發(fā)布時間：2018-01-14 19:14

  本文關鍵詞：基于干涉曝光技術的LSPR生化傳感芯片的研究　出處：《天津工業(yè)大學》2017年碩士論文　論文類型：學位論文

  更多相關文章： 局域表面等離子體共振 干涉曝光 金屬納米結構 生化傳感芯片

【摘要】：局域表面等離子體共振(Localized Surface Plasmon Resonance,LSPR)是由于光波激發(fā)導致貴金屬體內自由電子發(fā)生共振的現(xiàn)象。當入射光照射到金屬表面,光波的頻率與金屬納米結構的電子頻率相同時,會使金屬表面電荷振蕩。此時金屬納米結構表面的電磁場會極大地增強,使金屬納米結構對其表面附近的物質折射率變化十分敏感。如果將待檢測物修飾在金屬納米結構表面,就能夠通過測試光譜的變化對待測物進行傳感檢測。為了制備納米圖形結構,本文搭建了一套勞厄德(Lloyd)干涉曝光系統(tǒng),成功在2×2cm2的導電玻璃以及硅片襯底上制備出了納米光柵、點陣以及孔陣等結構。隨后通過電子束蒸發(fā),金屬剝離(lift-off)等工藝制作出傳感性能優(yōu)異的金屬納米結構,為傳感芯片的制備提供了前提條件。本文通過FDTD Solutions軟件對制備的金屬納米結構進行仿真,分析了金屬納米顆粒的形狀、尺寸以及材料等因素對傳感特性的影響。模擬了不同大小的金納米點陣在不同介質折射率下的光譜特性,結果說明隨著折射率的增大,共振波長發(fā)生顯著位移。這些模擬工作為后期芯片的傳感測試提供了借鑒。最后對制備的金屬納米結構進行實際的測試。通過測試結果驗證了金納米顆粒的參數(shù)對折射率靈敏度的影響。本文的研究結果表明,對于金納米點陣結構傳感芯片,其傳感靈敏度可達533nm/RIU。這為研究高靈敏度的LSPR傳感器制作提供了參考,在生化傳感領域具有很大的應用價值。
[Abstract]:Local surface plasmon resonance (SPR) localized Surface Plasmon Resonance. LSPRA is a phenomenon that the free electron in precious metal resonates due to the excitation of light wave. When the incident light shines on the metal surface, the frequency of the light wave is the same as the electron frequency of the metal nanostructure. Will make the metal surface charge oscillation. At this time, the metal nanostructure surface electromagnetic field will be greatly enhanced. The metal nanostructures are very sensitive to the change of refractive index near the surface. If the metal nanostructures are modified on the surface of the metal nanostructures. In order to prepare the nanograph structure, a set of Lloyd Lloyd interferometric exposure system is built in this paper. Nanocrystalline gratings, lattice and pore arrays were successfully fabricated on 2 脳 2cm2 conductive glass and silicon substrate, and then vaporized by electron beam. Metal nanostructures with excellent sensing performance were fabricated by metal stripping lift-off process. In this paper, the metal nanostructures were simulated by FDTD Solutions software, and the shape of metal nanoparticles was analyzed. The effects of dimension and material on the sensing characteristics were simulated. The spectral characteristics of gold nanoscale lattice with different sizes were simulated under different refractive index of medium. The results show that the spectral characteristics increase with the increase of refractive index. The resonant wavelength shifted significantly. These simulation work provided a reference for the later chip sensing test. Finally, the fabricated metal nanostructures were tested. The parameters of the gold nanoparticles were verified by the test results. The effect on refractive index sensitivity. The results of this paper show that. For gold nanoscale lattice sensor chip, the sensor sensitivity can reach 533nm / r RIU, which provides a reference for the study of high sensitivity LSPR sensor fabrication. It has great application value in the field of biochemical sensing.
【學位授予單位】：天津工業(yè)大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TN40;TP212

【參考文獻】

相關期刊論文 前7條

1 王青松;Masao Ikeda;譚明;代盼;吳淵淵;陸書龍;楊輝;;High quality non-rectifying contact of ITO with both Ni and n-type GaAs[J];Journal of Semiconductors;2015年05期

2 王萬晶;李喜峰;石繼峰;張建華;;ITO界面調制層對GZO電極LED器件性能的影響[J];發(fā)光學報;2012年02期

3 周偉;張維;王程;趙子春;王延濤;牛文成;岳釗;劉國華;;貴金屬納米顆粒LSPR現(xiàn)象研究[J];傳感技術學報;2010年05期

4 林泉;宋文強;彭承琳;;生物傳感器及其在生物醫(yī)學中的應用研究[J];醫(yī)療衛(wèi)生裝備;2007年08期

5 崔大付,劉長春,陳翔;生化傳感器發(fā)展的新特點[J];測控技術;2004年03期

6 劉世杰,杜驚雷,肖嘯,唐雄貴,彭欽軍,劉建莉,郭永康;光刻中駐波效應的影響分析[J];微納電子技術;2004年02期

7 程慧,黃朝峰,段子淵;SPR生物傳感器及其應用進展[J];中國生物工程雜志;2003年05期

，

本文編號：1424933