物理量。出射和反射光共享傳播路徑,系統(tǒng)緊湊易準直,且外腔中可置入聲光晶體引入頻移或電光晶體引入相移,配合相應解調技術測量精度獲極大提升(可達1個納米),因此自混合干涉技術可滿足計量環(huán)境中嵌入式高精度的要求。本文應用激光器復合諧振腔模型分別闡釋和驗證了單模單外腔和雙縱模雙外腔兩種情況下激光器的光振蕩特性,在課題組前輩工作基礎上研制了新型自混合干涉系統(tǒng),并應用研制系統(tǒng)對一維/亞超聲頻率/二維微納振動進行測量,實驗結果與商用激光多普勒測速儀(Ploytec-5000)進行比較。本文的主要內容大致分成如下四個部分:搭建基于磷化鋁鎵銦(ALGaInP)半導體激光器的精簡激光自混合測振系統(tǒng),分析激光器在適度和弱反饋范圍輸出光的特征,發(fā)現(xiàn)了條紋傾斜因子和被測相位在頻域分布位置不同。應用小波分解提取低頻相位進行希爾伯特變換解相,實現(xiàn)微米級位移的自辨向重建。該系統(tǒng)僅包含帶量子阱結構激光器,工作電流的閾值低,不使用衰減器直接對振動表面照射測量,對比多普勒測速儀(LaserDoppler Velocity meter,簡寫為LDV)結果發(fā)現(xiàn)改半導體激光自混合干涉對微米幅度的低頻(400Hz)振動分辨率優(yōu)于λ/12。實驗進一步表明該系統(tǒng)允許的反饋系數(shù)范圍廣,小波分解對激光散斑和環(huán)境噪聲有天然抑制性,配合防靜電電纜線,具有一定的可嵌入性。接著研究了半弧相移自混合干涉測振儀,特定的半個弧度相移深度由鈮酸鋰電光晶體的相移效應引入,激光器輸出光通過與正交相依因子乘積濾波的方式對被測相位降頻提取。無傅氏變換的純時域解調流程因計算效率高,在非接觸性瞬態(tài)振動測量(分析時間小于0.2秒)中的誤差為幾個納米,噪聲來源和大小也做了分析。本章利用該系統(tǒng)對非勻速振動測量,恢復出阻尼、脈沖、小幅度簡諧振動的振動曲線,精度較半導體激光自混合干涉測量系統(tǒng)提高一個數(shù)量級,有可能發(fā)展成為一種快速在線測振儀。搭建了高測量上限的共振型相移自混合系統(tǒng),相移由12MHz射頻驅動共振電光調制器實現(xiàn)。射頻自混合光信號通過高速數(shù)據(jù)傳輸技術轉化為可分析離散數(shù)值,進而對超聲換能器的幅頻特性進行了測量。實驗發(fā)現(xiàn)摻有氧化鎂的鈮酸鋰電光晶體在射頻段的驅動電壓低,具備良好的高速的單偏振態(tài)電光相移效應。鈮酸鋰電光晶體引入正弦共振相位調制使得微波激光自混合信號的諧波頻差進一步加大,因此系統(tǒng)對混疊效應免疫力腔,在30kHz以上的亞超聲波段振動測量中得到了優(yōu)于40納米的精度。同時該系統(tǒng)允許的測量距離可達1米,散斑噪聲弱。接著研究了偏振復用型相位調制二維激光自混合干涉儀。為拓展自混合干涉測量的被測光路數(shù)量,本文設計了基于雙縱模激光器和偏振復用技術的相位調制型干涉光路,產生無光學串擾的雙目標(混合型)自混合系統(tǒng)。由于光源的正交偏振特性,自混合微波光呈現(xiàn)二維矢量特性,其理論模型由復合腔結合多模He-Ne激光器Lamb半經典理論推導得出。實驗發(fā)現(xiàn)弱反饋條件下模式競爭和偏振跳變現(xiàn)象明顯減弱,兩個縱模光強信號反向,呈現(xiàn)為兩個正弦曲線的疊加。因正弦相移偏振態(tài)異向且頻率可控,因此自混合信號諧波分量無混疊,在對二維定位、雙目標和雙參數(shù)的測量具有分辨率可選的優(yōu)點。兩個測量光路可同時或單獨工作,對微米級振動的測量精度均優(yōu)于10個納米。最后研究了光纖耦合型的波導相移半導體激光自混合測振系統(tǒng)。近紅外波段850nm半導體激光器在保偏光纖中與相位調制器耦合,可彎曲光路具備抗電磁干擾的能力。得到自混合信號和光譜不依賴與光纖長度,雖然存在一定散斑噪聲,但實驗表明高斯激光束傳播過程中易發(fā)散的問題得到了解決。
[Abstract]:The laser self mixing effect is that laser light is the transmitter and receivers, laser cavity by reflected light effect change of the excitation light power, spectrum and phase properties. The self mixing laser can be external cavity optical path and its driving conditions (current injection, electron beam or beam pump) the change of output light of specific frequency the carrying of the measured object orientation information, through the analysis of the output characteristics of light can be obtained. The measured physical quantity emitted and reflected light propagation path sharing system is compact, easy alignment, and the external cavity can be inserted into the shift or the introduction of acousto-optic crystal electro-optic crystal phase shift is introduced, with the measurement accuracy of the corresponding demodulation technique was greatly improved (up to 1 nm), thus self mixing interference technology can meet the requirements of high precision measurement in the embedded environment. The composite resonant cavity model using laser respectively explain and verify the single and double external cavity Optical oscillation characteristics of laser longitudinal mode double external cavity two cases, we developed a new type of self mixing interference system in the research group on the basis of the work of predecessors, and application development of measuring system for one-dimensional / two-dimensional ultrasonic frequency / sub micro vibration, experimental results and commercial laser Doppler velocimetry (Ploytec-5000) were compared. The main content this article is divided into four parts as follows: build the AlGaInP semiconductor laser (ALGaInP) based on the simplified laser self mixing vibration system, analysis of laser in the moderate and weak feedback characteristic range of output light, found the fringe inclination factor and the measured phase in the frequency distribution of different positions. The application of wavelet decomposition solution phase transformation of Hilbert extraction of low frequency phase, to achieve micron level displacement since the resolution to the reconstruction. The system contains only with quantum well lasers, the working current of low threshold, not the attenuator Directly on the vibrating surface radiation measurement, contrast Doppler velocimeter (LaserDoppler Velocity