【摘要】：沖擊式壓電馬達(dá)以壓電陶瓷為驅(qū)動(dòng)元件,在鋸齒波信號(hào)作用下激勵(lì)定子產(chǎn)生不對(duì)稱(chēng)的周期性運(yùn)動(dòng),利用慣性摩擦作用形成定子和動(dòng)子界面的粘滑運(yùn)動(dòng),從而推動(dòng)動(dòng)子實(shí)現(xiàn)單方向的步進(jìn)位移。該類(lèi)馬達(dá)除可工作在上述亞微米級(jí)位移分辨率的步進(jìn)驅(qū)動(dòng)模式,亦可工作在運(yùn)動(dòng)速度達(dá)數(shù)毫米每秒的平滑驅(qū)動(dòng)模式,還可工作在納米級(jí)位移分辨率的掃描驅(qū)動(dòng)模式,有效地緩解了大行程和高精度之間的矛盾,在跨尺度微型精密定位操作系統(tǒng)中表現(xiàn)出良好的發(fā)展前景。然而,壓電陶瓷元件電壓激勵(lì)存在的遲滯、蠕變等非線(xiàn)性因素,不僅影響掃描驅(qū)動(dòng)模式下的定位精度,步進(jìn)驅(qū)動(dòng)模式下的步進(jìn)運(yùn)動(dòng)亦會(huì)因此而累積誤差,嚴(yán)重影響到?jīng)_擊式壓電馬達(dá)的實(shí)際應(yīng)用效果。本論文通過(guò)沖擊式壓電馬達(dá)建模仿真和激勵(lì)電路研究,探索提高該類(lèi)馬達(dá)三種驅(qū)動(dòng)模式下開(kāi)環(huán)控制精度的方法,主要工作包括:1.建立沖擊式壓電馬達(dá)動(dòng)力學(xué)理論模型,仿真分析三種驅(qū)動(dòng)模式下的運(yùn)動(dòng)特性以及影響定位精度的主要因素;2.分析壓電陶瓷典型的激勵(lì)電路,設(shè)計(jì)適用于沖擊式壓電馬達(dá)的電荷激勵(lì)電路,分析主要電路參數(shù)對(duì)驅(qū)動(dòng)性能的影響;3.搭建實(shí)驗(yàn)測(cè)試平臺(tái),對(duì)比分析直線(xiàn)沖擊式壓電馬達(dá)N-422.50在電壓、電荷激勵(lì)下的驅(qū)動(dòng)性能。測(cè)試結(jié)果表明:電荷激勵(lì)電路可滿(mǎn)足該類(lèi)馬達(dá)三種驅(qū)動(dòng)模式的工作要求;掃描驅(qū)動(dòng)模式下,電荷激勵(lì)在0.5~100Hz范圍內(nèi)可獲得較好的線(xiàn)性度;步進(jìn)驅(qū)動(dòng)模式下,電荷激勵(lì)在1~100Hz范圍內(nèi)具有穩(wěn)定的步進(jìn)位移。本論文研究表明電荷激勵(lì)用于壓電沖擊驅(qū)動(dòng)機(jī)構(gòu)跨尺度精密定位具有良好的研究?jī)r(jià)值和應(yīng)用前景。
[Abstract]:The impact piezoelectric motor takes piezoelectric ceramic as the driving element and stimulates the stator to produce asymmetric periodic motion under the action of the sawtooth wave signal. The viscous sliding motion between the stator and the moving sub-interface is formed by using the inertial friction action. In this way, the moving sub can realize one-way step-by-step displacement. This kind of motor not only can work in the step drive mode of the sub-micron displacement resolution, but also can work in the smooth driving mode of several millimeters per second, and can also work in the scanning drive mode of nanometer displacement resolution. It effectively alleviates the contradiction between large stroke and high precision, and shows a good prospect of development in the cross-scale micro-precision positioning operating system. However, non-linear factors, such as hysteresis and creep, which exist in voltage excitation of piezoelectric ceramic elements, not only affect the positioning accuracy in scan-driven mode, but also accumulate errors in step-by-step motion in step-driven mode. It seriously affects the practical application effect of impact piezoelectric motor. In this paper, through modeling and simulation of impact piezoelectric motor and research of excitation circuit, the methods to improve the precision of open-loop control in three driving modes of this kind of motor are explored. The main work is as follows: 1. The dynamic theoretical model of impact piezoelectric motor is established, and the motion characteristics under three driving modes and the main factors affecting positioning accuracy are simulated and analyzed. The typical excitation circuit of piezoelectric ceramics is analyzed, the charge excitation circuit suitable for impact piezoelectric motor is designed, and the influence of main circuit parameters on driving performance is analyzed. The driving performance of linear impingement piezoelectric motor Nx422.50 under voltage and charge excitation is compared and analyzed. The test results show that the charge excitation circuit can meet the requirements of the three driving modes of this kind of motor, and in the scanning driving mode, the charge excitation can obtain better linearity in the range of 0.5~100Hz. In the step drive mode, the charge excitation has a stable step displacement in the range of 1~100Hz. This paper shows that charge excitation has good research value and application prospect in cross-scale precise positioning of piezoelectric impact actuators.
【學(xué)位授予單位】：合肥工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類(lèi)號(hào)】：TM32

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