本文關(guān)鍵詞：劃片機的高精度運動定位及誤差補償　出處：《吉林大學》2015年碩士論文　論文類型：學位論文

  更多相關(guān)文章： 劃片機 模糊PID 誤差補償

【摘要】：隨著科學技術(shù)的日益進步，半導體芯片已經(jīng)成為電子信息產(chǎn)業(yè)的基礎。半導體芯片生產(chǎn)的重要一道工序是由劃片機來完成的，因此劃片機的性能直接影響芯片的品質(zhì)和產(chǎn)量。為了節(jié)約硅片原材料和提高芯片產(chǎn)量，硅片變得越來越薄,切口寬度越來越小，這些生產(chǎn)工藝的改進對劃片機的性能提出了更高的要求。目前國內(nèi)的劃片機生產(chǎn)廠家較少而且技術(shù)水平也和國外先進設備有一定差距,所以提高劃片機的性能對國內(nèi)的電子產(chǎn)業(yè)有重要的意義。 針對劃片機目前存在的各種技術(shù)問題，本文選取劃片機的高精度運動定位及誤差補償問題進行了研究。劃片機的高精度運動定位系統(tǒng)選用伺服電機作為運動系統(tǒng)的驅(qū)動裝置，利用光柵尺測量運動位移數(shù)據(jù)，，采用模糊PID控制算法，實現(xiàn)了運動系統(tǒng)的閉環(huán)控制要求。為了使運動系統(tǒng)的響應速度快、超調(diào)量小，必須根據(jù)設備具體情況對模糊數(shù)字PID參數(shù)進行調(diào)整，得到最優(yōu)的參數(shù)值。本文利用MATLAB進行了仿真實驗以驗證模糊PID參數(shù)優(yōu)化的效果。 為了進一步提高運動定位精度，本文提出了兩種誤差補償方法：模版補償與標定補償。模版補償要求針對不同的產(chǎn)品分別進行定位誤差掃描，然后記錄相應誤差并對實際生產(chǎn)時的運動控制參數(shù)做補償修正。這種方法不依賴于劃片機的運動定位精度而且適合各種尺寸不標準的芯片。標定補償是先采用激光干涉儀對伺服電機的閉環(huán)控制誤差進行辨識，然后利用數(shù)學方法建立定位誤差模型，根據(jù)誤差模型修正控制參數(shù)。標定補償適合應用于芯片尺寸標準的情況。
[Abstract]:With the advances of science and technology, the semiconductor chip has become the foundation of electronic information industry. The semiconductor chip production is an important process of the dicing machine to complete, so the performance of chip dicing machine directly affects the yield and quality. In order to save raw materials and improve the yield of silicon chip, silicon wafers become thinner, kerf width more and more small, put forward higher requirements on the performance improvement of these production processes. The scriber scribing machine manufacturers at home less and the technical level of foreign advanced equipment and also have a certain gap, has important significance to improve the performance of the domestic electronics industry dicing machine.
For a variety of technical problems of dicing machine, high precision positioning and error compensation of the dicing machine were studied. The high precision positioning system dicing machine selection of servo motor as the driving device of the motor system, the grating measurement displacement data, fuzzy PID control algorithm is used to realize closed-loop motion system the control requirements. In order to make the response speed of motion of the system is fast, small overshoot, must adjust the fuzzy PID parameters according to the practical situation of the equipment to obtain the optimal values of the parameters. This paper uses the MATLAB simulation experiments are carried out to verify the effect of fuzzy PID parameter optimization.
In order to further improve the positioning precision, this paper presents two methods of error compensation and calibration template compensation. Template compensation requirements for different products were positioning error of scanning, and then record the corresponding error and compensation for the actual production of the motion control parameters. Dynamic positioning accuracy of this method does not depend on the dicing machine and the size is not suitable for all kinds of standard chip. Calibration is to use laser interference control instrument for closed-loop servo motor error identification, and then establish the error model using the mathematical method, according to the error correction model. The control parameters calibration compensation suitable for chip size standards.

【學位授予單位】：吉林大學
【學位級別】：碩士
【學位授予年份】：2015
【分類號】：TN305

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本文編號：1405391