【摘要】：陶瓷/金屬復(fù)合材料具有良好的導(dǎo)電、導(dǎo)熱性,耐高溫性和較高的機(jī)械強(qiáng)度,在混合集成電路和真空電子器件中具有廣泛的應(yīng)用,但是金屬與陶瓷的連接較為困難,因此,本文主要就氧化鋁陶瓷的金屬化工藝及其與金屬化漿料的燒結(jié)匹配性進(jìn)行了研究。本文通過流延法制備了氧化鋁陶瓷基片,并確定了其制備的工藝參數(shù);通過對金屬化漿料的組成和性能以及絲網(wǎng)印刷工藝的研究,確定了金屬鎢漿料的最佳粘度值和絲網(wǎng)印刷的最優(yōu)工藝條件;通過對陶瓷基片和鎢金屬粉的熱分析,確定了優(yōu)化脫脂制度和燒結(jié)最高溫度,并對產(chǎn)品的性能進(jìn)行測試分析。氧化鋁陶瓷基片流延成型工藝中,漿料固含量為73-75wt%,粘度在1-1.5Pa·s之間,符合流延最佳粘度條件;流延溫度控制在30±0.5℃范圍內(nèi),儲料槽中液位高度控制在20±2mm范圍,制得的氧化鋁生坯片表面平滑,無宏觀缺陷。通過對鎢金屬漿料的性能和絲網(wǎng)印刷工藝參數(shù)的研究得:鎢金屬漿料固含量為80%時(shí),粘度值為110Pa·s,符合絲網(wǎng)印刷要求的粘度范圍100-300Pa·s;絲網(wǎng)印刷采用離網(wǎng)間距為1.75mm、刮刀角度為65°、刮刀歪度為20°的工藝,可以得到表面平整,邊緣清晰,無空隙,厚度均勻的金屬化層圖案。通過對氧化鋁陶瓷基片和鎢金屬粉的熱分析,確定脫脂溫度制度為:室溫以1℃/min的升溫速率至350℃,其中215℃和350℃各保溫15min,再以1.7℃/min升溫至600℃,600℃保溫10min。脫脂氣氛采用氮?dú)獗Ｗo(hù)的濕氫氣氣氛,避免金屬鎢被過度氧化。采用1550℃的燒結(jié)溫度,氧化鋁陶瓷和鎢金屬化層結(jié)合緊密,燒結(jié)致密,樣品達(dá)到致密性要求。氧化鋁基片燒結(jié)收縮率為16.5%,添加還原鎢粉后,鎢金屬化層的燒結(jié)收縮率為13.8%,共燒后基本相匹配,無明顯缺陷;實(shí)驗(yàn)測得試樣的方阻小于0.05Ω/□,符合厚膜導(dǎo)體漿料導(dǎo)電性能的標(biāo)準(zhǔn)。
[Abstract]:Ceramic / metal composites have good electrical conductivity, thermal conductivity, high temperature resistance and high mechanical strength. They are widely used in hybrid integrated circuits and vacuum electronic devices, but the connection between metals and ceramics is difficult. In this paper, the metallization process of alumina ceramics and its sintering compatibility with metallized slurry were studied. In this paper, alumina ceramic substrate was prepared by casting method, and the process parameters were determined, and the composition and properties of metallized slurry and screen printing technology were studied. The optimum viscosity value of metal tungsten paste and the optimum process conditions of screen printing were determined, and the optimum degreasing process and the highest sintering temperature were determined by thermal analysis of ceramic substrate and tungsten metal powder, and the properties of the product were tested and analyzed. In the casting process of alumina ceramic substrate, the solid content of slurry is 73-75 wt.The viscosity is between 1-1.5Pa s, which accords with the optimum viscosity condition of casting, the casting temperature is controlled in the range of 30 鹵0.5 鈩，

本文編號：2271377