meter, abbreviated as LDV) the semiconductor laser self mixing interference amplitude of low-frequency vibration (400Hz) micron resolution better than lambda /12. experiments indicated that the system allows a wide range of feedback coefficient, wavelet decomposition of a natural inhibition of laser speckle and environmental noise, with anti-static cable, can be embedded. Then study the semi arc phase self mixing interference vibrometer, half a radian specific phase shift depth by LiNbO3 electro-optic crystal phase shift introduced laser with orthogonal product dependent factor filtering method of the measured phase frequency reduction extraction. Pure time domain demodulation process without Fourier transform due to high computation efficiency in non-contact vibration measurement (transient analysis time less than 0.2 seconds) in the error of a few nanometers, The noise source and size are also analyzed. This chapter uses the measurement system for non uniform vibration, restoring damping, pulse, vibration curve of small amplitude harmonic vibration, accuracy of semiconductor laser self mixing interference measurement system is improved by one order of magnitude, which is likely to become a fast online set up resonance type vibrometer. High measurement limit of phase shift from the hybrid system, the phase shift is realized by the 12MHz RF resonance modulator. The RF self mixing light signal through the high-speed data transmission technology into discrete numerical analysis, and the ultrasonic transducer and amplitude frequency characteristics were measured. The experimental results showed that doped LiNbO3 electro-optic crystal in the Magnesium Oxide radio frequency drive low voltage, good high-speed single polarization phase-shifting electro-optic effect. Lithium niobate electro-optic crystal by using the sine phase modulation makes the microwave resonance harmonic laser self mixing signal To further increase the frequency difference, so the system of aliasing effect immunity cavity, sub band ultrasonic vibration measurement in the 30kHz above are better than 40 nm. The precision of measuring distance up to 1 meters at the same time, the system allows, the speckle noise is weak. Then study the polarization multiplexing type two-dimensional phase modulated laser self mixing interferometer. Expand the self mixing interference measured by the optical quantity, this paper designed interferometer based on phase modulation of double longitudinal mode laser and polarization multiplexing technology based on dual target without optical crosstalk (hybrid) self mixing system. Since the orthogonal polarization of light source, self mixing microwave light showing two-dimensional vector characteristics, its theory by combining the model of composite cavity multimode He-Ne laser Lamb semi classical theory is derived. The experimental results showed that under the condition of weak feedback mode competition and polarization jump phenomenon is weakened, the two longitudinal mode light intensity signal reverse Present, as the superposition of two sine curve. For sinusoidal phase shift polarization and to different controllable frequency, so the self mixing signal harmonic component without aliasing in the two-dimensional positioning, the advantages of measuring dual target and double parameter resolution is optional. The two optical path at the same time or work alone, measurement accuracy the micron vibrations were better than the 10. At the end of the nano waveguide fiber coupling type phase shift of semiconductor laser self mixing vibration system. Near infrared 850nm semiconductor laser in polarization maintaining fiber coupling and phase modulator, flexible optical path has the ability of anti electromagnetic interference. The self mixing signal spectrum and do not rely on the fiber length, although there are some speckle noise, but experiments show that the divergence problem of Gauss laser beam propagation process has been solved.

【學位授予單位】:南京師范大學
【學位級別】:博士
【學位授予年份】:2017
【分類號】:TN24

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