本文選題：飛秒光刻　切入點(diǎn)：光波導(dǎo)　出處：《中國(guó)科學(xué)院研究生院(西安光學(xué)精密機(jī)械研究所)》2015年碩士論文

【摘要】：飛秒光刻波導(dǎo)技術(shù)是近十年才發(fā)展起來的一種新型光波導(dǎo)寫入技術(shù),相對(duì)于離子交換、離子注入以及化學(xué)氣相沉積等傳統(tǒng)的波導(dǎo)制作技術(shù),飛秒光刻波導(dǎo)技術(shù)具有簡(jiǎn)單、靈活、高效等特點(diǎn),還具備制作三維光子器件的獨(dú)特能力。飛秒光刻波導(dǎo)技術(shù)開辟了天文光子學(xué)這一嶄新的領(lǐng)域,能夠制作光子燈籠、三維濾光器、三維耦合器等光子芯片,在制作高密度的集成光子器件方面具有重大的應(yīng)用前景。本論文的主要工作包括以下幾個(gè)方面:1.研究了鈦藍(lán)寶石激光晶體中飛秒光刻波導(dǎo)的技術(shù)和性能,采用狹縫整形技術(shù)通過橫向刻寫方式,利用重復(fù)頻率為1 k Hz,脈寬為120 fs的脈沖激光在鈦藍(lán)寶石晶體中分步刻寫雙線型光波導(dǎo)。詳細(xì)地研究了飛秒脈沖激光在晶體中寫入深度、刻寫速度以及波導(dǎo)雙線間距對(duì)波導(dǎo)導(dǎo)光情況的影響,最終得到了一組導(dǎo)光模式較優(yōu)的雙線波導(dǎo)(脈沖能量2μJ,寫入深度175μm,刻寫速度90μm/s,雙線間距26μm)。由于在寫入過程中伴隨著納米條紋的產(chǎn)生,波導(dǎo)具有偏振導(dǎo)光特性,采用散射法測(cè)得波導(dǎo)的傳輸損耗為1.82 d B/cm。利用有限差分法,根據(jù)波導(dǎo)的近場(chǎng)模式強(qiáng)度分布反推了波導(dǎo)的折射率分布圖,得到其最大的折射率增量為1.9×10-4。2.利用重復(fù)頻率為1 k Hz,脈沖寬度為120 fs的近紅外飛秒脈沖激光,用狹縫整形技術(shù)通過橫向刻寫的方式,首次在摻Er3+氟碲酸鹽玻璃中分別刻寫了I類和壓低圓包層波導(dǎo)。利用有限差分法,根據(jù)波導(dǎo)的近場(chǎng)模式強(qiáng)度分布分別反推了I類和壓低圓包層波導(dǎo)的折射率分布圖,其最大的折射率增加量分別為1×10-4和1.9×10-4。采用散射法測(cè)得I類光波導(dǎo)的傳輸損耗為1.04 d B/cm;通過測(cè)量插損得到壓低圓包層波導(dǎo)的傳輸損耗小于1.88 d B/cm。實(shí)驗(yàn)中分別對(duì)比了兩類波導(dǎo)導(dǎo)光區(qū)域和玻璃材料基質(zhì)的熒光光譜圖,發(fā)現(xiàn)激光作用前后玻璃的熒光特性保持良好。
[Abstract]:Femtosecond photolithographic waveguide technology is a new type of optical waveguide writing technology developed in recent ten years. Compared with traditional waveguide fabrication techniques such as ion exchange, ion implantation and chemical vapor deposition, femtosecond photolithography is simple and flexible. The technology of femtosecond photolithography has opened up a new field of astronomical photonics, capable of making photonic chips such as photonic lanterns, three-dimensional filters, three-dimensional couplers, etc. The main work of this thesis includes the following aspects: 1. The technology and performance of femtosecond photolithographic waveguides in Ti sapphire laser crystals are studied. By means of slit shaping technique, a two-line optical waveguide is written in a Ti sapphire crystal with a repetition rate of 1 kHz and pulse width of 120 fs. The writing depth of femtosecond pulse laser in the crystal is studied in detail. The influence of the writing speed and the distance between the two lines of the waveguide on the light guide of the waveguide, Finally, a group of two-wire waveguides (pulse energy 2 渭 J, write depth 175 渭 m, write speed 90 渭 m / s, and distance between two lines 26 渭 m) are obtained. Due to the formation of nanoscale stripes in the writing process, the waveguide has the characteristics of polarization and light conduction. The propagation loss of the waveguide is 1.82 dB / cm ~ (-1) measured by the scattering method. The refractive index profile of the waveguide is derived from the near mode intensity distribution of the waveguide by using the finite difference method. The maximum refractive index increment is 1.9 脳 10 ~ (-2). Using near-infrared femtosecond laser with repetition rate of 1 kHz and pulse width of 120 fs, slit shaping technique is used to describe the laser transversely. For the first time, type I and low-pressure circular cladding waveguides have been written in Er3 doped fluoride-tellurite glasses for the first time. By using the finite difference method, the refractive index profiles of type I and low-pressure circular cladding waveguides have been inversely deduced according to the near mode intensity distribution of the waveguides, respectively. The maximum refractive index increases are 1 脳 10 ~ (-4) and 1.9 脳 10 ~ (-4), respectively. The transmission loss of type I optical waveguide is 1.04 dB / cm by scattering method, and the propagation loss of low-pressure circular cladding waveguide is less than 1.88 dB / cm by measuring insertion loss. Fluorescence Spectra of two kinds of waveguide guiding regions and Glass Matrix, It was found that the fluorescence characteristics of the glass remained good before and after laser irradiation.
【學(xué)位授予單位】：中國(guó)科學(xué)院研究生院(西安光學(xué)精密機(jī)械研究所)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TN252

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