本文選題：精密機械平臺　切入點：重力補償氣缸　出處：《哈爾濱工業(yè)大學》2017年碩士論文　論文類型：學位論文

【摘要】：本課題來源于國家科技重大專項“極大規(guī)模集成電路制造裝備與成套工藝專項”[1],子項目“可變狹縫系統(tǒng)”。可變狹縫系統(tǒng)為光刻機曝光過程中的重要部分,其曝光過程中,豎直方向刀片組需要對重力進行補償,本專項選用的是氣缸重力補償裝置,雖然氣缸運動過程中產(chǎn)生的摩擦力較小,但是考慮到平臺的精度,對其存在的摩擦進行補償還是很有必要的。本課題針對其狹縫掃描系統(tǒng)中重力補償氣缸的摩擦力問題,較深入的研究精密平臺精密平臺克服摩擦的理論和方法。首先,根據(jù)實際的工程背景,抽離出可變狹縫系統(tǒng)豎直方向重力補償部分,根據(jù)課題的各項指標要求,對元器件進行選型,并完成該部分實際平臺的搭建。之后為驗證自主搭建的重力補償系統(tǒng)的可行性,在該系統(tǒng)平臺上進行初步的控制調(diào)試及實驗。在此過程中,發(fā)現(xiàn)重力補償氣缸運動過程中產(chǎn)生的摩擦對實驗的精度有較大的影響。其次,針對本課題的重點研究對象,即重力補償氣缸,進行研究。首先從氣缸的機械結(jié)構(gòu)入手,討論重力補償氣缸的組成及工作過程,然后通過理論推導得出所選氣缸的機理模型,最后對建立的模型進行仿真,探究模型在加入外界擾動的情況下,氣缸的位置、內(nèi)壓、內(nèi)部流量等的變化,得出仿真結(jié)果。針對LuGre摩擦模型進行仿真,探究LuGre摩擦模型的各個待估參數(shù)對系統(tǒng)的影響,得出的仿真結(jié)論為后文的參數(shù)辨識過程打下良好基礎。再次,接下來,分別用最小二乘法,非線性最小二乘法,及遺傳算法對摩擦參數(shù)進行辨識,對不同方法得到的辨識結(jié)果進行比較,對不同的辨識方法進行優(yōu)劣勢分析。然后通過實驗,測得原始數(shù)據(jù),通過測量驅(qū)動電流的間接方法得到系統(tǒng)中實際的摩擦力,并通過遺傳算法,完成對實際系統(tǒng)中摩擦力模型的參數(shù)辨識。最后,通過實驗對上文提出的方法進行驗證,并且通過實驗完成對實際系統(tǒng)中的摩擦力的補償。驗證了前文提出的摩擦力模型對實際系統(tǒng)的適用性,以及前文提出的辨識方法的辨識精確性。最后通過對比,選用實用性較高、控制效果較好的前饋控制方法,完成對實際系統(tǒng)重力補償氣缸部分存在的摩擦力的補償,提高了系統(tǒng)的控制精度,完成最初的指標要求。
[Abstract]:This subject comes from the national science and technology major project, "maximum scale Integrated Circuit Manufacturing equipment and complete process Project" [1], a sub-item "variable slit system". The variable slit system is an important part of the exposure process of the lithography machine, and in the exposure process, the variable slit system is an important part in the exposure process of the lithography machine. The vertical blade group needs to compensate gravity. This special type is the cylinder gravity compensation device. Although the friction produced during the cylinder movement is small, the accuracy of the platform is considered. It is necessary to compensate the existing friction. Aiming at the friction problem of the cylinder compensated by gravity in the slit scanning system, the theory and method of the precision platform to overcome friction are studied in this paper. According to the actual engineering background, the vertical gravity compensation part of the variable slit system is extracted, and the components are selected according to the requirements of the project. In order to verify the feasibility of the self-built gravity compensation system, the preliminary control debugging and experiment are carried out on the platform. It is found that the friction produced during the motion of the gravity compensated cylinder has a great influence on the precision of the experiment. Secondly, the main research object of this subject, that is, the gravity compensated cylinder, is studied. Firstly, the mechanical structure of the cylinder is introduced. The composition and working process of the gravity compensation cylinder are discussed. Then the mechanism model of the selected cylinder is derived by theoretical derivation. Finally, the model is simulated to explore the position and internal pressure of the cylinder when the external disturbance is added to the model. According to the change of internal flow rate and so on, the simulation results are obtained. According to the simulation of LuGre friction model, the influence of the estimated parameters of LuGre friction model on the system is explored. The simulation results lay a good foundation for the parameter identification process in the following chapters. Then, the friction parameters are identified by least square method, nonlinear least square method and genetic algorithm respectively. The identification results obtained by different methods are compared, and the advantages and disadvantages of different identification methods are analyzed. The actual friction force in the system is obtained by measuring the driving current indirectly, and the parameter identification of the friction force model in the actual system is completed by genetic algorithm. Finally, The proposed method is verified by experiments, and the friction force in the actual system is compensated by experiments. The applicability of the proposed friction model to the actual system is verified. Finally, through comparison, the feedforward control method, which has high practicability and good control effect, is used to compensate the friction in the cylinder part of gravity compensation system. The control precision of the system is improved and the initial target requirement is fulfilled.
【學位授予單位】：哈爾濱工業(yè)大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TN305.7

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