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  本文選題：表面聲波　切入點：陀螺　出處：《西安工業(yè)大學》2017年碩士論文

【摘要】：陀螺儀是廣泛應用在汽車導航和武器制導領域的重要部分,而基于表面聲波陀螺的慣性器件相對于傳統(tǒng)的MEMS振動陀螺具有抗沖擊能力強、高可靠性和低成本等優(yōu)勢。本文基于慣性力作用下的材料中表面聲波特性的變化規(guī)律,利用COMSOL軟件對表面聲波陀螺的諧振器結(jié)構(gòu)進行了仿真,利用光刻技術對表面聲波陀螺進行了制備和性能檢測與分析。得到以下結(jié)論:(1)表面聲波特性的研究,首先通過理論分析與MATLAB仿真,得到表面聲波的波速隨旋轉(zhuǎn)角速度的增大而減小。其次,結(jié)合COM理論模型,對叉指換能器結(jié)構(gòu)進行分析,利用COM參數(shù)和P矩陣推導出導納特性。(2)根據(jù)波速與旋轉(zhuǎn)角速度的變化關系,利用有限元分析軟件對基于128°YX-LiNbO3的表面聲波諧振器結(jié)構(gòu)進行了多物理域耦合建模與仿真,提取了對稱模態(tài)和反對稱模態(tài)的變形圖,計算出128°YX-LiNbO3的表面聲波相速度是3917m/s和機電耦合系數(shù)是4.71%。針對128°YX-LiNbO3的表面聲波諧振器的頻率特性,分析得到,器件結(jié)構(gòu)中隨著叉指換能器的敷金比的逐漸增大,對稱模態(tài)與反對稱模態(tài)的特征頻率逐漸減小;壓電基底的厚度在大于一個波長時對特征頻率影響較小;而金屬電極厚度每增加10nm和厚度的均勻性每變化1nm,對稱模態(tài)的特征頻率基本保持不變,反對稱模態(tài)的特征頻率變化0.002MHz。(3)通過頻率響應分析,獲得電導、導納與頻率之間的關系圖。加入旋轉(zhuǎn)角速度,得到頻率隨旋轉(zhuǎn)角速度的變化關系呈線性關系。(4)利用光刻技術和磁控濺射制備測得金屬膜層的平均厚度在為150nm,金屬電極寬度為12.555μm,頻率響應為81.6MHz。由此制作的新型表面聲波陀螺沿X軸方向的靈敏度為 100.44 Hz/deg/s。
[Abstract]:Gyroscope is an important part of vehicle navigation and weapon guidance, and the inertial device based on surface-acoustic gyroscope has stronger impact resistance than traditional MEMS vibratory gyroscope. Based on the variation of surface acoustic wave characteristics in materials under inertial force, the resonator structure of surface acoustic gyroscope is simulated by using COMSOL software, which has the advantages of high reliability and low cost. The surface acoustic gyroscope has been fabricated and tested and analyzed by photolithography. The following conclusions are obtained: 1) the study of surface acoustic wave characteristics. Firstly, the theoretical analysis and MATLAB simulation are used to study the acoustic properties of the surface acoustic gyroscope. The wave velocity of the surface acoustic wave decreases with the increase of the rotational angular velocity. Secondly, the structure of the cross finger transducer is analyzed with the COM theory model. According to the relationship between wave velocity and rotational angular velocity, the coupling modeling and simulation of surface acoustic resonator structure based on 128 擄YX-LiNbO3 is carried out by using finite element analysis software. The deformation diagrams of symmetric mode and antisymmetric mode are extracted, and the phase velocity of surface acoustic wave of 128 擄YX-LiNbO3 is calculated to be 3917m/s and the electromechanical coupling coefficient is 4.71. According to the frequency characteristics of surface acoustic wave resonator with 128 擄YX-LiNbO3, the results are obtained. The characteristic frequencies of symmetric mode and antisymmetric mode gradually decrease with the increase of the ratio of interDigital transducer to gold, and the thickness of piezoelectric substrate has little effect on the characteristic frequency when the thickness of piezoelectric substrate is greater than one wavelength. However, when the thickness of the metal electrode increases 10nm and the uniformity of the thickness changes 1 nm, the characteristic frequency of the symmetric mode remains basically unchanged, and the characteristic frequency of the antisymmetric mode changes 0.002 MHz. 3) the conductance is obtained by frequency response analysis. Diagram of the relationship between admittance and frequency. The linear relationship between frequency and rotational angular velocity is obtained. (4) the average thickness of metal film is 150 nm, the width of metal electrode is 12.555 渭 m, and the frequency response is 81.6 MHz by photolithography and magnetron sputtering. The sensitivity of the surface-acoustic gyroscope along the X axis is 100.44 Hz / degr / s.
【學位授予單位】：西安工業(yè)大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TN65

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本文編號：1666799