原位微納米壓痕測試裝置設(shè)計分析與試驗研究
發(fā)布時間：2018-12-17 05:26
【摘要】：新材料、新工藝的研究與應(yīng)用是推動科技發(fā)展的重要因素，為獲得材料更好的性能，人們對材料性能的研究逐漸從宏觀層面發(fā)展到微觀層面，測試精度從毫米級別，到微/納米級別。因此，研制開發(fā)能夠?qū)Σ牧衔⒂^力學行為進行精確測試的，并能夠?qū)Σ牧显诙喾N載荷作用下對材料的變形及損傷機制進行有效評估的儀器裝備顯得十分重要。 本論文在查閱大量國內(nèi)外相關(guān)文獻的基礎(chǔ)上，對比國內(nèi)外壓痕測試儀器的發(fā)展現(xiàn)狀和現(xiàn)存問題進行總結(jié)歸納，結(jié)合項目設(shè)計要求，對測試裝置進行基礎(chǔ)理論分析修正、整體結(jié)構(gòu)設(shè)計、零部件設(shè)計分析、控制方案設(shè)計研究、裝配調(diào)試和校準等工作。在此基礎(chǔ)之上，利用自制的儀器開展典型材料的壓痕測試和較大壓入深度情況下的原位測試試驗。論文主要研究內(nèi)容概括如下： （1）本論文在查閱大量國內(nèi)外相關(guān)文獻的基礎(chǔ)上，分析微納米壓痕測試技術(shù)和原位測試技術(shù)的國內(nèi)外發(fā)展現(xiàn)狀，對市場上廣泛應(yīng)用的壓痕測試儀器進行詳細介紹和綜合評定，總結(jié)歸納現(xiàn)有壓痕測試儀器的優(yōu)點和缺點；對材料原位測試技術(shù)的國內(nèi)研究進展進行詳細介紹，總結(jié)出材料原位測試技術(shù)的發(fā)展趨勢和瓶頸。 （2）以經(jīng)典理論——OliverPharr方法為本文所述裝置的理論基礎(chǔ)，詳細推導(dǎo)其計算過程，并提出補充修正算法；歸類常用壓電材料，詳述壓電疊堆特性和局限性，指導(dǎo)壓電元器件選擇和使用；建立微納米壓痕測試裝置的核心零件——柔性鉸鏈的剛度數(shù)學模型，并推導(dǎo)出其軸向剛度的數(shù)學算法，為后續(xù)的仿真分析提供理論依據(jù)。對裝置控制方案進行設(shè)計分析，為控制程序編寫提供指導(dǎo)。 （3）從精確實現(xiàn)原位微納米壓痕測試功能的角度出發(fā)，滿足設(shè)計參數(shù)要求前提下，結(jié)合整機結(jié)構(gòu)合理布置本裝置結(jié)構(gòu)及位置，運用微納米壓痕測試力學和原位觀測的原理和方法，結(jié)合現(xiàn)有檢測手段和設(shè)備，選擇恰當?shù)臋z測措施及設(shè)備，優(yōu)化布局檢測部件位置，結(jié)合整機精度要求適當利用不同動力驅(qū)動和載荷加載方式，為裝置提供精確的速度和位移，從而實現(xiàn)對試件材料進行微納米壓痕測試試驗和原位觀測測試試驗。 （4）以確保和檢驗測試裝置的精度、重復(fù)性和穩(wěn)定性為目的，，采用適當標定方法和設(shè)備，對力傳感器反復(fù)多次標定試驗，驗證其信號的線性度和穩(wěn)定性，歸類分析各種影響壓痕測試試驗的因素，提出相應(yīng)解決辦法，對多種典型常見材料進行多次不同最大壓入載荷下的測試試驗，對儀器測試結(jié)果進行分析檢驗，并修正測試算法。在此基礎(chǔ)上，利用該儀器對T2紫銅和N6鎳進行較大壓入深度情況下的原位測試實驗，依據(jù)測試結(jié)果對該材料性能進行分析。
[Abstract]:The research and application of new materials and new processes are important factors to promote the development of science and technology. In order to obtain better properties of materials, the research on material properties has gradually developed from macroscopic to microscopic, and the precision of testing has changed from millimeter level. To the micro / nano level. Therefore, it is very important to develop instruments that can accurately test the microscopic mechanical behavior of materials and can effectively evaluate the deformation and damage mechanism of materials under various loads. On the basis of consulting a large number of domestic and foreign related literature, this paper compared the development status and existing problems of indentation testing instruments at home and abroad, combined with the project design requirements, the basic theoretical analysis and correction of the testing device, Integral structure design, parts design analysis, control scheme design research, assembly debugging and calibration work. On this basis, the indentation test of typical materials and the in-situ test under the condition of large indentation depth are carried out by using the self-made instrument. The main contents of this thesis are summarized as follows: (1) on the basis of consulting a large number of domestic and foreign literature, this paper analyzes the domestic and international development of micro-nano indentation testing technology and in-situ testing technology. The indentation testing instruments widely used in the market are introduced and evaluated in detail, and the advantages and disadvantages of the existing indentation testing instruments are summarized. The domestic research progress of in-situ testing technology is introduced in detail, and the development trend and bottleneck of in-situ testing technology are summarized. (2) based on the classical theory, the OliverPharr method is used as the theoretical basis of the device described in this paper, the calculation process is deduced in detail, and a supplementary correction algorithm is proposed. The common piezoelectric materials are classified and the characteristics and limitations of piezoelectric stack are described in detail to guide the selection and use of piezoelectric components. The stiffness mathematical model of flexure hinge, the core part of micro-nano indentation testing device, is established, and the mathematical algorithm of axial stiffness is deduced, which provides a theoretical basis for subsequent simulation analysis. Design and analyze the control scheme of the device and provide guidance for the programming of the control program. (3) from the point of view of accurately realizing the function of in-situ micro-nano indentation testing and satisfying the requirements of design parameters, the structure and position of the device are reasonably arranged in combination with the whole machine structure. Using the principle and method of micro-nano indentation testing mechanics and in situ observation, combining with the existing testing means and equipment, selecting the appropriate detection measures and equipment, optimizing the location of the inspection parts. According to the accuracy requirement of the whole machine, different dynamic driving and load loading modes are used properly to provide accurate velocity and displacement for the device, so that the micro-nano indentation test and in-situ observation test of the material can be carried out. (4) in order to ensure and verify the accuracy, repeatability and stability of the test device, the force sensor is calibrated repeatedly by using appropriate calibration methods and equipment to verify the linearity and stability of its signal. The factors affecting indentation test are classified and analyzed, and the corresponding solutions are put forward. The test results of several typical common materials under different maximum indentation loads are analyzed and verified, and the test algorithm is revised. On the basis of this, the in-situ test of T2 copper and N6 nickel were carried out under the condition of high depth of indentation, and the properties of the material were analyzed according to the test results.
