本文關(guān)鍵詞： 晶體生長 KL-Galerkin法 PDE模型分解 最優(yōu)控制　出處：《過程工程學(xué)報(bào)》2017年03期 　論文類型：期刊論文

【摘要】：基于拋物線型偏微分方程(PDE)研究了直拉式單晶爐中生長界面的溫度控制,將Galerkin法應(yīng)用于PDE的處理,求解中使用空間映射對(duì)較復(fù)雜形狀的空間區(qū)域進(jìn)行簡化,并用Karhunen-Loève(KL)分解法求取經(jīng)驗(yàn)特征方程;針對(duì)非齊次邊界條件,設(shè)計(jì)了一種高效的模型分解方法,基于優(yōu)化模型引入最優(yōu)控制方法實(shí)現(xiàn)了溫度控制,驗(yàn)證了模型的有效性.
[Abstract]:Based on parabolic partial differential equation (PDE), the temperature control of the growth interface in a Czochralski single crystal furnace is studied. The Galerkin method is applied to the processing of PDE, and the spatial mapping is used to simplify the space region with more complex shape. The empirical characteristic equation is obtained by Karhunen-Lo 貓 ve KL decomposition method, and an efficient model decomposition method is designed for non-homogeneous boundary conditions. The temperature control is realized by introducing the optimal control method based on the optimal model, and the validity of the model is verified.
【作者單位】： 北京航空航天大學(xué)自動(dòng)化科學(xué)與電氣工程學(xué)院;山東大學(xué)機(jī)械科學(xué)與工程學(xué)院;
【基金】：國家自然科學(xué)基金資助項(xiàng)目(編號(hào):61327003)
【分類號(hào)】：O175.26;TN304.12
，

本文編號(hào)：1523728