本文關(guān)鍵詞： 液晶衍射光柵 波前相位檢測(cè) 瓊斯矩陣 PZT相移 Zernike多項(xiàng)式　出處：《中國科學(xué)院大學(xué)學(xué)報(bào)》2017年01期 　論文類型：期刊論文

【摘要】：液晶衍射光柵在電控下能夠?qū)崿F(xiàn)光束控制和偏轉(zhuǎn),與傳統(tǒng)的光束控制器件相比具有穩(wěn)定性強(qiáng)、速度快、體積和質(zhì)量小等優(yōu)點(diǎn)。對(duì)液晶衍射光柵的光波調(diào)制相位分布進(jìn)行精密測(cè)量是該器件研制過程的重要環(huán)節(jié)和評(píng)價(jià)其性能的關(guān)鍵手段。提出正交移相干涉測(cè)量液晶衍射光柵調(diào)制相位分布的方法。通過透射式相位板的對(duì)比實(shí)驗(yàn)對(duì)測(cè)量方法的可行性和準(zhǔn)確性進(jìn)行驗(yàn)證,分析測(cè)量精度和誤差。使用該方法實(shí)現(xiàn)對(duì)液晶光柵相位分布的測(cè)量。實(shí)驗(yàn)表明,此方法簡(jiǎn)單、快速、可靠,能夠準(zhǔn)確測(cè)量出液晶衍射光柵±2級(jí)的波前調(diào)制相位信息。
[Abstract]:The liquid crystal diffraction grating can realize beam control and deflection under electronic control, which is more stable and faster than the traditional beam controller. The precise measurement of the optical wave modulation phase distribution of the liquid crystal diffraction grating is an important step in the development of the device and the key means to evaluate its performance. The orthogonal phase shift interferometry is proposed to measure the liquid crystal diffraction. The feasibility and accuracy of the measurement method are verified by the contrast experiment of the transmission phase plate. The measurement accuracy and error are analyzed. The phase distribution of liquid crystal grating is measured by this method. The experiment shows that the method is simple, fast and reliable. The phase information of the wavefront modulation of the liquid crystal diffraction grating 鹵2 order can be accurately measured.
【作者單位】： 電子科技大學(xué)光電信息學(xué)院;
【基金】：國家自然科學(xué)基金(61308062)資助
【分類號(hào)】：TN256
【正文快照】： Zhao Y M,Yang R F,Yang C P.Phase distribution measurement of liquid crystal optical phased array based onorthogonal phase shift interferometry[J].Journal of University of Chinese Academy of Sciences,2017,34(1):32-37.液晶衍射光柵(liquid crystal optical ph

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