【學位授予單位】：吉林大學
【學位級別】：碩士
【學位授予年份】：2015
【分類號】：TB383.1
本文編號：2383724
[Abstract]:The research and application of new materials and new processes are important factors to promote the development of science and technology. In order to obtain better properties of materials, the research on material properties has gradually developed from macroscopic to microscopic, and the precision of testing has changed from millimeter level. To the micro / nano level. Therefore, it is very important to develop instruments that can accurately test the microscopic mechanical behavior of materials and can effectively evaluate the deformation and damage mechanism of materials under various loads. On the basis of consulting a large number of domestic and foreign related literature, this paper compared the development status and existing problems of indentation testing instruments at home and abroad, combined with the project design requirements, the basic theoretical analysis and correction of the testing device, Integral structure design, parts design analysis, control scheme design research, assembly debugging and calibration work. On this basis, the indentation test of typical materials and the in-situ test under the condition of large indentation depth are carried out by using the self-made instrument. The main contents of this thesis are summarized as follows: (1) on the basis of consulting a large number of domestic and foreign literature, this paper analyzes the domestic and international development of micro-nano indentation testing technology and in-situ testing technology. The indentation testing instruments widely used in the market are introduced and evaluated in detail, and the advantages and disadvantages of the existing indentation testing instruments are summarized. The domestic research progress of in-situ testing technology is introduced in detail, and the development trend and bottleneck of in-situ testing technology are summarized. (2) based on the classical theory, the OliverPharr method is used as the theoretical basis of the device described in this paper, the calculation process is deduced in detail, and a supplementary correction algorithm is proposed. The common piezoelectric materials are classified and the characteristics and limitations of piezoelectric stack are described in detail to guide the selection and use of piezoelectric components. The stiffness mathematical model of flexure hinge, the core part of micro-nano indentation testing device, is established, and the mathematical algorithm of axial stiffness is deduced, which provides a theoretical basis for subsequent simulation analysis. Design and analyze the control scheme of the device and provide guidance for the programming of the control program. (3) from the point of view of accurately realizing the function of in-situ micro-nano indentation testing and satisfying the requirements of design parameters, the structure and position of the device are reasonably arranged in combination with the whole machine structure. Using the principle and method of micro-nano indentation testing mechanics and in situ observation, combining with the existing testing means and equipment, selecting the appropriate detection measures and equipment, optimizing the location of the inspection parts. According to the accuracy requirement of the whole machine, different dynamic driving and load loading modes are used properly to provide accurate velocity and displacement for the device, so that the micro-nano indentation test and in-situ observation test of the material can be carried out. (4) in order to ensure and verify the accuracy, repeatability and stability of the test device, the force sensor is calibrated repeatedly by using appropriate calibration methods and equipment to verify the linearity and stability of its signal. The factors affecting indentation test are classified and analyzed, and the corresponding solutions are put forward. The test results of several typical common materials under different maximum indentation loads are analyzed and verified, and the test algorithm is revised. On the basis of this, the in-situ test of T2 copper and N6 nickel were carried out under the condition of high depth of indentation, and the properties of the material were analyzed according to the test results.
【學位授予單位】：吉林大學
【學位級別】：碩士
【學位授予年份】：2015
【分類號】：TB383.1
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