銅基底預(yù)處理對(duì)CVD法生長(zhǎng)石墨烯薄膜的影響(英文)
發(fā)布時(shí)間:2024-01-24 16:36
化學(xué)氣相沉積法是制備大尺寸、高質(zhì)量石墨烯的有效方法,其中金屬催化劑的性能直接關(guān)系到所制備的石墨烯材料的品質(zhì),因此需對(duì)金屬催化劑進(jìn)行表面預(yù)處理。本文研究了不同的預(yù)處理工藝對(duì)常用的銅基底催化劑表面狀態(tài)的影響,提出了鈍化膏酸洗和電化學(xué)拋光協(xié)同處理的有效方法,并對(duì)電化學(xué)拋光工藝參數(shù)(拋光電壓、時(shí)間)以及銅基底退火工藝(退火溫度、時(shí)間)等進(jìn)行了系統(tǒng)研究。研究表明:電化學(xué)拋光電壓過(guò)高、拋光時(shí)間過(guò)長(zhǎng)容易導(dǎo)致過(guò)度拋光,合適的拋光電壓和拋光時(shí)間分別為8V和8 min。退火溫度和時(shí)間對(duì)銅催化劑表面晶粒形態(tài)影響較大,經(jīng)1000℃退火處理30 min后,銅箔表面晶粒尺寸更大,分布更均勻。此外,對(duì)CVD法生長(zhǎng)制備的石墨烯樣品進(jìn)行表征,電鏡圖片和拉曼光譜顯示,獲得的石墨烯薄膜的層數(shù)較少,且結(jié)構(gòu)缺陷較少。
【文章頁(yè)數(shù)】:6 頁(yè)
【文章目錄】:
1 Experimental
1.1 Materials
1.2 Pretreatment of copper substrates
1.3 Graphene growth by CVD
1.4 Characterization
2 Results and discussion
2.1 Different pretreatment on copper substrate
2.2 Effect of electrochemical polishing volt-age and polishing time
2.3 Effect of annealing temperature
2.4 Effect of annealing time
2.5 Graphene characterization
3 Conclusion
本文編號(hào):3884100
【文章頁(yè)數(shù)】:6 頁(yè)
【文章目錄】:
1 Experimental
1.1 Materials
1.2 Pretreatment of copper substrates
1.3 Graphene growth by CVD
1.4 Characterization
2 Results and discussion
2.1 Different pretreatment on copper substrate
2.2 Effect of electrochemical polishing volt-age and polishing time
2.3 Effect of annealing temperature
2.4 Effect of annealing time
2.5 Graphene characterization
3 Conclusion
本文編號(hào):3884100
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