【摘要】：Parylene C膜(聚氯代對二甲苯,簡稱PC膜)具有優(yōu)異的防潮、防霉、防腐、防煙霧以及電絕緣、物理機械、光學和生物相容等特性,廣泛應用于半導體、傳感器、微電子器件和材料防潮保護等領域。然而,在對透濕性能要求更高的應用場合,PC膜還是難以滿足要求,需要進行改性或復合其它涂層,以提高其對水蒸汽的阻隔性能。但是,由于PC膜的表面能低,很難在其表面涂覆附著力優(yōu)異的無機阻隔材料,而現(xiàn)有的表面改性法,如化學表面氧化、等離子體處理、紫外輻照等方法可以用來提高PC膜的表面能,但都會不同程度地損傷PC膜,影響其原有的優(yōu)異綜合性能。因此非常有必要尋找新的、無損的表面改性方法,提高復合涂層材料在PC膜表面的附著力。本研究結合Parylene C膜獨特的分子結構特征,采用一種新型的表面改性技術,即超熱氫交聯(lián)技術(Hyperthermal Hydrogen Induced Cross-linking,HHIC)對PC膜表面進行改性,以期提高PC膜的水汽阻隔性能和與其它涂層的附著力。HHIC技術是利用系統(tǒng)內(nèi)部的質子和氫氣碰撞產(chǎn)生具有適當能量的氫分子(能量大于10 eV的氫分子稱為超熱氫分子),當超熱氫碰撞有機材料表面時可以選擇性地斷裂碳氫鍵而不破壞其它化學鍵,產(chǎn)生的碳自由基同時相互偶合實現(xiàn)分子鏈交聯(lián)。由于這種方法使用的氫分子能量可控,可以有效地保留所需的官能團,且不會對有機薄膜產(chǎn)生物理性破壞,是一種環(huán)境友好的、溫和的表面改性方法。我們利用這種方法對PC薄膜進行表面改性,主要結果如下:(1)利用超熱氫對PC膜進行表面處理,可以實現(xiàn)PC膜表面分子鏈的交聯(lián),使薄膜的水蒸汽透過率從原來的0.48 g/(m2·day)下降到0.12 g/(m2·day);而PC膜原有的透光性和機械強度沒有受到影響;(2)利用HHIC技術可將極性聚丙烯酸(PAA)分子接枝到PC膜表面分子鏈上,使PC膜表面潤濕性得到改善(水接觸角從初始的84°下降到23°);(3)為了更進一步提高PC膜的水汽阻隔性能,利用等離子體增強化學氣相沉積法(PECVD)分別在PC和PC/PAA膜表面沉積了厚度為150 nm的SiO2涂層,水蒸汽透過率測試表明,SiO2涂層的引入可以大幅度提高薄膜的水汽阻隔性能,水蒸汽透過率從0.48 g/(m2·day)下降到0.01 g/(m2·day);同時,PC膜表面PAA的接枝顯著地提高PC與SiO2的結合力。
[Abstract]:Parylene C film (polychlorinated p-xylene, called PC film) has excellent moisture proof, mildew proof, anti-corrosion, smoke proof and electrical insulation, physical and mechanical, optical and biocompatible properties, and is widely used in semiconductors, sensors, microelectronic devices and material protection and other fields. However, the PC film is still in the application of higher moisture permeability. It is difficult to meet the requirements and need to be modified or compound other coatings to improve their resistance to water vapor. However, because the surface energy of the PC film is low, it is difficult to coat the inorganic barrier materials with excellent adhesion on its surface, and the existing surface modification methods, such as chemical surface oxidation, plasma treatment, ultraviolet radiation and so on, can be used to extract the material. The surface energy of the high PC film can damage the PC film to varying degrees and affect its original excellent comprehensive properties. Therefore, it is very necessary to find new, nondestructive surface modification methods to improve the adhesion of the composite coating on the surface of the PC film. This study combines the unique sub structure characteristics of the Parylene C film and uses a new surface modification technique. Hyperthermal Hydrogen Induced Cross-linking (HHIC) is used to modify the surface of the PC membrane to improve the water vapor barrier property of the PC film and the adhesion of the other coatings to the other coatings..HHIC technology is a hydrogen molecule with the energy greater than 10 eV (the hydrogen molecule greater than 10 eV). For the SUPERTHERMAL hydrogen molecule, the hydrogen bonds can be selectively broken when the SUPERTHERMAL hydrogen collide on the surface of the organic material and does not destroy other chemical bonds. The carbon free radicals produced by the molecules are simultaneously coupled to realize the molecular chain crosslinking. Biological reason destruction is an environmentally friendly, mild surface modification method. We use this method to modify the surface of PC film. The main results are as follows: (1) the surface treatment of PC membrane by super hot hydrogen can achieve the cross-linking of the molecular chain on the surface of the PC membrane, and the water vapor transmission rate of thin films descends from the original 0.48 g/ (m2. Day) to the surface. 0.12 g/ (M2 day), and the original transmittance and mechanical strength of the PC film have not been affected; (2) the use of HHIC technology can graft polar polyacrylic acid (PAA) molecules on the surface of the membrane of the PC membrane to improve the wettability of the surface of the PC film (the water contact angle decreases from the initial 84 degrees to 23 degrees). (3) in order to further improve the water vapor barrier property of the PC membrane, A SiO2 coating with a thickness of 150 nm was deposited on the surface of PC and PC/PAA films by plasma enhanced chemical vapor deposition (PECVD). The water vapor permeability test showed that the water vapor barrier property of the film could be greatly improved by the introduction of SiO2 coating, and the water vapor transmission rate decreased from 0.48 g / m2. Day to 0.01 g/ (M2 day). The grafting of PAA significantly improves the binding force between PC and SiO2.
【學位授予單位】：西南科技大學
【學位級別】：碩士
【學位授予年份】：2015
【分類號】：TB383.2;O631

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