【摘要】：碲化鎘(CdTe)因具有良好的光電性能和吸收性能經(jīng)常被作為太陽(yáng)電池的吸收層材料。以純度為99.99%的CdTe陶瓷靶為靶材在玻璃襯底上采用射頻磁控濺射的方法制備了一系列的CdTe薄膜,研究了襯底溫度對(duì)樣品薄膜的厚度、結(jié)構(gòu)和光學(xué)性能的影響。結(jié)果表明:隨著襯底溫度的增加薄膜的厚度在逐漸地減少;制備的薄膜都是立方閃鋅礦結(jié)構(gòu)且具有高度的(111)面擇優(yōu)取向;薄膜對(duì)可見光有較好的吸收性能,隨襯底溫度的增加而減小。
[Abstract]:Cadmium telluride(CdTe)is often used as an absorbent layer material for solar cells because of its excellent photoelectric and absorption properties. A series of CdTe thin films were prepared by RF magnetron sputtering with 99.99%purity CdTe ceramic target. The results show that the thickness of the film decreases gradually with the increase of substrate temperature. The prepared thin films are all cubic sphalerite structures and have a high(111)plane preferred orientation;The film has good absorption performance of visible light and decreases with the increase of substrate temperature.
【作者單位】： 暨南大學(xué)信息科學(xué)技術(shù)學(xué)院;暨南大學(xué)韶關(guān)研究院;
【基金】：廣東大學(xué)生科技創(chuàng)新培育專項(xiàng)資金項(xiàng)目(pdjh2017b0056) 廣東省省級(jí)科技計(jì)劃項(xiàng)目(2014A010106014) 暨南大學(xué)韶關(guān)研究院新型研發(fā)機(jī)構(gòu)初創(chuàng)期建設(shè)補(bǔ)助項(xiàng)目(2016B090919014)
【分類號(hào)】：TM914.4
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本文編號(hào)：2525820