本文關(guān)鍵詞： 微波等離子體光源 功率放大器 大功率 F類 諧波控制　出處：《電子科技大學》2015年碩士論文　論文類型：學位論文

【摘要】：為適應當今能源短缺,倡導高效節(jié)能的現(xiàn)狀,人們對于綠色、節(jié)能、高效率的新型微波等離子體光源(LEP)的研究日趨活躍。本文課題在第一代微波等離子體光源研究基礎(chǔ)上,利用現(xiàn)在高速發(fā)展的微波固態(tài)電路替代真空器件作為驅(qū)動源,解決第一代微波等離子體光源諸多缺點,實現(xiàn)可用于工程應用的新型微波光源。重點研究新型微波等離子體光源射頻模塊中功率放大器的設計,針對高效率、大功率的實現(xiàn)做大量研究分析,最終實現(xiàn)高效率的大功率功放設計。文章主要研究內(nèi)容分為四部分。文中首先通過介紹課題研究背景,對研究對象設計方法與功率器件的發(fā)展現(xiàn)狀做詳細介紹。其次,對功率放大器的基本類型、技術(shù)指標、研究設計方法進行理論分析研究,文中詳細闡述功率放大器中負載牽引方法以及非線性方法,重點對如何實現(xiàn)高效率和F類功率放大器進行理論分析。再次,分析微波等離子體光源設計目標,以LDMOS功率管作為設計基礎(chǔ),利用ADS仿真軟件對Freescale公司大功率功率管MRF6V4300N進行仿真研究,并制作、調(diào)試出實物實現(xiàn)250W大功率、60%以上高效率的功率放大器。文章對設計過程做詳細分析并對調(diào)試中注意事項以及所遇問題的解決方法進行闡述。然后,文中針對如何提高效率做仿真研究,利用MRF6V4300管加入諧波控制設計,實現(xiàn)200W輸出功率、74%效率的F類功率放大器。最后,對論文過程中所存在的不足之處進行總結(jié)分析,并對不足之處提出改進意見。同時,針對微波等離子體光源射頻模塊的設計,給未完成的工作指出方向與可借鑒的方案。本文研究方案可行性大,實現(xiàn)了可用于微波等離子體光源工程應用的微波功率放大器模塊,并指出工程應用中設計關(guān)鍵點與注意事項。通過對兩種設計方案電路的仿真和測試,實現(xiàn)了大功率、高效率的設計目標,對后來研究者具有較大的參考價值。
[Abstract]:In order to adapt to the current energy shortage and advocate the current situation of efficient energy conservation, people for green, energy-saving. The research of new microwave plasma source (LEP) with high efficiency is becoming more and more active. This paper is based on the first generation of microwave plasma light source. In order to solve many shortcomings of the first generation microwave plasma light source, the microwave solid-state circuit is used to replace the vacuum device as the driving source. The design of the power amplifier in the RF module of the new microwave plasma light source is studied, and a lot of research and analysis on the realization of high efficiency and high power are done. Finally, the design of high-power amplifier with high efficiency is realized. The main content of this paper is divided into four parts. Firstly, the research background is introduced. The research object design methods and the development of power devices are introduced in detail. Secondly, the basic types of power amplifiers, technical specifications, research and design methods are analyzed and studied theoretically. In this paper, the load traction method and nonlinear method in power amplifier are described in detail. The emphasis is on how to achieve high efficiency and class F power amplifier. Thirdly, the design target of microwave plasma light source is analyzed. Based on the design of LDMOS power tube, the MRF6V4300N of Freescale company is simulated and studied by using ADS simulation software, and it is made. In this paper, the design process is analyzed in detail, and the matters needing attention in debugging and the solutions to the problems encountered are expounded. In this paper, how to improve the efficiency of simulation research, using MRF6V4300 tube to add harmonic control design to achieve 200W output power efficiency of 74% F power amplifier. Finally. The shortcomings of the paper are summarized and analyzed, and the improvement suggestions are put forward. At the same time, the design of RF module of microwave plasma light source is proposed. In this paper, the feasibility of the research scheme is great, and the microwave power amplifier module which can be used in the microwave plasma source engineering application is realized. The design key points and points for attention in the engineering application are pointed out. By simulating and testing the circuits of the two design schemes, the design goal of high power and high efficiency is realized, which is of great reference value to the later researchers.
【學位授予單位】：電子科技大學
【學位級別】：碩士
【學位授予年份】：2015
【分類號】：TN722.75

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相關(guān)博士學位論文 前1條

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本文編號：1491966