本文關(guān)鍵詞： 多孔硅 梳狀濾波器 折射率匹配 反射率 帶寬　出處：《長(zhǎng)春理工大學(xué)》2015年碩士論文　論文類型：學(xué)位論文

【摘要】：多孔硅基光子器件由于其折射率在制作過(guò)程中可通過(guò)控制腐蝕條件來(lái)改變而具有潛在應(yīng)用價(jià)值。多孔硅梳狀結(jié)構(gòu)具有光滑的折射率分布,可以提高光學(xué)器件的性能,在近紅外范圍內(nèi)的單個(gè)和多個(gè)帶隙的梳狀結(jié)構(gòu)已經(jīng)被廣泛應(yīng)用于化學(xué)和生物傳感器�；陔娀瘜W(xué)腐蝕硅的機(jī)理,通過(guò)電化學(xué)陽(yáng)極氧化法,在p型單晶硅上制備了近紅外光譜范圍(1μm-3μm)內(nèi)工作的多孔硅光學(xué)梳狀濾波器。為了提高濾波器的發(fā)光質(zhì)量,首先對(duì)梳狀多孔硅反射光譜的影響因素進(jìn)行研究,在此基礎(chǔ)上采用折射率匹配技術(shù),在梳狀多孔硅結(jié)構(gòu)中引入了厚度為5.1μm的折射率匹配層,有效降低了干涉條紋和二次諧波的相對(duì)反射強(qiáng)度。最后通過(guò)串行連接的方式將多個(gè)梳狀多孔硅疊加,制備出帶寬為1350nm的寬帶寬梳狀濾波器,采取同樣的方式將兩個(gè)梳狀多孔硅串行疊加,制備出雙通道的多孔硅梳狀濾波器。
[Abstract]:Porous silicon based photonic devices have potential application value because their refractive index can be changed by controlling corrosion conditions during fabrication. The comb structure of porous silicon has smooth refractive index distribution, which can improve the performance of optical devices. Single and multiple band gap comb structures in near infrared range have been widely used in chemical and biological sensors. Based on the mechanism of electrochemical corrosion of silicon, electrochemical anodic oxidation method is used. Porous silicon optical comb filters operating in the near infrared spectrum range of 1 渭 m -3 渭 m have been fabricated on p-type monocrystalline silicon. In order to improve the luminescence quality of the filter, the factors affecting the reflection spectrum of comb porous silicon have been studied. On the basis of this, the refractive index matching layer of 5.1 渭 m thickness is introduced into the comb porous silicon structure by using refractive index matching technique. The relative reflection intensity of interference fringes and second harmonics is reduced effectively. Finally, a wide band comb filter with a bandwidth of 1350nm is fabricated by superposing a plurality of comb porous silicon by serial connection. In the same way, two comb porous silicon filters are prepared by serial superposition of two comb porous silicon.
【學(xué)位授予單位】：長(zhǎng)春理工大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TN713

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本文編號(hào)：1550001