發(fā)布時(shí)間：2018-11-27 21:27

【摘要】：節(jié)能環(huán)保等功能建筑材料已成為全球性問(wèn)題。據(jù)統(tǒng)計(jì),采暖、制冷和采光所使用的能源所占建筑物總能耗的份額,目前在中國(guó)約達(dá)30%,而在英國(guó)等歐洲地區(qū)則高達(dá)40%以上。節(jié)能鍍膜玻璃是通過(guò)制備適當(dāng)?shù)哪は祦?lái)控制和利用太陽(yáng)光熱輻射以實(shí)現(xiàn)建筑節(jié)能。目前市場(chǎng)上的主要節(jié)能玻璃為低輻射玻璃,但是這種節(jié)能玻璃具有使用區(qū)域有限且不能對(duì)光的入射智能調(diào)控的缺點(diǎn),氧化釩智能窗則可以克服這些局限性,是更理想的節(jié)能建筑窗材料。針對(duì)熱致色變VO2薄膜的可見(jiàn)光透過(guò)率低、相變溫度偏高等問(wèn)題,本文采用制備超薄薄膜復(fù)合低輻射膜層的方式來(lái)解決上述問(wèn)題。在本文中,我們采用直流磁控濺射和射頻磁控濺射相結(jié)合的方式來(lái)制備氧化釩薄膜、摻雜氧化釩薄膜以及低輻射-氧化釩復(fù)合膜系的玻璃。在這里我們的思路是通過(guò)對(duì)薄膜的厚度和孔隙率等條件的優(yōu)化,使薄膜同時(shí)具有高透過(guò)和降低的相變溫度等特點(diǎn)。針對(duì)超薄膜層的紫外輻射和紅外輻射較高的缺點(diǎn),我們利用低輻射膜層進(jìn)行復(fù)合以降低薄膜的輻射率。研究過(guò)程中我們利用了XRD、SEM、變溫透過(guò)等不同的測(cè)試手段對(duì)所制備的薄膜的光學(xué)透過(guò)、微觀結(jié)構(gòu)等不同的性能進(jìn)行了測(cè)試與表征,得出如下結(jié)論:1.不同濺射時(shí)間和退火工藝參數(shù)的控制對(duì)薄膜的整體性能有著至關(guān)重要的影響。通過(guò)工藝參數(shù)的優(yōu)化,我們成功制備出了具有良好可見(jiàn)透過(guò)和良好紅外調(diào)控能力的氧化釩薄膜,優(yōu)化后的工藝為濺射時(shí)間為1.5 min、退火溫度450℃、退火真空度100 Pa、升溫速率5℃/min、保溫時(shí)間0.5 h,該薄膜可見(jiàn)透過(guò)達(dá)到了到70%以上,同時(shí)高低溫相2000 nm處透過(guò)率差值達(dá)到44%,2.通過(guò)W元素的引入,薄膜的相變溫度得到明顯降低,其中摻雜0.5%的薄膜的相變溫度降低至44℃。3.針對(duì)薄膜厚度降低產(chǎn)生的紅外輻射率較高和紫外輻射率提高的問(wèn)題,我們選擇用低輻射玻璃進(jìn)行復(fù)合以降低薄膜的整體輻射率,并研究了不同的復(fù)合結(jié)構(gòu)對(duì)薄膜的紅外調(diào)制能力和可見(jiàn)透過(guò)等性能的影響,以期找出性能最優(yōu)的復(fù)合方式。通過(guò)測(cè)試發(fā)現(xiàn)發(fā)現(xiàn)第一種復(fù)合方式雖然能有效降低薄膜整體的輻射率,但薄膜后的紅外調(diào)控能力以及可見(jiàn)透過(guò)都有較大的降低。采用氧化釩薄膜/低輻射薄膜/襯底的復(fù)合形式,發(fā)現(xiàn)這種復(fù)合方式中低輻射膜層能夠?qū)Ρ∧ぶ械木ЯＦ鸬秸T導(dǎo)生長(zhǎng)的作用,同時(shí)能夠有效的降低薄膜的紅外輻射和紫外輻射的透過(guò)率,復(fù)合后整體性能優(yōu)于第一種復(fù)合方式,但第二種復(fù)合方式會(huì)對(duì)氧化釩膜層的可見(jiàn)透過(guò)和紅外調(diào)制能力產(chǎn)生一定的影響。低輻射薄膜/氧化釩薄膜/襯底的結(jié)構(gòu)能夠在有效降低薄膜的紫外輻射和紅外透過(guò)率同時(shí)對(duì)薄膜的紅外調(diào)制能力、可見(jiàn)透過(guò)等性能影響較小。
[Abstract]:Energy conservation and environmental protection and other functional building materials have become a global problem. According to statistics, the energy used for heating, cooling and lighting accounts for about 30 percent of the total building energy consumption in China, compared with more than 40 percent in Europe such as the United Kingdom. Energy-saving coating glass is to control and utilize solar heat radiation to realize building energy saving by making appropriate film system. At present, the main energy saving glass in the market is low radiation glass, but this kind of energy saving glass has the shortcoming of limited use area and can not be adjusted intelligently to light, and vanadium oxide smart window can overcome these limitations. Is a more ideal energy-efficient building window materials. In order to solve the problems of low visible light transmittance and high phase transition temperature of thermochromic VO2 thin films, the preparation of ultra-thin composite low radiation films is used to solve the above problems in this paper. In this paper, the vanadium oxide thin films, doped vanadium oxide films and low radiation-vanadium oxide composite films were prepared by the combination of DC magnetron sputtering and RF magnetron sputtering. Here, our idea is to optimize the thickness and porosity of the film, so that the film has the characteristics of high permeation and decreasing phase transition temperature at the same time. In order to reduce the emissivity of the ultrathin film, we use the low radiation film to reduce the radiation rate of the ultrathin film due to its high ultraviolet radiation and infrared radiation. In the course of the study, the optical transmission, microstructure and other properties of the films were measured and characterized by using different testing methods, such as XRD,SEM, temperature transmission and so on. The conclusions are as follows: 1. The control of different sputtering time and annealing process parameters has an important effect on the overall properties of the films. Vanadium oxide thin films with good visible transmission and good infrared regulation were successfully prepared by optimizing the process parameters. The optimized process was: sputtering time 1.5 min, annealing temperature 450 鈩，

本文編號(hào)：2362077