本文關鍵詞：基于超快激光的超光滑光學表面制造技術研究　出處：《西安工業(yè)大學》2015年碩士論文　論文類型：學位論文

  更多相關文章： 超快激光 動力學模型 激光拋光 石英晶體 參數優(yōu)化 犧牲層

【摘要】：隨著相關領域學科的發(fā)展,實現光學材料表面的超光滑拋光成為精密加工的一個重要研究內容。激光拋光技術作為一種表面處理技術,具有拋光效果好且熱效應少的特點,所以相對于常規(guī)拋光技術而言,其在高精度拋光中具有無可比擬的優(yōu)勢。本文討論了超快激光對光學材料的作用機理、拋光系統(tǒng)搭建、實驗設計、實驗實施和數據分析,并構建出了超快激光拋光石英晶體的動力學模型,探索了超快激光對石英晶體的拋光工藝。實驗中,激光光源采用飛秒激光和皮秒激光,通過數碼顯微鏡和表面輪廓儀檢測了被拋光后的樣品表面形貌和粗糙度,分析了激光能量密度、光斑重疊率及離焦量對超快激光拋光效果的影響。利用正交實驗設計和單變量分析可以分別直觀地分析各因素在拋光效果中所占的權重、各因素的水平變化對拋光效果的影響。將兩種實驗方法相結合可以對影響參數進行較為科學合理的優(yōu)化,然后應用單變量及正交試驗法對石英晶體進行直接拋光,最后對涂有犧牲層的材料樣品進行了拋光試驗,并且對兩者的拋光效果進行了比較。本文的結論如下：1)推導出了超快激光作用光學材料的動力學模型公式,得出材料的刻蝕深度是隨著激光能量密度的變化而呈非線性變化的。2)激光能量密度,光斑重疊率和離焦量這些工藝參數對拋光效果均有影響,這三者之間有著交互關系,存在一個可以獲得最優(yōu)拋光效果的參數組合。3)通過正交優(yōu)化實驗設計可以得出在激光能量密度,光斑重疊率和離焦量這三個主要參數中對拋光效果影響最大的是激光能量密度。因為激光能量密度的權重要大于其余兩者的權重。4)對表面涂有犧牲層材料的石英晶體材料進行超快激光拋光,可以獲得比直接拋光更好的拋光效果。
[Abstract]:With the development of related disciplines, to achieve ultra smooth surface polishing of optical materials become an important research content of precision machining. The laser polishing technology as a surface treatment technology, has the characteristics of good polishing effect and less thermal effect, compared to the conventional polishing technology, has the advantages of high precision polishing There is nothing comparable to this in the. This paper discusses the mechanism of ultrafast laser optical materials, polishing system construction, experimental design, experimental implementation and data analysis, and constructs the dynamic model of ultrafast laser polishing of quartz crystal, explores the ultrafast laser polishing process of quartz crystal. In the experiment, the laser light source using femtosecond and picosecond laser, through digital microscope and surface profiler to detect the surface morphology and roughness of the samples after polishing, analyzed the laser energy density, spot overlap and defocus Effect of ultrafast laser polishing effect. The analysis can respectively visually analyze the weight of each factor for the polishing effect of using orthogonal design and single variable influence level of each factor on the polishing effect. The two methods of combining optimization on parameters for more scientific and reasonable, and the application single variable and orthogonal test method for direct polishing of quartz crystal, with the final polishing test samples of sacrificial layer coating, and the polishing effect of the two are compared. The conclusions of this paper are as follows: 1) derived formula of dynamic model for ultrafast laser optical materials, the materials with etching depth the change of laser energy density and the nonlinear variation of.2) laser energy density, spot overlap and influence on the polishing effect are these parameters from the three focus. There is an interactive relationship between, one can obtain the optimal polishing effect parameters.3) through orthogonal experimental design can be obtained in the laser energy density, spot overlap and defocus of the three main parameters on the polishing effect is the largest laser energy density. Because the weight of the laser energy density of the right.4 important than the other two) with quartz crystal material sacrificial layer materials are ultrafast laser polishing on surface coating, can obtain better effect than polishing polishing directly.

【學位授予單位】：西安工業(yè)大學
【學位級別】：碩士
【學位授予年份】：2015
【分類號】：TN249;TN305.2

【引證文獻】

相關會議論文 前1條

1 陳濤;劉勛;左鐵釧;;準分子激光應用于鋁合金和不銹鋼微拋光的試驗研究[A];2007年中國機械工程學會年會之第12屆全國特種加工學術會議論文集[C];2007年

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本文編號：1419097