本文選題：激光干涉　切入點(diǎn)：三自由度　出處：《武漢大學(xué)學(xué)報(bào)(工學(xué)版)》2016年01期 　論文類型：期刊論文

【摘要】：為了克服激光沿原光路返回產(chǎn)生激光回饋效應(yīng)的影響,提出了一種以組合三反射鏡為目標(biāo)載體的三自由度測量方法,即三平面鏡組合方法.它不同于平面鏡或角隅棱鏡作為目標(biāo)鏡的方法,既能使反射光線與原光線錯開一定距離,保證反射光不會沿原光路返回,又能使反射光線保留目標(biāo)測量對象的偏轉(zhuǎn)信息.在實(shí)際測量過程中,一方面由于測量位移范圍較小,測量光束與參考光束在測量過程中錯開很小,不會影響干涉條紋的產(chǎn)生.另一方面考慮工作臺偏轉(zhuǎn)角度一般很小,對干涉條紋形狀的影響不會造成對干涉條紋計(jì)數(shù)的破壞.實(shí)驗(yàn)應(yīng)用結(jié)果表明,該方法適用于運(yùn)動位移與偏轉(zhuǎn)角度的三自由度同步測量.
[Abstract]:In order to overcome the effect of laser feedback on the return of the laser along the original optical path, a three-degree-of-freedom measurement method with a combined three-mirror as the target carrier is proposed. It is different from the method of planar mirror or corner prism as the object mirror. It can not only stagger the reflected light from the original light, but also ensure that the reflected light will not return along the original light path. In the actual measurement process, because of the small range of measurement displacement, the measurement beam and the reference beam are staggered very small in the process of measurement. On the other hand, considering that the deflection angle of the worktable is usually very small, the influence on the shape of interference fringes will not cause damage to the number of interference fringes. The experimental results show that, This method is suitable for synchronous measurement of motion displacement and deflection angle with three degrees of freedom.
【作者單位】： 湖北工業(yè)大學(xué)機(jī)械工程學(xué)院;湖北工業(yè)大學(xué)湖北省現(xiàn)代制造質(zhì)量工程重點(diǎn)實(shí)驗(yàn)室;
【分類號】：TN249

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