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芯片級(jí)電調(diào)紅外波譜成像探測(cè)技術(shù)研究

發(fā)布時(shí)間:2018-03-13 11:41

  本文選題:液晶電光特征 切入點(diǎn):譜濾光建模與仿真 出處:《華中科技大學(xué)》2015年碩士論文 論文類型:學(xué)位論文


【摘要】:譜成像探測(cè)是一種結(jié)合了圖像獲取技術(shù)以及光學(xué)濾波技術(shù)的高性能圖像信息獲取手段;谧V圖像信息,既能得到目標(biāo)的常規(guī)圖像,又能獲得目標(biāo)的結(jié)構(gòu)和材質(zhì)特征。近些年來(lái),譜成像探測(cè)技術(shù)在軍事和民用領(lǐng)域顯示出廣闊的應(yīng)用前景和巨大的商業(yè)價(jià)值,受到廣泛關(guān)注和重視。本文開展了芯片級(jí)電調(diào)紅外譜成像探測(cè)方法和關(guān)鍵技術(shù)研究,設(shè)計(jì)和制作了基于液晶(Liquid crystal,LC)法布里-珀羅(Fabry-Perot,FP)多波束干涉的電調(diào)中長(zhǎng)波紅外濾波芯片。該譜芯片(LC-FP)可直接置于成像光路中或與光敏陣列集成,執(zhí)行基于圖像信息處理或先驗(yàn)知識(shí)干預(yù)下的電調(diào)紅外成像波譜的成像探測(cè)操作。所發(fā)展的LC-FP芯片具有尺寸小、輕質(zhì)、功耗低、結(jié)構(gòu)穩(wěn)定性高、環(huán)境適應(yīng)能力強(qiáng)、填充系數(shù)或光能利用率高、成本低、譜響應(yīng)靈活等特點(diǎn)。本論文主要工作和創(chuàng)新點(diǎn)如下:分別構(gòu)建了基于硒化鋅納米鋁膜電極、以及硅納米金膜電極的紅外中長(zhǎng)波電調(diào)LC-FP芯片架構(gòu);利用向列液晶材料的連續(xù)彈性體理論以及有限差分算法,仿真了多電壓信號(hào)條件下的向列液晶分子的偏轉(zhuǎn)特征,計(jì)算了層化液晶材料的等效折射率及其空間分布屬性;利用傳輸矩陣算法模擬了所構(gòu)建的LC-FP架構(gòu)在中長(zhǎng)波紅外波段的譜透射特性;通過(guò)結(jié)構(gòu)和參數(shù)優(yōu)化,確定了膜系配置以及液晶微腔結(jié)構(gòu)尺寸等關(guān)鍵性參數(shù)。綜合所匹配的紅外成像光敏陣列特征及有效封裝要求,規(guī)劃了芯片形貌結(jié)構(gòu)指標(biāo),基于標(biāo)準(zhǔn)微電子工藝完成了譜單片以及可區(qū)塊化(4×4)譜尋址的LC-FP芯片架構(gòu)的設(shè)計(jì)、制作、測(cè)評(píng)及封裝。通過(guò)比較和分析所開展的寬譜域紅外干涉濾波測(cè)試結(jié)果,引入經(jīng)驗(yàn)工藝參數(shù)α和β,對(duì)多種LC-FP芯片的工藝流程進(jìn)行了優(yōu)化和再設(shè)計(jì);基于所發(fā)展的譜單片和譜尋址LC-FP芯片,針對(duì)典型目標(biāo)開展了電調(diào)紅外成像波譜的譜成像探測(cè)測(cè)試,比較和分析了譜圖像特征并規(guī)劃了技術(shù)的進(jìn)一步發(fā)展路線圖。
[Abstract]:Spectral imaging detection is a kind of high performance image information acquisition method which combines image acquisition technology and optical filtering technology. Based on spectral image information, the conventional image of target can be obtained. In recent years, spectral imaging detection technology has shown wide application prospects and great commercial value in military and civilian fields. In this paper, the detection methods and key technologies of chip level electrically modulated infrared spectroscopy imaging are studied. An electrically modulated medium and long wave infrared filter chip based on liquid crystal liquid crystal LCFabry-Perot Fabry-Perot interference (Fabry-Perot) multibeam interference is designed and fabricated. The chip can be directly placed in an imaging optical path or integrated with Guang Min array. The developed LC-FP chip is small in size, light in weight, low in power consumption, high in structure stability and strong in environmental adaptability. The filling coefficient or light energy utilization ratio is high, the cost is low, the spectrum response is flexible and so on. The main work and innovation of this paper are as follows: the nanocrystalline aluminum film electrode based on zinc selenide was constructed, Using the theory of continuous elastomer of nematic liquid crystal materials and finite difference algorithm, the deflection characteristics of nematic liquid crystal molecules under multi-voltage signals are simulated. The equivalent refractive index of laminated liquid crystal material and its spatial distribution properties are calculated, and the spectral transmission characteristics of the constructed LC-FP structure in the medium and long wavelength infrared band are simulated by using the transfer matrix algorithm, and the structure and parameters are optimized. The key parameters, such as the configuration of the film system and the structure size of the liquid crystal microcavity, were determined, and the chip morphology and structure indexes were planned according to the matching characteristics of the infrared imaging Guang Min array and the effective packaging requirements. Based on the standard microelectronic process, the design, fabrication, evaluation and encapsulation of the LC-FP chip architecture with spectral monolithic and 4 脳 4 block spectrum addressing are completed. The results of the wide-spectrum infrared interference filtering test are compared and analyzed. The process flow of various LC-FP chips is optimized and redesigned by introducing the empirical process parameters 偽 and 尾. Based on the developed spectral monolithic and spectral addressing LC-FP chips, the spectral imaging detection tests for typical targets are carried out for typical targets. The spectral image features are compared and analyzed, and the roadmap for further development of the technology is planned.
【學(xué)位授予單位】:華中科技大學(xué)
【學(xué)位級(jí)別】:碩士
【學(xué)位授予年份】:2015
【分類號(hào)】:O434.3;TP391.41

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