發(fā)布時(shí)間：2018-01-14 01:05

  本文關(guān)鍵詞：基于有限元方法的光刻機(jī)工件臺(tái)線管組件結(jié)構(gòu)優(yōu)化　出處：《清華大學(xué)學(xué)報(bào)(自然科學(xué)版)》2017年08期 　論文類(lèi)型：期刊論文

  更多相關(guān)文章： 工件臺(tái) 線管組件 擾動(dòng)力 結(jié)構(gòu)優(yōu)化

【摘要】：光刻機(jī)工件臺(tái)是光刻機(jī)的關(guān)鍵子系統(tǒng),其中的線管組件是其傳輸信號(hào)、動(dòng)力及冷卻液等必不可少的組成部分。線管組件產(chǎn)生的擾動(dòng)力會(huì)惡化工件臺(tái)系統(tǒng)的超精密運(yùn)動(dòng)性能,因此抑制線管組件擾動(dòng)力對(duì)提高工件臺(tái)系統(tǒng)的運(yùn)動(dòng)性能具有重要意義。該文以工件臺(tái)系統(tǒng)的子系統(tǒng)掩模臺(tái)系統(tǒng)的線管組件為例,以減小線管組件擾動(dòng)力波動(dòng)、提高掩模臺(tái)運(yùn)動(dòng)性能為目的,建立了線管組件有限元模型,對(duì)線管組件的主要結(jié)構(gòu)參數(shù)進(jìn)行了優(yōu)化,提出了線管組件優(yōu)化的一些準(zhǔn)則,并進(jìn)行了實(shí)驗(yàn)驗(yàn)證。實(shí)驗(yàn)表明:該有限元模型與實(shí)驗(yàn)相比的一階頻率誤差在10%以內(nèi),驗(yàn)證了模型的準(zhǔn)確性。仿真實(shí)驗(yàn)結(jié)果表明:優(yōu)化后的線管組件L向擾動(dòng)力波動(dòng)幅值減小80%。
[Abstract]:The workpiece table of lithography machine is the key subsystem of lithography machine, in which the line tube component is its transmission signal. The disturbing force generated by the wire tube assembly will worsen the ultra-precision motion performance of the workpiece system. Therefore, it is very important to restrain the disturbance force of the wireline tube assembly to improve the motion performance of the workpiece platform system. In this paper, the wireline tube component of the subsystem mask platform system of the workpiece platform system is taken as an example to reduce the disturbing dynamic fluctuation of the wire tube assembly. For the purpose of improving the motion performance of the mask platform, the finite element model of the wire tube assembly is established, the main structural parameters of the line tube assembly are optimized, and some criteria for the optimization of the line tube assembly are put forward. The experimental results show that the first-order frequency error of the finite element model is less than 10%. The simulation results show that the amplitude of L-direction disturbance dynamic fluctuation of the optimized tube assembly is reduced by 80%.
【作者單位】： 清華大學(xué)機(jī)械工程系;
【基金】：國(guó)家科技重大專(zhuān)項(xiàng)子項(xiàng)(2012ZX02702006)
【分類(lèi)號(hào)】：TN405
【正文快照】： 集成電路(IC)產(chǎn)業(yè)是推動(dòng)社會(huì)信息化和經(jīng)濟(jì)發(fā)展的核心產(chǎn)業(yè)之一[1],光刻機(jī)是集成電路制造的最為關(guān)鍵裝備,超精密工件臺(tái)系統(tǒng)是光刻機(jī)的核心子系統(tǒng)之一[2-3]。目前,由于直驅(qū)式動(dòng)圈式電機(jī)推重比高和無(wú)理論推力上限的優(yōu)點(diǎn),高端光刻機(jī)普遍采用這種驅(qū)動(dòng)結(jié)構(gòu)。運(yùn)動(dòng)的通電線圈由于散熱和

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本文編號(hào)：1421322