本文關(guān)鍵詞： 聚合物光波導(dǎo) 環(huán)形諧振腔 生化傳感器 葡萄糖濃度　出處：《電子科技大學(xué)》2015年碩士論文　論文類型：學(xué)位論文

【摘要】：光學(xué)生化傳感器通過(guò)將信息的采集與傳輸放在光域進(jìn)行從而可有效的避免外界電磁場(chǎng)干擾,具有探測(cè)信號(hào)穩(wěn)定可靠等優(yōu)點(diǎn),并可實(shí)現(xiàn)遠(yuǎn)距離監(jiān)控下的現(xiàn)場(chǎng)檢測(cè),因此受到人們的廣泛關(guān)注。光學(xué)生化傳感器就工作原理不同主要分為熒光型與倏逝波型,其中倏逝波型由于可通過(guò)引入集成光波導(dǎo)技術(shù)以及各種光學(xué)干涉結(jié)構(gòu)從而具有高靈敏度、多功能、微型化等特征,此外,其制作工藝與當(dāng)前成熟的微電子工藝相兼容,因此成為了目前研究的重點(diǎn)。光波導(dǎo)環(huán)形諧振腔結(jié)構(gòu)緊湊,設(shè)計(jì)靈活,可實(shí)現(xiàn)較高的品質(zhì)因數(shù),將其用于生化傳感器除了能夠?qū)崿F(xiàn)光學(xué)傳感器的各種優(yōu)點(diǎn)外,還能夠獲得較高的靈敏度,因此研究基于光波導(dǎo)環(huán)形諧振腔的生化傳感器具有非常重要的意義。鑒于此,本文以聚合物為光波導(dǎo)材料,以葡萄糖的濃度檢測(cè)為目標(biāo),研究了基于雙模干涉儀(Two-mode Interferometer,TMI)的聚合物光波導(dǎo)環(huán)形諧振腔生化傳感器的設(shè)計(jì)、制作及相關(guān)傳感測(cè)試技術(shù)。本文主要的工作及成果如下。(1)根據(jù)選定的聚合物材料,利用有效折射率方法、馬卡梯里方法對(duì)構(gòu)成環(huán)形諧振腔的單模以及雙模矩形光波導(dǎo)進(jìn)行了分析設(shè)計(jì),同時(shí)對(duì)器件可檢測(cè)的溶液折射率范圍進(jìn)行了研究;進(jìn)一步結(jié)合耦合模理論對(duì)構(gòu)成環(huán)形諧振腔的TMI的參數(shù)進(jìn)行了設(shè)計(jì)分析。(2)介紹了環(huán)形諧振腔的基本結(jié)構(gòu)和主要特征參數(shù);對(duì)環(huán)形光波導(dǎo)的彎曲損耗的計(jì)算,并結(jié)合環(huán)的光傳輸特性分析設(shè)計(jì)了環(huán)形諧振腔的參數(shù)。(3)根據(jù)環(huán)形諧振腔的設(shè)計(jì)參數(shù),設(shè)計(jì)并通過(guò)外協(xié)加工制作了相應(yīng)的光刻掩模版;研究了光刻、磁控濺射鍍膜、感應(yīng)耦合離子刻蝕(Inductively Coupled Plasma,ICP)等器件制作工藝并成功的制備了較好側(cè)壁垂直度且表面光滑度較好的聚合物光波導(dǎo)環(huán)形諧振器。(4)搭建高精度光學(xué)測(cè)試平臺(tái),建立測(cè)試流程,對(duì)制作固定上包層的環(huán)形諧振器進(jìn)行通光測(cè)試以及相應(yīng)的諧振特性的測(cè)試,可獲得的最大波長(zhǎng)隔離度18 d B;對(duì)四種濃度的葡萄糖溶液進(jìn)行了傳感測(cè)試,對(duì)器件的傳感特性以及靈敏度進(jìn)行分析,通過(guò)不斷地優(yōu)化實(shí)驗(yàn)過(guò)程中的工藝參數(shù),器件的探測(cè)極限可達(dá)到3.8×10-4 RIU。
[Abstract]:The optical biochemical sensor can effectively avoid the external electromagnetic field interference by collecting and transmitting the information in the optical domain. It has the advantages of stable and reliable detection signal, and can realize the field detection under remote monitoring. Therefore, people pay more attention to it. Optical and biochemical sensors are mainly divided into fluorescent and evanescent wave types. Evanescent wave patterns can be characterized by the introduction of integrated optical waveguide technology and various optical interference structures, such as high sensitivity, multifunction, miniaturization, etc. In addition, the fabrication process of evanescent wave type is compatible with the current mature microelectronic technology. Therefore, the optical waveguide ring resonator is compact in structure, flexible in design, and can achieve high quality factor. In addition to the various advantages of optical sensor, the optical waveguide ring resonator can be used in biochemical sensors. Therefore, it is of great significance to study biochemical sensors based on optical waveguide ring resonator. In view of this, the polymer is used as optical waveguide material and the concentration of glucose is measured as the target. The design, fabrication and related sensing test techniques of polymer optical waveguide ring resonator biochemical sensor based on Two-mode Interferometer TMI (TMI) are studied. The main work and results of this paper are as follows: 1) based on the selected polymer materials, Using the effective refractive index method and the Makatiri method, the single-mode and two-mode rectangular optical waveguides are analyzed and designed, and the range of the refractive index of the solution can be detected by the device is studied. The basic structure and main characteristic parameters of the ring resonator are introduced, and the bending loss of the ring optical waveguide is calculated. According to the design parameters of ring resonator, the photolithographic mask plate is designed and fabricated by external coprocessing, and the photolithography and magnetron sputtering coating are studied. Inductively Coupled Plasma-ICP) was fabricated by inductively coupled ion etching, and a polymer optical waveguide ring resonator with good side wall perpendicularity and good surface smoothness was successfully fabricated. A high-precision optical testing platform was built and the test flow was established. The maximum wavelength isolation is 18 dB for the ring resonator with fixed cladding, and the corresponding resonance characteristics are tested. Four glucose solutions with different concentrations are tested. The sensing characteristics and sensitivity of the device are analyzed. The detection limit of the device can reach 3.8 脳 10 ~ (-4) RIU by continuously optimizing the process parameters during the experiment.
【學(xué)位授予單位】：電子科技大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TN252;TP212

【參考文獻(xiàn)】

相關(guān)碩士學(xué)位論文 前1條

1 王任銳;集成光波導(dǎo)SPR傳感器的實(shí)驗(yàn)制作與工藝研究[D];浙江大學(xué);2013年

，

本文編號(hào)：1509821