本文選題：MEMS　切入點(diǎn)：壓電振動(dòng)能量收集器　出處：《重慶大學(xué)》2016年碩士論文　論文類型：學(xué)位論文

【摘要】：隨著微型能量收集器技術(shù)的快速發(fā)展和眾多應(yīng)用需求,如何實(shí)現(xiàn)環(huán)境動(dòng)能的高效獲取與高效轉(zhuǎn)換,已成為微型能量收集器技術(shù)研究的重點(diǎn)。論文以某大型發(fā)動(dòng)機(jī)故障監(jiān)測(cè)系統(tǒng)為具體應(yīng)用對(duì)象,提出了一種基于共質(zhì)量塊懸臂梁陣列的微型壓電振動(dòng)能量收集器新結(jié)構(gòu),介紹了微型壓電懸臂梁陣列振動(dòng)能量收集器的結(jié)構(gòu)與工作原理;基于集總參數(shù)模型,分析了影響能量收集器輸出性能的主要因數(shù);采用ANSYS有限元仿真軟件完成了微型壓電懸臂梁陣列振動(dòng)能量收集器結(jié)構(gòu)參數(shù)的優(yōu)化設(shè)計(jì),制定了相應(yīng)的加工工藝流程,探索了器件圓片級(jí)低真空封裝的結(jié)構(gòu)設(shè)計(jì)與工藝。研制出的原理樣機(jī)在3 g、606 Hz的振動(dòng)激勵(lì)下,輸出電壓為11.02V,輸出功率達(dá)到660.06μW。論文的主要研究工作是:(1)分析了微型壓電振動(dòng)能量收集器的研究現(xiàn)狀,確定了論文的研究目標(biāo)和研究?jī)?nèi)容;(2)以某大型發(fā)動(dòng)機(jī)故障監(jiān)測(cè)系統(tǒng)為具體應(yīng)用對(duì)象,提出了基于共質(zhì)量塊懸臂梁陣列的微型壓電振動(dòng)能量收集器新結(jié)構(gòu),研究了微型壓電振動(dòng)能量收集器的工作原理;基于壓電懸臂梁振動(dòng)能量收集器的集總參數(shù)模型,分析了影響能量收集器輸出性能的主要因數(shù);(3)開展了應(yīng)用環(huán)境研究,確定了微型壓電懸臂梁陣列振動(dòng)能量收集器的主要技術(shù)指標(biāo),制定了器件結(jié)構(gòu)的優(yōu)化途徑;采用ANSYS有限元仿真軟件分別完成了能量采集芯片和圓片級(jí)低真空封裝結(jié)構(gòu)的結(jié)構(gòu)參數(shù)優(yōu)化設(shè)計(jì);(4)基于微型壓電懸臂梁陣列振動(dòng)能量收集器的結(jié)構(gòu)及實(shí)驗(yàn)室MEMS工藝條件,制定了器件的加工工藝流程,采用L-Edit軟件完成了掩模版圖設(shè)計(jì),采用MEMS工藝研制出了原理樣機(jī);探索了圓片級(jí)低真空鍵合工藝;(5)研究了器件的測(cè)試方法,搭建了測(cè)試平臺(tái),完成了樣機(jī)性能測(cè)試與分析:樣機(jī)在3 g、606 Hz的振動(dòng)激勵(lì)下,開路電壓為11.02 V,輸出功率為660.06μW,實(shí)驗(yàn)表明論文設(shè)計(jì)的共質(zhì)量塊微型懸臂梁陣列壓電振動(dòng)能量收集器的性能達(dá)到設(shè)計(jì)指標(biāo),能滿足實(shí)際應(yīng)用需求。
[Abstract]:With the rapid development of micro-energy collector technology and many applications, how to achieve the efficient acquisition and conversion of environmental kinetic energy, In this paper, a new structure of micro piezoelectric vibration energy collector based on common mass block cantilever array is proposed, which is based on a large engine fault monitoring system. The structure and working principle of the micro piezoelectric cantilever array vibration energy collector are introduced, and the main factors affecting the output performance of the energy collector are analyzed based on lumped parameter model. The optimization design of the structural parameters of the vibration energy collector of the micro piezoelectric cantilever array has been completed by using the ANSYS finite element simulation software, and the corresponding processing process has been worked out. The structure design and technology of wafer level low vacuum packaging are explored. The principle prototype is developed under vibration excitation of 3 g / 606 Hz. The output voltage is 11.02 V and the output power is 660.06 渭 W. the main work of this paper is to analyze the research status of the micro piezoelectric vibration energy collector. The research object and content of this paper are determined. A new structure of micro piezoelectric vibration energy collector based on common mass block cantilever array is proposed, which takes a large engine fault monitoring system as the concrete application object. Based on the lumped parameter model of piezoelectric cantilever beam vibration energy collector, the main factor affecting the output performance of the energy collector is analyzed. The main technical specifications of the vibration energy collector of the micro piezoelectric cantilever array are determined, and the optimization method of the device structure is established. ANSYS finite element simulation software is used to optimize the structure parameters of the energy acquisition chip and the wafer low vacuum packaging structure. The structure of the vibration energy collector based on the micro piezoelectric cantilever array and the MEMS process conditions in the laboratory are presented. The fabrication process of the device is established, the mask chart is designed with L-Edit software, the principle prototype is developed by using MEMS process, the wafer level low vacuum bonding process is explored and the testing method of the device is studied, and the test platform is built. The performance test and analysis of the prototype is completed: the prototype is excited by vibration of 3 g or 606 Hz. The open circuit voltage is 11.02 V and the output power is 660.06 渭 W. the experiment shows that the performance of the piezoelectric vibration energy collector designed in this paper can meet the design targets and meet the practical application requirements.
【學(xué)位授予單位】：重慶大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2016
【分類號(hào)】：TM619

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