【摘要】：為了研究場發(fā)射冷陰極電流跌落機(jī)制,采用四極質(zhì)譜儀實時分析的方法研究了碳納米管陰極場發(fā)射器件的放氣特性及工作狀態(tài)下器件內(nèi)殘余氣體對陰極場發(fā)射性能的影響.結(jié)果表明:碳納米管陰極場發(fā)射器件工作時,放出氣體的主要成份是H_2,CO_2,CO;隨著陰極發(fā)射電流密度的增加,氣體成份的分壓也隨著增加.碳納米管陰極的場發(fā)射性能,例如開啟場強(qiáng)、閾值場強(qiáng)和場發(fā)射電流密度都與放出氣體壓強(qiáng)密切相關(guān).碳納米管陰極在壓強(qiáng)為2.1×10~(-3)Pa的殘余氣體環(huán)境下工作1.5 h后,開啟場強(qiáng)和閾值場強(qiáng)相應(yīng)增加了29.4%和50.0%.陰極受殘余氣體影響,一方面陰極發(fā)射材料表面功函數(shù)增加;另一方面陰極發(fā)射體場增強(qiáng)因子減小.增大的功函數(shù)和減小的場增強(qiáng)因子降低了陰極的場發(fā)射性能.因此,場發(fā)射器件放氣是陰極電流跌落的重要原因.
[Abstract]:In order to study the mechanism of field emission cold cathode current drop, the discharge characteristics of carbon nanotube cathode field emission devices and the effect of residual gas in the device on the cathode field emission performance were studied by using a real time quadrupole mass spectrometer. The results show that when the cathode field emission devices of carbon nanotubes work, the main component of the gas emission is H2CO2COG, and the partial pressure of the gas component increases with the increase of the cathode emission current density. The field emission properties of carbon nanotube cathodes, such as open field strength, threshold field intensity and field emission current density, are closely related to the pressure of the released gas. The opening field strength and threshold field strength of the carbon nanotube cathode increased by 29.4% and 50.0% respectively after working in the residual gas environment with a pressure of 2.1 脳 10 ~ (-3) Pa for 1.5 h. The cathode is affected by the residual gas, on the one hand, the surface work function of the cathode emitter increases; on the other hand, the field enhancement factor of the cathode emitter decreases. The field emission performance of the cathode is reduced by increasing the work function and decreasing the field enhancement factor. Therefore, field emission device degassing is an important reason for cathodic current drop.
【作者單位】： 南京工程學(xué)院數(shù)理部;南京師范大學(xué)物理科學(xué)與技術(shù)學(xué)院;東南大學(xué)電子科學(xué)與工程學(xué)院;
【基金】：國家自然科學(xué)基金(11504167、61674029) 江蘇省自然科學(xué)基金(BK20141390) 南京工程學(xué)院自然科學(xué)基金(QKJB201409、CKJC201602)
【分類號】：TN103;TB383.1

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