【摘要】：在直線運(yùn)動的驅(qū)動方式中,直線電機(jī)較傳統(tǒng)旋轉(zhuǎn)電機(jī)具有效率高、加工精度高和使用壽命長等優(yōu)點,在精密儀器、醫(yī)療器械、半導(dǎo)體加工等諸多領(lǐng)域獲得廣泛應(yīng)用。但是直線電機(jī)驅(qū)動平臺作為鉛垂軸使用時,需要考慮重力作用的影響。本文設(shè)計了一種基于直線電機(jī)驅(qū)動的三軸精密運(yùn)動滑臺,研究了精密運(yùn)動滑臺的機(jī)械結(jié)構(gòu)與直線運(yùn)動控制問題,研究表明重力平衡裝置的響應(yīng)速度、定位精度等動態(tài)性能是設(shè)計的關(guān)鍵。文中考慮精密運(yùn)動滑臺鉛垂方向的重力作用,給出了一種平衡重力作用的結(jié)構(gòu),并對該平衡結(jié)構(gòu)的快速響應(yīng)性與定位精度問題進(jìn)行了研究。首先,在分析論證三軸精密運(yùn)動滑臺總體結(jié)構(gòu)設(shè)計方案的基礎(chǔ)上,給出了直線電機(jī)、反饋元件、直線導(dǎo)軌等的選型、配置及非標(biāo)零件的結(jié)構(gòu)設(shè)計,并加工裝配了一種基于直線電機(jī)驅(qū)動的三軸精密運(yùn)動滑臺。其次,完成了三軸精密運(yùn)動滑臺控制系統(tǒng)的設(shè)計,包括控制器和直線電機(jī)驅(qū)動器的選型、調(diào)試,該控制系統(tǒng)可有效地控制精密運(yùn)動滑臺的定位精度。再次,在Pro/E中建立精密運(yùn)動滑臺的三維模型并導(dǎo)入ADAMS軟件中進(jìn)行了動力學(xué)仿真,分析了平衡阻尼對平衡裝置的影響。設(shè)計了直驅(qū)三軸精密運(yùn)動滑臺鉛垂運(yùn)動部件的重力平衡裝置,該平衡裝置可提高滑臺鉛垂運(yùn)動的穩(wěn)定性及定位精度。最后,對加裝重力平衡裝置的鉛垂運(yùn)動模塊進(jìn)行了定位精度測試。利用激光干涉儀測量精密運(yùn)動滑臺鉛垂運(yùn)動的定位精度和重復(fù)定位精度等參數(shù),并經(jīng)過反復(fù)的PMAC誤差補(bǔ)償控制提升定位精度,證明了平衡裝置可滿足應(yīng)用要求。此外,裝設(shè)重力平衡裝置前后的電流環(huán)響應(yīng)曲線驗證了重力平衡裝置可有效地保證鉛垂運(yùn)動的穩(wěn)定性。
[Abstract]:In the driving mode of linear motion, linear motor has many advantages, such as high efficiency, high machining precision and long service life. It has been widely used in many fields, such as precision instruments, medical instruments, semiconductor processing and so on. But when the linear motor driving platform is used as the vertical axis, the influence of gravity should be considered. In this paper, a three-axis precision motion slider driven by linear motor is designed. The mechanical structure and linear motion control of the precision motion sliding table are studied, and the response speed of the gravity balancing device is shown. Dynamic performance such as positioning accuracy is the key to the design. In this paper, considering the gravity action of the vertical direction of the precision moving sliding table, a structure of balancing gravity action is given, and the rapid response of the balance structure and the problem of positioning accuracy are studied. First of all, based on the analysis and demonstration of the overall structure design scheme of the three-axis precision moving sliding table, the selection, configuration and structural design of the non-standard parts are given, such as the linear motor, the feedback element, the linear guide rail, etc. A three-axis precision motion sliding table based on linear motor driving is also processed and assembled. Secondly, the design of the three-axis precision motion sliding table control system is completed, including the selection and debugging of the controller and the linear motor driver. The control system can effectively control the positioning accuracy of the precision motion sliding table. Thirdly, the three-dimensional model of the precision sliding platform is built in Pro/E, and the dynamic simulation is carried out in ADAMS software, and the influence of the balance damping on the balancing device is analyzed. A gravity balancing device for vertical motion components of three axis precision sliding platform is designed. The balance device can improve the stability and positioning accuracy of the vertical motion of slide platform. Finally, the positioning accuracy of the vertical motion module with gravity balance device is tested. The laser interferometer is used to measure the positioning accuracy and repeat positioning accuracy of the vertical motion of the precision moving slide table. After repeated PMAC error compensation control to improve the positioning accuracy, it is proved that the balancing device can meet the requirements of application. In addition, the response curve of the current loop before and after the installation of the gravity balance device verifies that the gravity balance device can effectively ensure the stability of the vertical motion.
【學(xué)位授予單位】：北方工業(yè)大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2016
【分類號】：TM359.4

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