本文關(guān)鍵詞： 超低介電常數(shù) 納米復(fù)合 界面作用 相結(jié)構(gòu) 成型工藝　出處：《西南科技大學(xué)》2017年碩士論文　論文類型：學(xué)位論文

【摘要】：隨著微電子工業(yè)的飛速發(fā)展,電子器件和集成電路正向著小型化、高密度化發(fā)展。元件密度和功能的不斷提升對(duì)低介電技術(shù)提出了更多更高的要求。向材料中引入納米孔洞可以降低介電常數(shù)(k),但k每降低0.1,至少需引入10%左右的孔隙率,因此達(dá)到超低介電往往需引入大量孔洞結(jié)構(gòu),犧牲材料的力學(xué)性能。近幾十年來,納米復(fù)合作為聚合物材料的改性手段,已經(jīng)得到了廣泛的應(yīng)用。納米復(fù)合的突出特點(diǎn)是可通過極小含量的納米粒子顯著改變聚合物的力學(xué)、熱學(xué)、光學(xué)、電學(xué)等性質(zhì),其內(nèi)在作用機(jī)制是通過納米粒子大比表面積和強(qiáng)界面作用,誘導(dǎo)聚合物鏈在納米粒子表面排列,產(chǎn)生受限作用,從而極大程度地改變聚合物性質(zhì)。納米復(fù)合的這一效應(yīng)有望在調(diào)控低介電性質(zhì)上發(fā)揮重要作用,同時(shí)相對(duì)于傳統(tǒng)的化學(xué)或者多孔方法,納米復(fù)合技術(shù)制備低介電材料還可進(jìn)一步提高材料力學(xué)性能,也更為簡單、高效,展現(xiàn)出顯著的性能優(yōu)勢�；谏鲜鏊悸�,本課題采用幾個(gè)典型的納米復(fù)合體系,研究了納米復(fù)合效應(yīng)對(duì)材料低介電性能的影響并得到了超低介電常數(shù)(k=1.77)、低損耗(10-3)的納米復(fù)合材料。以典型的納米復(fù)合體系,線性低密度聚乙烯(PE)/二氧化硅納米粒子(SNP)復(fù)合材料,為研究對(duì)象,研究納米復(fù)合對(duì)介電性能的影響。采用直徑為20 nm的SNP作為納米填料粒子,通過熱壓成型復(fù)合得到一系列不同二氧化硅體積含量的納米復(fù)合材料(PE/SNP)。介電測試發(fā)現(xiàn),當(dāng)二氧化硅體積含量為3.58%,復(fù)合材料的介電常數(shù)從2.43降低到k=1.93(10MHz),在這一測試頻率(遠(yuǎn)高于1000Hz)下,介電常數(shù)主要由電子和分子極化決定,受定向極化、界面極化較小,因此主要與偶極子數(shù)量及排列方式有關(guān)。介電常數(shù)隨著SNP含量增大,呈現(xiàn)先減小后增大的趨勢。掃描電鏡及密度測試結(jié)果表明PE/SNP納米復(fù)合材料中僅存在極少量孔或缺陷,從而排除了多孔結(jié)構(gòu)對(duì)材料介電性能的影響。DSC及XRD結(jié)果證明SNP對(duì)PE存在成核結(jié)晶作用,但SNP含量對(duì)成核作用影響較小,難以解釋介電常數(shù)的變化規(guī)律。通過SEM對(duì)納米復(fù)合體系相態(tài)進(jìn)行了深入分析,發(fā)現(xiàn)PE在熱壓作用下呈現(xiàn)出各向異性的趨層狀結(jié)晶結(jié)構(gòu)。而SNP引入會(huì)引發(fā)PE圍繞SNP成核生長,由此形成的PE/SNP聚集體會(huì)進(jìn)一步團(tuán)聚形成球形相結(jié)構(gòu),從而降低了材料的各向異性,研究還表明這一球形結(jié)構(gòu)的規(guī)整性和含量與介電性能間呈現(xiàn)出直接關(guān)聯(lián),揭示了相結(jié)構(gòu)及內(nèi)在聚合物鏈排列對(duì)介電性能的影響和調(diào)控機(jī)制。通過調(diào)控納米復(fù)合結(jié)構(gòu)(納米粒子的改性、成型壓力及溫度、填料尺寸、種類及維度),進(jìn)一步研究納米復(fù)合對(duì)材料介電性能的影響。首先,通過納米粒子表面接枝及改變填料尺寸和種類直接調(diào)控界面效應(yīng),發(fā)現(xiàn)表面接枝聚苯乙烯的二氧化硅(G-SNP)與PE復(fù)合(PE/G-SNP)在二氧化硅體積含量為3.58%時(shí)介電常數(shù)為2.02,略高于PE/SNP。填料尺寸越大,納米復(fù)合體系介電常數(shù)相對(duì)較高。球形納米粒子相對(duì)于納米棒粒子,降低介電常數(shù)效應(yīng)更為明顯。以上結(jié)果揭示了納米粒子界面效應(yīng)對(duì)介電性能有著重要影響,界面面積越大,作用越強(qiáng),介電常數(shù)越低。另一個(gè)重要發(fā)現(xiàn)是,PE/SNP介電性能和相態(tài)結(jié)構(gòu)與熱壓壓力直接相關(guān),在一定成型壓力下,SNP才可產(chǎn)生顯著的界面誘導(dǎo)作用,產(chǎn)生規(guī)整的球形相態(tài)結(jié)構(gòu),與之對(duì)應(yīng)產(chǎn)生低介電效應(yīng)。這一結(jié)果進(jìn)一步證實(shí)了納米復(fù)合效應(yīng)對(duì)介電性能的作用機(jī)制。通過成型工藝篩選,獲得較為理想的成型條件,當(dāng)成型溫度為155oC,成型壓力2MPa時(shí),復(fù)合材料介電常數(shù)最低,達(dá)到1.77,實(shí)現(xiàn)了良好的超低介電性能。
[Abstract]:With the rapid development of microelectronics industry, electronic devices and integrated circuits towards miniaturization, high density development. The density of components and function continuously put forward more requirements on low dielectric materials to introduce technology. Nano pores can reduce the dielectric constant (k), but the K is reduced by 0.1 each, at least the need to introduce about 10% porosity, so as to achieve the ultra low dielectric are often required to introduce a large number of holes, at the expense of the mechanical properties of materials. In recent decades, as a means of nano composite polymer materials, has been widely used. The outstanding feature of nano composite is mechanical, the minimum content of nanoparticles significantly change the polymer thermal, optical and electrical properties, its intrinsic mechanism is through the nanoparticles large surface area and strong interfacial interaction, induced polymer chain arranged on the surface of nanoparticles, have limited effect, Greatly change the properties of polymer nano composite. This effect is expected to play an important role in the regulation of low dielectric properties, and compared with the traditional chemical method or porous, nano composite preparation technology of low dielectric materials can also further improve the mechanical properties of the materials, but also more simple, efficient, showing significant performance advantages. Based on the above