本文關鍵詞：蔭罩母板精密自動對準系統(tǒng)的研究　出處：《南京師范大學》2015年碩士論文　論文類型：學位論文

  更多相關文章： 蔭罩母板 疊柵信號 雙驅(qū)動系統(tǒng) 壓電陶瓷 自適應模糊控制

【摘要】：本文以蔭罩母板自動對準過程中位置偏差檢測及整個系統(tǒng)控制技術的研究與實現(xiàn)為論題,建立了光束經(jīng)透射式雙光柵衍射后產(chǎn)生的各次疊柵光強與光柵位移的數(shù)學模型,并通過MATLAB對光柵模型進行了仿真實驗,得出其變化規(guī)律。仿真結果表明,衍射疊柵光強信號可以直接反應出位移的變化,信號強度隨兩片光柵的相對微位移呈周期性變化,因而疊柵信號可用于蔭罩母板微位移測量。建立了蔭罩母板復合式雙驅(qū)動對準系統(tǒng),為實現(xiàn)大行程高精度對準奠定了基礎。本課題設計的復合式雙驅(qū)動對準系統(tǒng)是由宏對準與微對準兩部分結合而成的。宏對準是依靠步進電機帶動精密滾珠絲杠組成的宏動臺,根據(jù)粗光柵檢測獲得的位移信號,來發(fā)出相應的脈沖指令驅(qū)動宏動臺,使下動板移動到既定的對準范圍內(nèi),完成宏對準,對準精度可達到±220μm,工作行程為1000mn。宏對準結束后,計算機再根據(jù)細光柵檢測信號的大小,發(fā)出相應的驅(qū)動電壓,驅(qū)動壓電陶瓷產(chǎn)生相應的動力,帶動柔性鉸鏈發(fā)生相應的形變,完成微小位移的對準,系統(tǒng)最終實現(xiàn)了±100nm蔭罩母板對準精度,兼顧了工作行程和對準精度兩方面的要求。針對壓電陶瓷存在非線性,精確數(shù)學模型難于建立的缺陷,提出了蔭罩母板精密對準的自適應模糊控制,并給出了相應控制流程。實驗結果表明,設計的控制方案緩解了壓電陶瓷及對準系統(tǒng)本身存在的非線性問題,實現(xiàn)了系統(tǒng)控制的快速響應和高穩(wěn)定性,有效提高了對準速度和對準精度。
[Abstract]:In this paper, the research and realization of the position deviation detection and the control technology of the whole system in the automatic alignment process of shadow mask motherboard are discussed. The mathematical model of the intensity and displacement of the superimposed grating produced by the transmission double grating diffraction is established, and the simulation experiment of the grating model is carried out by MATLAB. The simulation results show that the light intensity signal of the diffracted grating can directly reflect the change of the displacement, and the signal intensity varies periodically with the relative micro-displacement of the two gratings. Therefore, the stacked grid signal can be used to measure the micro-displacement of the shadow mask motherboard, and a compound dual-drive alignment system for the shadow mask motherboard is established. The compound double drive alignment system designed in this paper is composed of macro alignment and micro alignment. Macro alignment is a precision ball screw set driven by step motor. Into a macro platform. According to the displacement signal obtained by the coarse grating detection, the corresponding pulse instruction is issued to drive the macro moving table, so that the lower moving plate moves to the established alignment range, and the macro alignment is completed, and the alignment accuracy can reach 鹵220 渭 m. The working stroke is 1000mn.After the macro alignment is finished, the computer sends out the corresponding driving voltage according to the size of the detection signal of the fine grating, and drives the piezoelectric ceramics to produce the corresponding power. The deformation of flexure hinge is driven to achieve the alignment of small displacement. Finally, the alignment accuracy of 鹵100nm shadow mask motherboard is achieved. Considering the requirements of working stroke and alignment accuracy, an adaptive fuzzy control for precision alignment of shadow mask motherboard is proposed to solve the problem of nonlinear and difficult to establish accurate mathematical model of piezoelectric ceramics. The experimental results show that the proposed control scheme alleviates the nonlinear problem of the piezoelectric ceramics and the alignment system, and realizes the fast response and high stability of the control system. The alignment speed and precision are improved effectively.
【學位授予單位】：南京師范大學
【學位級別】：碩士
【學位授予年份】：2015
【分類號】：TN141.32

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