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高精度激光光束質量測量系統(tǒng)設計與實驗研究

發(fā)布時間:2018-03-02 12:23

  本文選題:光束質量 切入點:M2因子 出處:《華中科技大學》2015年碩士論文 論文類型:學位論文


【摘要】:隨著激光技術在各個領域的應用不斷拓展,如何有效的檢測和評價激光光束質量成為了激光技術研究的一個關鍵問題。從衍射極限因子M2因子在上世紀90年代被提出后,它就成為了一種有效而常用的衡量激光光束質量的方法了,如何能夠快速有效的測量M2因子也成為了一個人們研究的熱點。本文基于CMOS相機設計并完成了一套高精度激光光束質量測量系統(tǒng),該系統(tǒng)首先通過圖像處理法獲取光束偏轉角度,再自動由電動微調裝置控制反射鏡改變光束傳輸方向從而完成光路的高精度調整,實現光束垂直入射相機光敏面的目的,在此基礎上系統(tǒng)可以實現M2因子的自動測量。論文的主要研究成果如下:1.研究了現有激光光束質量評價方法,圍繞激光光束M2因子測量制定了激光光束質量測量的總體方案。基于重心法和二階矩法設計了計算激光光斑中心與尺寸的圖像處理方法。根據光束質量測量中光路調整的要求,設計了基于圖像處理的光路高精度調整方法。2.設計并完成了激光光束質量測量系統(tǒng)的軟硬件。其中軟件包括系統(tǒng)設置、步進電機控制、圖像預處理和參數計算等模塊,硬件包括系統(tǒng)光路、單片機控制、圖像采集、精密電動微調及其驅動和定位等模塊,并進行了軟硬件聯合調試。3.對所研制的激光光束質量測量系統(tǒng)進行了一系列實驗測試。結果表明:(1)本系統(tǒng)可以高效率的完成光路調整,調整后的光束偏移角度不超過設定偏轉閾值0.05°;(2)不同焦距透鏡對光束質量測量影響較小;(3)選取不同波長進行測量對比時,本系統(tǒng)光束質量測量結果與商用系統(tǒng)基本一致,但重復精度更高,并且重復測量偏差可以達到1.0%以下。
[Abstract]:With the continuous development of laser technology in various fields, how to effectively detect and evaluate laser beam quality has become a key issue in laser technology. After the diffraction limit factor M2 factor was proposed in -10s, It has become an effective and commonly used way to measure the quality of laser beams. How to measure M2 factor quickly and effectively has become a hot topic. A high precision laser beam quality measurement system based on CMOS camera is designed and completed in this paper. The system firstly acquires the beam deflection angle by image processing method, and then automatically controls the reflector to change the direction of beam transmission by the electric fine-tuning device, thus accomplishing the high-precision adjustment of the light path, thus realizing the objective of the Guang Min plane of the camera with the vertical incidence of the beam. On this basis, the system can realize the automatic measurement of M2 factor. The main research results of this paper are as follows: 1. The existing methods of laser beam quality evaluation are studied. The overall scheme of laser beam quality measurement is established around the M2 factor measurement of laser beam. An image processing method for calculating the center and size of laser spot is designed based on the center of gravity method and the second order moment method. According to the requirements of light path adjustment in beam quality measurement, The high precision adjustment method of optical path based on image processing is designed. The hardware and software of laser beam quality measurement system are designed and completed. The software includes system setup, step motor control, image preprocessing and parameter calculation, etc. The hardware includes system optical path, single-chip microcomputer control, image acquisition, precision electric fine-tuning, driving and positioning modules, etc. A series of experimental tests on the laser beam quality measurement system have been carried out. The results show that the system can efficiently adjust the optical path. When the adjusted deviation angle of the beam does not exceed the set deflection threshold of 0.05 擄/ 2) the influence of different focal lens on the measurement of beam quality is smaller than that of different wavelengths, the results of beam quality measurement of the system are basically consistent with those of the commercial system. But the repetition accuracy is higher, and the error of repeated measurement can reach below 1.0%.
【學位授予單位】:華中科技大學
【學位級別】:碩士
【學位授予年份】:2015
【分類號】:TN24

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