ideas, this thesis adopts several typical nano composite system, studied the effect of nano materials on the composite effect of low dielectric properties and obtain ultra low dielectric constant (k=1.77), low loss (10-3) nano composite material with nano composite system. The typical linear low density polyethylene (PE) / silica nanoparticles (SNP) composite material as the research object, effect of nano composite on the dielectric properties. The diameter of 20 nm SNP as the nano filler particles by hot pressing composite was The nano composite material to a series of different size silica content (PE/SNP). The dielectric tests show that when the silica content is 3.58%, the dielectric constant of the composite is reduced from 2.43 to k=1.93 (10MHz), in the test frequency (far more than 1000Hz), dielectric constant is mainly determined by the electronic and molecular under the direction of polarization, polarization, interface polarization is small, it is mainly related with the dipole number and arrangement of the dielectric constant with the increase of SNP content, decreased first and then increased. Scanning electron microscopy and density test results show that the defects of very small holes or only PE/SNP nano composite materials, eliminating the influence on the porous structure the.DSC and XRD dielectric properties of materials shows that the SNP of the existence of PE nucleation and crystallization, but has little effect on the content of SNP nucleation, difficult to explain the variation of dielectric constant of nano composite system by SEM. The phase is analyzed, showing a trend that PE crystalline layered anisotropic structure under the effect of heat and pressure. The introduction of SNP will lead to PE around the SNP nucleation and growth, resulting in the formation of PE/SNP aggregates further aggregated to form spherical phase structure, thereby reducing the anisotropy of the material, the study also showed that the spherical structure the regularity and content and dielectric properties are directly related, reveals the phase structure and the internal arrangement of polymer chains on the dielectric properties and regulation mechanism. Through the regulation of nano composite structure (modified nanoparticles, molding pressure and temperature, filler size, type and dimension), further study on effect of nano composite on the dielectric properties of the composites. Firstly, the grafted nanoparticles surface and changing the filler size and type of direct control interface effect, found the surface of silica grafted polystyrene (G-SNP) and PE composite (PE/G-SNP) in silica content is 3.58% the dielectric constant is 2.02, slightly higher than the PE/SNP. filler size, nano composite system relatively high dielectric constant. The spherical nanoparticles to nanorods particles, reduce the dielectric constant effect is more obvious. The above results reveal that the nanoparticle surface effect has an important effect on the dielectric properties. The interface is bigger, the stronger, lowerdielectricconstant. Another important finding is that the dielectric properties of PE/SNP and the phase structure and the pressure is directly related to the molding pressure, induced by SNP can create a significant interface, spherical regular phase structure generated, and the corresponding have a low dielectric effect. This result further confirmed that the mechanism of nano composite effect on dielectric properties. The forming process of screening, molding ideal conditions, when the molding temperature is 155oC, pressure molding When force 2MPa, the dielectric constant of the composite is the lowest, reaching 1.77, and good ultra-low dielectric properties are achieved.

【學(xué)位授予單位】：西南科技大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TB33;TN04

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