本文選題：半導(dǎo)體激光　切入點(diǎn)：透射成像　出處：《光學(xué)技術(shù)》2017年06期 　論文類(lèi)型：期刊論文

【摘要】：為了同時(shí)同位測(cè)量石英管的外徑和壁厚,建立了激光透射成像系統(tǒng),對(duì)系統(tǒng)測(cè)量原理進(jìn)行研究�；趲缀喂鈱W(xué)和菲涅爾公式,分別導(dǎo)出平行光垂直照射石英管后的透射光線偏向角、相對(duì)光強(qiáng)與入射光線離軸距離之間的關(guān)系;通過(guò)數(shù)值計(jì)算,分析了偏向角、相對(duì)透射光強(qiáng)隨入射光線離軸距離的變化特點(diǎn);針對(duì)物方遠(yuǎn)心光路,分析了光闌對(duì)偏向角和相對(duì)光強(qiáng)的限制;基于CCD成像原理,通過(guò)引入標(biāo)定系數(shù)和補(bǔ)償因子,導(dǎo)出石英管外徑與壁厚的計(jì)算公式。實(shí)驗(yàn)結(jié)果表明:外徑絕對(duì)誤差和相對(duì)誤差的平均值分別為0.119mm和0.91%,壁厚絕對(duì)誤差和相對(duì)誤差的平均值分別為0.153mm和6%。
[Abstract]:In order to simultaneously measure the external diameter and wall thickness of quartz tube at the same time, a laser transmission imaging system is established. The measurement principle of the system is studied. Based on geometric optics and Fresnel formula, The relationship between the relative light intensity and the distance from the axis of the incident light is derived, and the angle of deviation is analyzed by numerical calculation. The characteristics of the relative transmission intensity with the distance from the axis of the incident light, the limitation of the aperture deflection angle and the relative light intensity on the far-centered optical path are analyzed. Based on the principle of CCD imaging, the calibration coefficient and compensation factor are introduced. The formulas for calculating the outer diameter and wall thickness of quartz tube are derived. The experimental results show that the average values of absolute error and relative error of outer diameter are 0.119mm and 0.91mm respectively, and the average values of absolute error and relative error of wall thickness are 0.153mm and 6mm respectively.
【作者單位】： 燕山大學(xué)理學(xué)院;燕山大學(xué)里仁學(xué)院;
【基金】：國(guó)家自然科學(xué)基金(11504320)
【分類(lèi)號(hào)】：TN249;TP391.41

【相似文獻(xiàn)】

相關(guān)期刊論文 前10條

1 張明武;王偉;薛迎利;于得洋;陳婧;武曄虹;楊變;蔡曉紅;;強(qiáng)流電子束入射彎曲宏觀石英管的導(dǎo)向效應(yīng)研究[J];原子核物理評(píng)論;2012年02期

2 呂曉桂;任春生;馬騰才;朱海龍;錢(qián)沐揚(yáng);王德真;;石英管對(duì)空氣中錐-板結(jié)構(gòu)納秒脈沖放電的影響[J];物理學(xué)報(bào);2010年11期

3 漆德君;于得洋;王偉;張明武;蔡曉紅;;宏觀尺寸彎曲石英管對(duì)中低能電子束的導(dǎo)向作用[J];原子核物理評(píng)論;2008年04期

4 王寶珠，孟拓，張軍，，李小瑞;石英傳像束的研制[J];應(yīng)用光學(xué);1995年04期

5 徐金宏;三棱鏡偏向角的變化規(guī)律[J];揚(yáng)州教育學(xué)院學(xué)報(bào);2003年03期

6 關(guān)壽華,赫然,徐輯彥;光柵明紋偏向角的實(shí)驗(yàn)研究[J];吉林師范大學(xué)學(xué)報(bào)(自然科學(xué)版);2004年03期

7 薛喜昌,黃宏春;透明球體的偏向角研究[J];平頂山師專(zhuān)學(xué)報(bào);1997年S3期

8 謝爾德;;關(guān)子棱鏡中兩次折射的討論[J];紹興師專(zhuān)學(xué)報(bào);1990年04期

9 楊偉文;;三棱鏡作用的拓展性探討[J];韓山師范學(xué)院學(xué)報(bào);2010年03期

10 陸靜珠;關(guān)于棱鏡中入射角與偏向角關(guān)系的探討[J];湖州師范學(xué)院學(xué)報(bào);2001年06期

本文編號(hào)：1634202